NL6814460A - - Google Patents

Info

Publication number
NL6814460A
NL6814460A NL6814460A NL6814460A NL6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A NL 6814460 A NL6814460 A NL 6814460A
Authority
NL
Netherlands
Application number
NL6814460A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL6814460A publication Critical patent/NL6814460A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)
NL6814460A 1968-08-20 1968-10-09 NL6814460A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (de) 1968-08-20 1968-08-20 Verfahren zum Betrieb einer kryogenen Pumpstufe und Hochvakuumpumpanordnung zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
NL6814460A true NL6814460A (enrdf_load_stackoverflow) 1970-02-24

Family

ID=4385104

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6814460A NL6814460A (enrdf_load_stackoverflow) 1968-08-20 1968-10-09

Country Status (6)

Country Link
US (1) US3585807A (enrdf_load_stackoverflow)
CH (1) CH476215A (enrdf_load_stackoverflow)
DE (1) DE1934938C3 (enrdf_load_stackoverflow)
FR (1) FR2015963A1 (enrdf_load_stackoverflow)
GB (1) GB1256632A (enrdf_load_stackoverflow)
NL (1) NL6814460A (enrdf_load_stackoverflow)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
JPS60161702A (ja) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd 真空用冷却トラツプ
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
DE3518283C2 (de) * 1985-05-22 1994-09-22 Messer Griesheim Gmbh Verfahren zur Entfernung leichter flüchtiger Verunreinigungen aus Gasen
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
EP0250613B1 (de) * 1986-06-23 1991-07-17 Leybold Aktiengesellschaft Kryopumpe und Verfahren zum Betrieb dieser Kryopumpe
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
WO2005075826A1 (de) * 2004-02-03 2005-08-18 Universität Regensburg Vakuumpumpe und verfahren zum betrieb derselben
DE202023107255U1 (de) * 2023-12-07 2024-01-09 Vat Holding Ag Anordnung umfassend eine Kammer

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same

Also Published As

Publication number Publication date
DE1934938C3 (de) 1974-05-30
GB1256632A (enrdf_load_stackoverflow) 1971-12-08
US3585807A (en) 1971-06-22
FR2015963A1 (enrdf_load_stackoverflow) 1970-04-30
CH476215A (de) 1969-07-31
DE1934938B2 (de) 1973-10-25
DE1934938A1 (de) 1970-03-05

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