CH476215A - Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method - Google Patents

Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method

Info

Publication number
CH476215A
CH476215A CH1265168A CH1265168A CH476215A CH 476215 A CH476215 A CH 476215A CH 1265168 A CH1265168 A CH 1265168A CH 1265168 A CH1265168 A CH 1265168A CH 476215 A CH476215 A CH 476215A
Authority
CH
Switzerland
Prior art keywords
carrying
operating
vacuum pump
pump arrangement
pumping stage
Prior art date
Application number
CH1265168A
Other languages
German (de)
Inventor
Juergen Dr Hengevoss
Hermann Dipl Ing Woessner
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1265168A priority Critical patent/CH476215A/en
Priority to NL6814460A priority patent/NL6814460A/xx
Priority to DE1934938A priority patent/DE1934938C3/en
Priority to GB1256632D priority patent/GB1256632A/en
Publication of CH476215A publication Critical patent/CH476215A/en
Priority to FR6928173A priority patent/FR2015963A1/fr
Priority to US850755A priority patent/US3585807A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B23/00—Machines, plants or systems, with a single mode of operation not covered by groups F25B1/00 - F25B21/00, e.g. using selective radiation effect

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Separation By Low-Temperature Treatments (AREA)
CH1265168A 1968-08-20 1968-08-20 Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method CH476215A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (en) 1968-08-20 1968-08-20 Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method
NL6814460A NL6814460A (en) 1968-08-20 1968-10-09
DE1934938A DE1934938C3 (en) 1968-08-20 1969-07-10 High vacuum pumping arrangement
GB1256632D GB1256632A (en) 1968-08-20 1969-07-23
FR6928173A FR2015963A1 (en) 1968-08-20 1969-08-18
US850755A US3585807A (en) 1968-08-20 1969-08-18 Method of and apparatus for pumping gas under cryogenic conditions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1265168A CH476215A (en) 1968-08-20 1968-08-20 Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method

Publications (1)

Publication Number Publication Date
CH476215A true CH476215A (en) 1969-07-31

Family

ID=4385104

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1265168A CH476215A (en) 1968-08-20 1968-08-20 Method for operating a cryogenic pumping stage and high-vacuum pump arrangement for carrying out the method

Country Status (6)

Country Link
US (1) US3585807A (en)
CH (1) CH476215A (en)
DE (1) DE1934938C3 (en)
FR (1) FR2015963A1 (en)
GB (1) GB1256632A (en)
NL (1) NL6814460A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0370702A1 (en) * 1988-11-23 1990-05-30 AT&T Corp. Apparatus comprising a high vacuum chamber
EP0377030A1 (en) * 1988-06-02 1990-07-11 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
WO2005075826A1 (en) * 2004-02-03 2005-08-18 Universität Regensburg Vacuum pump and method for operating the same

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
DE3216591A1 (en) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Cryogenic pump with shutter-like baffle
DE3330146A1 (en) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden DEVICE AND METHOD FOR THE QUICK REGENERATION OF AUTONOMOUS CRYOPUMPS
JPS60161702A (en) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd Cooling trap for vacuum
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same
DE3512614A1 (en) * 1985-04-06 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln METHOD FOR COMMISSIONING AND / OR REGENERATING A CRYOPUM PUMP AND CYRUM PUMP SUITABLE FOR THIS METHOD
DE3518283C2 (en) * 1985-05-22 1994-09-22 Messer Griesheim Gmbh Process for removing volatile impurities from gases
US4679401A (en) * 1985-07-03 1987-07-14 Helix Technology Corporation Temperature control of cryogenic systems
EP0250613B1 (en) * 1986-06-23 1991-07-17 Leybold Aktiengesellschaft Cryopump and method of operating this cryopump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
JP3123126B2 (en) * 1991-07-15 2001-01-09 株式会社日立製作所 Vacuum container with cooler
US5386708A (en) * 1993-09-02 1995-02-07 Ebara Technologies Incorporated Cryogenic vacuum pump with expander speed control
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
DE19632123A1 (en) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Cryopump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262279A (en) * 1964-10-09 1966-07-26 Little Inc A Extreme high vacuum apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3472039A (en) * 1968-02-19 1969-10-14 Varian Associates Hemispheric cryogenic vacuum trap and vacuum system using same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0377030A1 (en) * 1988-06-02 1990-07-11 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
EP0377030A4 (en) * 1988-06-02 1991-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
EP0370702A1 (en) * 1988-11-23 1990-05-30 AT&T Corp. Apparatus comprising a high vacuum chamber
WO2005075826A1 (en) * 2004-02-03 2005-08-18 Universität Regensburg Vacuum pump and method for operating the same

Also Published As

Publication number Publication date
FR2015963A1 (en) 1970-04-30
GB1256632A (en) 1971-12-08
DE1934938C3 (en) 1974-05-30
US3585807A (en) 1971-06-22
DE1934938A1 (en) 1970-03-05
NL6814460A (en) 1970-02-24
DE1934938B2 (en) 1973-10-25

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Legal Events

Date Code Title Description
PL Patent ceased