US3585807A - Method of and apparatus for pumping gas under cryogenic conditions - Google Patents

Method of and apparatus for pumping gas under cryogenic conditions Download PDF

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Publication number
US3585807A
US3585807A US850755A US3585807DA US3585807A US 3585807 A US3585807 A US 3585807A US 850755 A US850755 A US 850755A US 3585807D A US3585807D A US 3585807DA US 3585807 A US3585807 A US 3585807A
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Prior art keywords
condensation surfaces
chamber
gas
set forth
condensation
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Expired - Lifetime
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US850755A
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English (en)
Inventor
Jurgen Hengevoss
Hermann Wossner
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Balzers Patent und Beteiligungs AG
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Balzers Patent und Beteiligungs AG
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect

Definitions

  • the present invention is directed cryogenic a method of and apparatus for pumping gases under cryogenic conditions wherein the gas being pumped flows over deep-cooled condensation surfaces, and, more particularly, it is concerned with the enclosure for the condensation surfaces within the receiver and with the means for admitting gas for passage over the condensation surfaces.
  • the refrigeration output In bringing the operating temperature to the desired level under cryogenic operating conditions, the refrigeration output has to be rated in accordance with the desired short cooling period, as a result, if the working speed demanded for a modern industrial pumping station is to be attained, the initial refrigeration output is required to be several times higher than that necessary for actual pumping operation.
  • cryogenic pumping operations conducted by the supply of liquefied gases from a storage tank there is no problem in obtaining the greater refrigeration output required for the initial cooling phase since it can be supplied by a correspondingly larger refrigerant supply from the storage tank.
  • the novel characteristic involves the thermal insulation of the condensation surfaces from the heat within the receiver while the surfaces are being cooled to a predetermined temperature.
  • the surfaces for reducing the gas to the necessary low temperatures are disposed within a space containing the gases to be pumped and an adjustably movable device, operable from the exterior of the enclosed space, is arranged to admit the flow of gas over the cryogenically cooled surfaces, and the movable device is arranged to provide a thermal shield for the surfaces while the operating temperature is being established.
  • an enclosure device has been used for temporarily separating the cooled surfaces from the space to be evacuated.
  • the closure device for the cryogenically cooled condensation surfaces of the prior art is not sufficient.
  • the thermal separation can be effected by providing a thermal shield to enclose the condensation surfaces.
  • a thermal shield can be provided by cooling the surfaces of the shield or by the application of a thermal insulating material.
  • a simple covering about the condensation surfaces, as disclosed in the prior art is not sufficient because the surface of the covering facing toward the condensation surfaces acts as a heat radiation source of the same intensity as the receiver, which forms the space containing the gas without the covering, and the condensation surfaces would be exposed to the same temperatures.
  • FIG. I is a somewhat schematic vertical sectional view of an apparatus constructed in accordance with the present invention.
  • FIGS. 2a and 2b show another arrangement of apparatus in accordance with the present invention.
  • FIGS. 31: and 3b show still another embodiment of apparatus in accordance with the present invention for pumping gas under cryogenic conditions.
  • a receiver 2 encloses a chamber 1 which is to be evacuated in effecting the cryogenic pumping operation. Condensation surfaces which are deep-cooled during the cryogenic pumping operations are formed with the chamber 1 by means of a cooling coil 4 through which a refrigerant is passed. The refrigerant is circulated in a closed cycle flowing into the cooling coil 4 through and inlet line 5 and passing out through an outlet line 6 for flow through a refrigerator 7.
  • a cooling coil 4 through which a refrigerant is passed.
  • the refrigerant is circulated in a closed cycle flowing into the cooling coil 4 through and inlet line 5 and passing out through an outlet line 6 for flow through a refrigerator 7.
  • the condensation surfaces provided by the coil 4 are enclosed during the period in which the surfaces are brought to a predetermined low temperature.
  • the closure for the condensation surfaces is provided by a vertically movable hood member 8 which covers the sides and upper surface of the coil protecting it from any heat supply within the chamber ll of the receiver 2.
  • a column 9 extends into the receiver 2 through its base and is secured to the hood member.
  • a vacuum-proof seal is provided by a packing member MB for the opening through which the column 9 enters the receiver.
  • the column 9 is connected to a threaded spindle Ill and by means of gear wheels 12 mounted on the spindle and a servomotor I3, the column 9 and the hood 8 can be lifted or lowered within the receiver.
