NL2007885C2 - Detector array with a through-via interposer. - Google Patents

Detector array with a through-via interposer. Download PDF

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Publication number
NL2007885C2
NL2007885C2 NL2007885A NL2007885A NL2007885C2 NL 2007885 C2 NL2007885 C2 NL 2007885C2 NL 2007885 A NL2007885 A NL 2007885A NL 2007885 A NL2007885 A NL 2007885A NL 2007885 C2 NL2007885 C2 NL 2007885C2
Authority
NL
Netherlands
Prior art keywords
sensor
integrated circuit
sensor element
interposer
detector array
Prior art date
Application number
NL2007885A
Other languages
English (en)
Dutch (nl)
Other versions
NL2007885A (en
Inventor
John Eric Tkaczyk
Jonathan David Short
Charles Gerard Woychik
James Wilson Rose
Original Assignee
Gen Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gen Electric filed Critical Gen Electric
Publication of NL2007885A publication Critical patent/NL2007885A/en
Application granted granted Critical
Publication of NL2007885C2 publication Critical patent/NL2007885C2/en

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/301—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to very short wavelength, e.g. being sensitive to X-rays, gamma-rays or corpuscular radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/243—Modular detectors, e.g. arrays formed from self contained units
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H10F39/1895—X-ray, gamma-ray or corpuscular radiation imagers of the hybrid type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B6/00—Apparatus or devices for radiation diagnosis; Apparatus or devices for radiation diagnosis combined with radiation therapy equipment
    • A61B6/42—Arrangements for detecting radiation specially adapted for radiation diagnosis
    • A61B6/4208—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector
    • A61B6/4233—Arrangements for detecting radiation specially adapted for radiation diagnosis characterised by using a particular type of detector using matrix detectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07541—Controlling the environment, e.g. atmosphere composition or temperature
    • H10W72/07554—Controlling the environment, e.g. atmosphere composition or temperature changes in dispositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/547—Dispositions of multiple bond wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
NL2007885A 2010-11-30 2011-11-29 Detector array with a through-via interposer. NL2007885C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/956,139 US8575558B2 (en) 2010-11-30 2010-11-30 Detector array with a through-via interposer
US95613910 2010-11-30

Publications (2)

Publication Number Publication Date
NL2007885A NL2007885A (en) 2012-05-31
NL2007885C2 true NL2007885C2 (en) 2013-11-20

Family

ID=45841571

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2007885A NL2007885C2 (en) 2010-11-30 2011-11-29 Detector array with a through-via interposer.

Country Status (3)

Country Link
US (1) US8575558B2 (enExample)
JP (1) JP6039179B2 (enExample)
NL (1) NL2007885C2 (enExample)

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JP6169922B2 (ja) 2012-08-29 2017-07-26 東芝メディカルシステムズ株式会社 Ｘ線検出サブモジュール、ｘ線検出モジュールおよびｘ線ｃｔ装置
CZ2013669A3 (cs) 2013-08-30 2015-01-07 České vysoké učení technické v Praze Ústav technické a experimentální fyziky Detektor ionizujícího záření umožňující vytvoření souvislého digitálního obrazu
US9794499B2 (en) * 2014-04-29 2017-10-17 Fermi Research Alliance, Llc Wafer-scale pixelated detector system
US9788804B2 (en) * 2014-07-22 2017-10-17 Samsung Electronics Co., Ltd. Anatomical imaging system with improved detector block module
BR112016010217A2 (pt) 2014-09-26 2017-08-08 Koninklijke Philips Nv detector de radiação, método para operação de um detector de radiação, e, aparelho de imageamento para a geração de imagens de um objeto
WO2016066850A1 (en) * 2014-10-31 2016-05-06 Koninklijke Philips N.V. Sensor device and imaging system for detecting radiation signals
US9915741B2 (en) * 2015-04-07 2018-03-13 Shenzhen Xpectvision Technology Co., Ltd. Method of making semiconductor X-ray detectors
US11137504B2 (en) * 2016-02-05 2021-10-05 General Electric Company Tiled radiation detector
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CN110664422A (zh) * 2019-09-09 2020-01-10 东软医疗系统股份有限公司 探测器模块、探测器及医疗成像设备
EP3839575A1 (en) 2019-12-17 2021-06-23 Koninklijke Philips N.V. Photon counting detector
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JP7735568B2 (ja) * 2021-12-01 2025-09-08 シーメンス メディカル ソリューションズ ユーエスエー インコーポレイテッド 半導体ベースの単一光子放出計算断層撮影検出器のためのインタポーザ

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Also Published As

Publication number Publication date
JP2012118073A (ja) 2012-06-21
US8575558B2 (en) 2013-11-05
NL2007885A (en) 2012-05-31
JP6039179B2 (ja) 2016-12-07
US20120133054A1 (en) 2012-05-31

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