FR2015963A1 - - Google Patents

Info

Publication number
FR2015963A1
FR2015963A1 FR6928173A FR6928173A FR2015963A1 FR 2015963 A1 FR2015963 A1 FR 2015963A1 FR 6928173 A FR6928173 A FR 6928173A FR 6928173 A FR6928173 A FR 6928173A FR 2015963 A1 FR2015963 A1 FR 2015963A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6928173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BETEILIGUNGS und PATENT
Original Assignee
BETEILIGUNGS und PATENT
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BETEILIGUNGS und PATENT filed Critical BETEILIGUNGS und PATENT
Publication of FR2015963A1 publication Critical patent/FR2015963A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)
FR6928173A 1968-08-20 1969-08-18 Withdrawn FR2015963A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (de) 1968-08-20 1968-08-20 Verfahren zum Betrieb einer kryogenen Pumpstufe und Hochvakuumpumpanordnung zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
FR2015963A1 true FR2015963A1 (fr) 1970-04-30

Family

ID=4385104

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6928173A Withdrawn FR2015963A1 (fr) 1968-08-20 1969-08-18

Country Status (6)

Country Link
US (1) US3585807A (fr)
CH (1) CH476215A (fr)
DE (1) DE1934938C3 (fr)
FR (1) FR2015963A1 (fr)
GB (1) GB1256632A (fr)
NL (1) NL6814460A (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
JPS60161702A (ja) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd 真空用冷却トラツプ
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3512614A1 (de) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur inbetriebnahme und/oder regenerierung einer kryopumpe und fuer dieses verfahren geeignete kryopumpe
DE3518283C2 (de) * 1985-05-22 1994-09-22 Messer Griesheim Gmbh Verfahren zur Entfernung leichter flüchtiger Verunreinigungen aus Gasen
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
EP0250613B1 (fr) * 1986-06-23 1991-07-17 Leybold Aktiengesellschaft Pompe cryogénique et procédé de cryopompage
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
WO2005075826A1 (fr) * 2004-02-03 2005-08-18 Universität Regensburg Pompe a vide et procede pour faire fonctionner cette pompe a vide

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same

Also Published As

Publication number Publication date
DE1934938B2 (de) 1973-10-25
DE1934938A1 (de) 1970-03-05
CH476215A (de) 1969-07-31
US3585807A (en) 1971-06-22
NL6814460A (fr) 1970-02-24
DE1934938C3 (de) 1974-05-30
GB1256632A (fr) 1971-12-08

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Legal Events

Date Code Title Description
ST Notification of lapse