  • the hood 3 can be lifted from the position enclosing the condensation surfaces to a position designated by the reference character 8 fully exposing the condensation surfaces to the gas within the chamber I, or the hood can be positioned in any location intermediate the fully closed and fully opened positions in accordance with the operating conditions of the pumping system.
  • the exterior surface of the hood 8 is covered with a thermal insulating material I4 which prevents the condensation surfaces from being exposed to any heat within the receiver during the time when the surfaces are being cooled to the operating temperature.
  • the servomotor for positioning the hood is controlled by a control device which is connected to a temperature sensor I located adjacent the coil 4 for providing a continuous mea- I surement of the temperature of the condensation surfaces and thereby regulating the servomotor.
  • the protective hood is closed separating the cooling coil 41 from the remainder of the chamber I.
  • the condensation surfaces provided by the coil d are reduced to a predetermined temperature and the chamber I is evacuated by a forepump I03 through a line 17 containing a valve IfI which is in the opened position.
  • the protective hood 8 is opened and the pumping operation commences under full suction capacity. The establishment of the vacuum conditions within the receiver can be observed on the gauge l9 mounted on the receiver.
  • a receiver 21 provides a complete enclosure for a chamber 22 arranged to contain a gas to be pumped under cryogenic conditions.
  • a cooling coil 24 forms the condensation surfaces for reducing the gas to the desired low temperature.
  • An inlet line 25 and and outlet line 26 circulate a refrigerant through the cooling coil 24.
  • a heat radiation shield 23 surrounds the coil 24% and is formed along the sides and lower surfaces of the coiling coil 24 by a housing member 27 and the lower surface of this housing member is cooled by another cooling coil 28 soldered to it and through which another refrigerant flows at a higher temperature than that in the cooling coil 24 forming the condensation surfaces.
  • the heat shield is completed by a radiation shield 29 which covers the upper surface of the cooling coil.
  • the radiation shield 29 is constructed of a number of chevron-shaped sheets 30 arranged to prevent heat radiation within the receiver from being directed against the cooling coil 24.
  • Encircling the angle sheets 31 is another cooling pipe 311 having an inlet line 32 and an outlet line 33 for flowing refrigerant through the pipe.
  • the sheets 30 are supported by a frame 34 and, in turn, the frame is supported on a shaft 36 which extends through the wall of the receiver at through a device effecting a vacuum seal.
  • the inlet and outlet lines 32 and 33 for the cooling pipe 31 enter and leave the chamber 22 through the shaft 36.
  • the upper part 29 of the heat shield 23 enclosing the condensation surfaces can be pivoted by means of a shaft 365 between a position, as shown in FIG.
  • the shaft supporting the upper cover can be pivoted by hand or by a motor drive, such as shown in FIG. 2b comprising a gear transmission means 37 and a servomotor 38.
  • a control device 39 is connected to the servomotor for positioning the upper cover of the heat shield.
  • the servomotor is connected to a pressure gauge MI in such a manner, that after the predetermined temperature, for example 20 Kelvin, has been reached the condensation surfaces remain available for pumping as long as the pressure in the receiver does not exceed a predetermined value.
  • a forepump II. is connected to the receiver through a preevacuation line 42 which contains a valve 33 for establishing the desired vacuum conditions.
  • FIGS. 3a and 3b another embodiment of the present invention is shown providing individual adjustment of the various elements forming the heat shield enclosure for the condensation surfaces which afford a particularly advantageous gas throttling arrangement.
  • a receiver 45 encloses the space containing the gas to be pumped and, as with the other embodiments disclosed, the condensation surfaces are provided in the lower region of the receiver by means of a cooling coil 46.
  • a plurality of vertically disposed heat protection sheets are provided which are rotatable about their vertical axes as indicated by FIG. 3b.
  • the individual sheets 47 extend between an upper plate 38 and a lower plate $9 and can be rotated jointly by means of a transmission device composed of a central gear 50 and individual gears 51 each secured to the upper end of one of the heat protection sheets 47.
  • a vertically arranged shaft 53 is secured at its upper end to the driving gear 50 and extends downwardly through the cooling coil 46 and out of the receiver 45 through a packing device 52. Exteriorly of the receiver the shaft may be driven by hand or by means of a motor and gear transmission means as is shown in FIG. 3a.
  • a control device 55 Connected to the motor 54 is a control device 55 which is connected to a pressure gauge 56 for measuring the pressure within the receiver and to a temperature sensor 57 positioned adjacent the cooling coil 46 for determining the temperature of the condensation surfaces.
  • the predetermined temperature that is about 20 Kelvin
  • the gas inflow is regulated as a function of the pressure within the receiver to maintain a certain pressure, that is, about If) mm. Hg and the flow is throttled to a minimum.
