GB1256632A - - Google Patents

Info

Publication number
GB1256632A
GB1256632A GB1256632DA GB1256632A GB 1256632 A GB1256632 A GB 1256632A GB 1256632D A GB1256632D A GB 1256632DA GB 1256632 A GB1256632 A GB 1256632A
Authority
GB
United Kingdom
Prior art keywords
screw
refrigerator
condensation surface
positions
condensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1256632A publication Critical patent/GB1256632A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)

Abstract

1,256,632. Refrigerating. BALZERS PATENT-UND BETEILIGUNGS A.G. 23 July, 1969 [20 Aug., 1968], No. 37050/69. Heading F4H. [Also in Division F1] The condensation surface 4 of a cryogenic pump is thermally insulated from gases to be pumped from a chamber 1 during the time the surface is cooled to its working temperature by refrigerant supplied from a refrigerator 7. The arrangement enables a smaller output refrigerator to be used without lengthening the cooldown time. As shown, the condensation surface 4 is insulated by a cap 8 axially movable towards a fully open position 8<SP>1</SP> by rotating a screw 11. The screw 11 is rotatable by hand or by a motor 13 controlled by a device 3 responsive to the temperature of the surface 4 detected by a sensor 15. In a second embodiment, Figs. 3a, 3b (not shown), a plurality of vanes arranged in a circle around the surface 4 are pivotable about vertical axes from positions in which they form a complete cylinder to positions providing open passages therebetween. Alternatively, Figs. 2a, 2b (not shown), the condensation surface is flat and arranged to be covered or uncovered by a liquid cooled circular baffle.
GB1256632D 1968-08-20 1969-07-23 Expired GB1256632A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (en) 1968-08-20 1968-08-20 Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method

Publications (1)

Publication Number Publication Date
GB1256632A true GB1256632A (en) 1971-12-08

Family

ID=4385104

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1256632D Expired GB1256632A (en) 1968-08-20 1969-07-23

Country Status (6)

Country Link
US (1) US3585807A (en)
CH (1) CH476215A (en)
DE (1) DE1934938C3 (en)
FR (1) FR2015963A1 (en)
GB (1) GB1256632A (en)
NL (1) NL6814460A (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
DE3216591A1 (en) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Cryogenic pump with shutter-like baffle
DE3330146A1 (en) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden DEVICE AND METHOD FOR THE QUICK REGENERATION OF AUTONOMOUS CRYOPUMPS
JPS60161702A (en) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd Cooling trap for vacuum
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
DE3518283C2 (en) * 1985-05-22 1994-09-22 Messer Griesheim Gmbh Process for removing volatile impurities from gases
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
EP0250613B1 (en) * 1986-06-23 1991-07-17 Leybold Aktiengesellschaft Cryopump and method of operating this cryopump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
DE19632123A1 (en) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Cryopump
WO2005075826A1 (en) * 2004-02-03 2005-08-18 Universität Regensburg Vacuum pump and method for operating the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same

Also Published As

Publication number Publication date
DE1934938B2 (en) 1973-10-25
DE1934938A1 (en) 1970-03-05
CH476215A (en) 1969-07-31
FR2015963A1 (en) 1970-04-30
US3585807A (en) 1971-06-22
NL6814460A (en) 1970-02-24
DE1934938C3 (en) 1974-05-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee