NL6615059A - - Google Patents

Info

Publication number
NL6615059A
NL6615059A NL6615059A NL6615059A NL6615059A NL 6615059 A NL6615059 A NL 6615059A NL 6615059 A NL6615059 A NL 6615059A NL 6615059 A NL6615059 A NL 6615059A NL 6615059 A NL6615059 A NL 6615059A
Authority
NL
Netherlands
Application number
NL6615059A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL6615059A priority Critical patent/NL6615059A/xx
Priority to DE19671667656 priority patent/DE1667656A1/de
Priority to GB47784/67A priority patent/GB1196029A/en
Priority to AT954967A priority patent/AT288318B/de
Priority to CH1477767A priority patent/CH501061A/de
Priority to SE14493/67A priority patent/SE328852B/xx
Priority to BE705580D priority patent/BE705580A/xx
Priority to FR125750A priority patent/FR1541867A/fr
Priority to US678056A priority patent/US3634149A/en
Publication of NL6615059A publication Critical patent/NL6615059A/xx

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/06Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/072Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10Inorganic compounds or compositions
    • C30B29/38Nitrides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/915Separating from substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/065Gp III-V generic compounds-processing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/072Heterojunctions
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/113Nitrides of boron or aluminum or gallium
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/148Silicon carbide

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
NL6615059A 1966-10-25 1966-10-25 NL6615059A (US20030157376A1-20030821-M00001.png)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL6615059A NL6615059A (US20030157376A1-20030821-M00001.png) 1966-10-25 1966-10-25
DE19671667656 DE1667656A1 (de) 1966-10-25 1967-10-12 Verfahren zur Herstellung von Aluminiumnitridkristallen fuer Halbleitervorrichtungen
GB47784/67A GB1196029A (en) 1966-10-25 1967-10-20 Method of Manufacturing Aluminium Nitride Crystals for Semiconductor Devices.
AT954967A AT288318B (de) 1966-10-25 1967-10-23 Verfahren zur Herstellung von Aluminiumnitridkristallen bzw. Aluminiumnitridmischkristallen
CH1477767A CH501061A (de) 1966-10-25 1967-10-23 Verfahren zur Herstellung von Kristallen aus gegebenenfalls mit Siliziumkarbid gemischtem Aluminiumnitrid
SE14493/67A SE328852B (US20030157376A1-20030821-M00001.png) 1966-10-25 1967-10-23
BE705580D BE705580A (US20030157376A1-20030821-M00001.png) 1966-10-25 1967-10-24
FR125750A FR1541867A (fr) 1966-10-25 1967-10-25 Procédé d'élaboration de cristaux de nitrure d'aluminium pour dispositifs semiconducteurs
US678056A US3634149A (en) 1966-10-25 1967-10-25 Method of manufacturing aluminium nitride crystals for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6615059A NL6615059A (US20030157376A1-20030821-M00001.png) 1966-10-25 1966-10-25

Publications (1)

Publication Number Publication Date
NL6615059A true NL6615059A (US20030157376A1-20030821-M00001.png) 1968-04-26

Family

ID=19797991

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6615059A NL6615059A (US20030157376A1-20030821-M00001.png) 1966-10-25 1966-10-25

Country Status (8)

Country Link
US (1) US3634149A (US20030157376A1-20030821-M00001.png)
AT (1) AT288318B (US20030157376A1-20030821-M00001.png)
BE (1) BE705580A (US20030157376A1-20030821-M00001.png)
CH (1) CH501061A (US20030157376A1-20030821-M00001.png)
DE (1) DE1667656A1 (US20030157376A1-20030821-M00001.png)
GB (1) GB1196029A (US20030157376A1-20030821-M00001.png)
NL (1) NL6615059A (US20030157376A1-20030821-M00001.png)
SE (1) SE328852B (US20030157376A1-20030821-M00001.png)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4382837A (en) * 1981-06-30 1983-05-10 International Business Machines Corporation Epitaxial crystal fabrication of SiC:AlN
JPS61291494A (ja) * 1985-06-19 1986-12-22 Sharp Corp 炭化珪素単結晶基板の製造方法
JP2650744B2 (ja) * 1988-12-28 1997-09-03 シャープ株式会社 発光ダイオード
DE4109979C2 (de) * 1990-03-28 2000-03-30 Nisshin Flour Milling Co Verfahren zur Herstellung beschichteter Teilchen aus anorganischen oder metallischen Materialien
US5958132A (en) * 1991-04-18 1999-09-28 Nippon Steel Corporation SiC single crystal and method for growth thereof
JP3214868B2 (ja) * 1991-07-19 2001-10-02 ローム株式会社 ヘテロ接合バイポーラトランジスタの製造方法
US5270263A (en) * 1991-12-20 1993-12-14 Micron Technology, Inc. Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering
US6958093B2 (en) * 1994-01-27 2005-10-25 Cree, Inc. Free-standing (Al, Ga, In)N and parting method for forming same
US5679152A (en) * 1994-01-27 1997-10-21 Advanced Technology Materials, Inc. Method of making a single crystals Ga*N article
US5759908A (en) * 1995-05-16 1998-06-02 University Of Cincinnati Method for forming SiC-SOI structures
US5814840A (en) * 1995-06-06 1998-09-29 Purdue Research Foundation Incandescent light energy conversion with reduced infrared emission
US5650361A (en) * 1995-11-21 1997-07-22 The Aerospace Corporation Low temperature photolytic deposition of aluminum nitride thin films
FR2747401B1 (fr) * 1996-04-10 1998-05-15 Commissariat Energie Atomique Dispositif et procede pour la formation de carbure de silicium (sic) monocristallin sur un germe
US5954874A (en) * 1996-10-17 1999-09-21 Hunter; Charles Eric Growth of bulk single crystals of aluminum nitride from a melt
US5858086A (en) * 1996-10-17 1999-01-12 Hunter; Charles Eric Growth of bulk single crystals of aluminum nitride
US6045612A (en) * 1998-07-07 2000-04-04 Cree, Inc. Growth of bulk single crystals of aluminum nitride
US6086672A (en) * 1998-10-09 2000-07-11 Cree, Inc. Growth of bulk single crystals of aluminum nitride: silicon carbide alloys
US6063185A (en) * 1998-10-09 2000-05-16 Cree, Inc. Production of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride: silicon carbide alloy
US6596079B1 (en) * 2000-03-13 2003-07-22 Advanced Technology Materials, Inc. III-V nitride substrate boule and method of making and using the same
US20060005763A1 (en) * 2001-12-24 2006-01-12 Crystal Is, Inc. Method and apparatus for producing large, single-crystals of aluminum nitride
US8545629B2 (en) 2001-12-24 2013-10-01 Crystal Is, Inc. Method and apparatus for producing large, single-crystals of aluminum nitride
US7638346B2 (en) * 2001-12-24 2009-12-29 Crystal Is, Inc. Nitride semiconductor heterostructures and related methods
JP4470690B2 (ja) * 2004-10-29 2010-06-02 住友電気工業株式会社 炭化珪素単結晶、炭化珪素基板および炭化珪素単結晶の製造方法
CN101415864B (zh) 2005-11-28 2014-01-08 晶体公司 具有减少缺陷的大的氮化铝晶体及其制造方法
US7641735B2 (en) * 2005-12-02 2010-01-05 Crystal Is, Inc. Doped aluminum nitride crystals and methods of making them
US8012257B2 (en) * 2006-03-30 2011-09-06 Crystal Is, Inc. Methods for controllable doping of aluminum nitride bulk crystals
US9034103B2 (en) * 2006-03-30 2015-05-19 Crystal Is, Inc. Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
CN107059116B (zh) 2007-01-17 2019-12-31 晶体公司 引晶的氮化铝晶体生长中的缺陷减少
US9771666B2 (en) 2007-01-17 2017-09-26 Crystal Is, Inc. Defect reduction in seeded aluminum nitride crystal growth
JP5730484B2 (ja) * 2007-01-26 2015-06-10 クリスタル アイエス インコーポレイテッド 厚みのある擬似格子整合型の窒化物エピタキシャル層
US8080833B2 (en) 2007-01-26 2011-12-20 Crystal Is, Inc. Thick pseudomorphic nitride epitaxial layers
US8088220B2 (en) * 2007-05-24 2012-01-03 Crystal Is, Inc. Deep-eutectic melt growth of nitride crystals
EP2224041A4 (en) * 2007-11-22 2014-06-11 Univ Meijo POLYGONAL COLUMNOUS MATERIAL OF ALUMINUM NITRIDEINE CRYSTAL AND METHOD FOR PRODUCING PLATE-TYPE ALUMINUM NITRIDEIN CRYSTAL USING THE POLYGONAL COLUMNANE MATERIAL
JP5303941B2 (ja) * 2008-01-31 2013-10-02 住友電気工業株式会社 AlxGa1−xN単結晶の成長方法
JP5367434B2 (ja) * 2009-03-31 2013-12-11 住友電工デバイス・イノベーション株式会社 半導体装置の製造方法
US20100314551A1 (en) * 2009-06-11 2010-12-16 Bettles Timothy J In-line Fluid Treatment by UV Radiation
JP5806734B2 (ja) 2010-06-30 2015-11-10 クリスタル アイエス, インコーポレーテッドCrystal Is, Inc. 熱勾配制御による窒化アルミニウム大単結晶成長
US8962359B2 (en) 2011-07-19 2015-02-24 Crystal Is, Inc. Photon extraction from nitride ultraviolet light-emitting devices
EP2973664B1 (en) 2013-03-15 2020-10-14 Crystal Is, Inc. Ultraviolet light-emitting device and method of forming a contact to an ultraviolet light-emitting device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL239785A (US20030157376A1-20030821-M00001.png) * 1959-06-02
BE618264A (US20030157376A1-20030821-M00001.png) * 1959-06-18
US3129125A (en) * 1959-07-01 1964-04-14 Westinghouse Electric Corp Preparation of silicon carbide materials
US3228756A (en) * 1960-05-20 1966-01-11 Transitron Electronic Corp Method of growing single crystal silicon carbide
US3210624A (en) * 1961-04-24 1965-10-05 Monsanto Co Article having a silicon carbide substrate with an epitaxial layer of boron phosphide
US3275415A (en) * 1964-02-27 1966-09-27 Westinghouse Electric Corp Apparatus for and preparation of silicon carbide single crystals

Also Published As

Publication number Publication date
BE705580A (US20030157376A1-20030821-M00001.png) 1968-04-24
AT288318B (de) 1971-02-25
GB1196029A (en) 1970-06-24
DE1667656A1 (de) 1971-06-24
CH501061A (de) 1970-12-31
US3634149A (en) 1972-01-11
SE328852B (US20030157376A1-20030821-M00001.png) 1970-09-28

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