  • the throttling is increased in an amount based on the quantity of the condensing gas in accordance with the constant refrigeration output.
  • the constant refrigeration output depends on the condensation temperature and the heat of condensation of the gas being pumped. Accordingly, the gas inflow over the condensation surfaces must be adjusted so that at a given refrigeration output the corresponding quantity of gas is admitted to flow over the surfaces.
  • the devices disclosed in FIGS. 2b and 3a employed, in accordance with the present invention, to insulate the condensation surfaces from the heat within the receiver at least during that part of the cooling of the surfaces when a predetermined temperature is being established, which temperature corresponds essentially to the operating temperature during pumping. Subsequently, by movably displacing the enclosure about the cooling coil, the condensation surfaces are fully exposed to the heat within the receiver.
  • the thermally insulating enclosure about the cooling coil can include any measures which effectively prevent the heat within the receiver from impinging on the condensation surfaces. It can be appreciated, of course, that a complete thermal insulation of the condensation surfaces is not possible. However, to attain the object of the present invention, a thermal insulation easily obtained by known measures, such as in tanks for liquefied gas, is sufficient.
  • a method of pumping a gas under cryogenic conditions comprising the steps of providing an enclosed space for the gas to be pumped, positioning deep cooled condensation sur faces within the enclosed space, thermally insulating the condensation surfaces from the heat supply within the enclosed space while cooling the condensation surfaces to a predetermined low temperature and while colling the condensation surfaces preventing the flow of the gas to be pumped over the surfaces, and regulating the flow of gas to the condensation surfaces after the predetermined temperature is reached.
  • Apparatus for pumping gas under cryogenic conditions comprising walls forming a closed chamber containing the gas to be pumped, means for forming condensation surfaces within the chamber for cooling the gas to the requisite low temperature, means for enclosing said condensation surfaces within said chamber for preventing the gas within said chamber from flowing over the condensation surfaces, means for thermally insulating said enclosing means for preventing heat within said chamber from affecting said condensation surfaces, and means for throttling the flow of gas within said chamber over said condensation surfaces.
  • said means for throttling the flow of gas comprising a shaft extending into said chamber and being secured to said hood, and means for engaging said shaft exteriorly of said chamber for displacing said hood member from its position enclosing said condensation surfaces for variably admitting flow of gas to said condensation surfaces.
  • said enclosing means comprising a housing enclosing a portion of said condensation surfaces, a cover for cooperation with said housing for completely enclosing said condensation surfaces, a cooling coil mounted on said housing for circulating a cooling medium therethrough for removing heat from said housing and preventing the heat from reaching said condensation surfaces, and said cover comprising a frame, a plurality of metallic plates mounted within said frame and arranged to prevent heat from within said chamber from contacting said condensation surfaces, and a second coil encircling said frame for removing heat therefrom.
  • Apparatus as set forth in c arm 4, wherein said enclosing means comprising a pair of spaced plates located on opposite sides of said condensation surfaces, a plurality of rotatable plate sections extending between said plates and being arranged in combination with said plates to completely enclose said condensation surfaces.
  • said means for throttling the flow of gas comprising a shaft member centrally located within said plate sections and extending into said chamber from the exterior of said wall means, a drive gear mounted on said shaft, a plurality of individual gears each mounted on one of said plate sections and in meshed engagement with said drive gear, and means for rotating said shaft whereby said drive gear is rotated and in turn individually rotates said plate sections for selectively admitting gas for flow over said condensation surfaces.
  • condensation surfaces comprising a cooling coil located within said chamber, and conduit means connected to said cooling coil for circulating a refrigerant therethrough.
  • Apparatus as set forth in claim 4, wherein means being connected to said chamber for establishing a vacuum therein.
  • Apparatus as set forth in claim 4, wherein a temperature sensor positioned within said chamber adjacent said condensation surfaces, a control device operatively connected to said temperature sensor, and drive means for opening and closing said throttle means being in communication with said control device which regulates the extent of the opening of said throttle means by said drive means.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)
US850755A 1968-08-20 1969-08-18 Method of and apparatus for pumping gas under cryogenic conditions Expired - Lifetime US3585807A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (de) 1968-08-20 1968-08-20 Verfahren zum Betrieb einer kryogenen Pumpstufe und Hochvakuumpumpanordnung zur Durchführung des Verfahrens

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US3585807A true US3585807A (en) 1971-06-22

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US850755A Expired - Lifetime US3585807A (en) 1968-08-20 1969-08-18 Method of and apparatus for pumping gas under cryogenic conditions

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US (1) US3585807A (enrdf_load_stackoverflow)
CH (1) CH476215A (enrdf_load_stackoverflow)
DE (1) DE1934938C3 (enrdf_load_stackoverflow)
FR (1) FR2015963A1 (enrdf_load_stackoverflow)
GB (1) GB1256632A (enrdf_load_stackoverflow)
NL (1) NL6814460A (enrdf_load_stackoverflow)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
US4485631A (en) * 1982-09-17 1984-12-04 Balzers Aktiengesellschaft Method and apparatus for rapidly regenerating a self-contained cryopump
US4607491A (en) * 1984-01-27 1986-08-26 Hajime Ishimaru Cooling trap for vacuum
US4614093A (en) * 1985-04-06 1986-09-30 Leybold-Heraeus Gmbh Method of starting and/or regenerating a cryopump and a cryopump therefor
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4755201A (en) * 1985-05-22 1988-07-05 Messer. Griesheim Gmbh Process for removing lighter volatile impurities from gases
US4757689A (en) * 1986-06-23 1988-07-19 Leybold-Heraeus Gmbh Cryopump, and a method for the operation thereof
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5426949A (en) * 1991-07-15 1995-06-27 Hitachi, Ltd. Vacuum vessel having a cooled member
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
WO1998006943A1 (de) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Kryopumpe
WO2025119840A1 (de) * 2023-12-07 2025-06-12 Vat Holding Ag Anordnung umfassend eine kammer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
WO2005075826A1 (de) * 2004-02-03 2005-08-18 Universität Regensburg Vakuumpumpe und verfahren zum betrieb derselben

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
US4485631A (en) * 1982-09-17 1984-12-04 Balzers Aktiengesellschaft Method and apparatus for rapidly regenerating a self-contained cryopump
US4607491A (en) * 1984-01-27 1986-08-26 Hajime Ishimaru Cooling trap for vacuum
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
US4614093A (en) * 1985-04-06 1986-09-30 Leybold-Heraeus Gmbh Method of starting and/or regenerating a cryopump and a cryopump therefor
US4755201A (en) * 1985-05-22 1988-07-05 Messer. Griesheim Gmbh Process for removing lighter volatile impurities from gases
EP0203340B1 (de) * 1985-05-22 1991-03-06 Messer Griesheim Gmbh Verfahren zur Entfernung leichter flüchtiger Verunreinigungen aus Gasen
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
US4757689A (en) * 1986-06-23 1988-07-19 Leybold-Heraeus Gmbh Cryopump, and a method for the operation thereof
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
US5426949A (en) * 1991-07-15 1995-06-27 Hitachi, Ltd. Vacuum vessel having a cooled member
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
WO1998006943A1 (de) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Kryopumpe
US6092373A (en) * 1996-08-09 2000-07-25 Leybold Vakuum Gmbh Cryopump
WO2025119840A1 (de) * 2023-12-07 2025-06-12 Vat Holding Ag Anordnung umfassend eine kammer

Also Published As

Publication number Publication date
NL6814460A (enrdf_load_stackoverflow) 1970-02-24
DE1934938C3 (de) 1974-05-30
GB1256632A (enrdf_load_stackoverflow) 1971-12-08
FR2015963A1 (enrdf_load_stackoverflow) 1970-04-30
CH476215A (de) 1969-07-31
DE1934938B2 (de) 1973-10-25
DE1934938A1 (de) 1970-03-05

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