NL192104C - Apparatus and method for purifying nitrogen. - Google Patents

Description

Device and method for purifying nitrogen 1 192104

The invention relates to a purification device for a gas consisting of an outer jacket. provided with an inlet for the gas to be purified, an outlet for the purified gas, a gas flow-passage connecting the gas inlet and outlet, at least one gas-binder chamber packed with a gas-binder, which chamber is arranged in the middle of the gas-flow passage, and a heater means to maintain the gas binder at the temperature at which it is desired to function.

Such a device is known from Belgian patent 792,561 for hydrogen gas and gases such as helium, neon and the like.

Various materials are mentioned as gas binders, including various metals, such as aluminum, alkali and alkaline earth metals, uranium and zirconium. This document does not describe how to purify nitrogen gas.

The object of the invention is to provide an apparatus which permits a method for the thorough purification of nitrogen. This object is achieved by packing the gas-binding chamber of the known device with a specific gas-binder and pre-treating the gas to be purified with a metal oxide catalyst.

The device according to the invention is characterized in that the gas to be purified is nitrogen gas, in that the gas binder consists of 15-30% by weight of iron and 85-70% by weight of zirconium, and that a pretreatment unit for the removal of hydrocarbons which comprises a metal oxide catalyst for oxidation.

Nitrogen is a useful gas that is increasingly in demand in many industrial sectors, including electronics, chemicals, iron and steel manufacturing and shipbuilding. A common industrial process for the preparation of nitrogen consists of repeatedly compressing air by a compressor and adiabatically expanding the compressed air until liquid air is obtained, after which it is subjected to high pressure fractional distillation and liquid nitrogen of high purity. obtained.

The product is filled and traded in cylinders in either liquid or gaseous form.

As a typical inherent gas, nitrogen is commonly used in the aforementioned fields to provide an atmosphere for the heat treatment of metals, semiconductor manufacturing, etc.

However, for use in extra fine micro-techniques, such as in electronics, it must be further purified immediately before use. For large-scale use in industrial processes, it is common to evaporate liquid nitrogen and deliver the resulting gas through pipelines. The problem here is how to remove impurities such as oxygen, hydrogen, carbon monoxide, carbon dioxide, hydrogen, hydrocarbon and water from the nitrogen gas as quickly as possible.

Various nitrogen gas purifiers have hitherto been marketed and used to remove these impurities and to purify nitrogen to a high degree of purity.

One of the applicants, Taiyo Sanso Co, has sold gas purifiers since 1974 (models TIP-10, -30, -60, -100, -200, -300, -400 and -500). In these and other commercially available scrubbers, oxidation catalysts of metal oxides such as nickel, chromium and copper are used to oxidize carbon monoxide, hydrocarbons, hydrogen and the like to carbon dioxide and water and then the impurities by adsorption with a zeolite molecular sieve, activated charcoal and the like. Since very pure nitrogen is simply obtained, these gas purifiers are convenient and convenient and therefore generally in use.

The impurities in the gas purified by this existing equipment are generally as follows according to the manufacturer's 45 brochures:

Component Oxygen Hydrocarbon Carbon dioxide Moisture ppm <0.1 <0.1 <0.4 <0.5 (dew point -80X) 50 -

For this purpose, the use of hydrogen-containing alloys, namely Ti-Mn, Ti-Fe and rare earth Ni alloys, has been proposed in Japanese Patent Publication No. 156,308 / 1982. Nitrogen cannot, however, be purified beyond the above-mentioned level.

The commercially available scrubbers as mentioned above are simple, convenient and efficient for obtaining high purity nitrogen gas. However, recent advances in the semiconductor industry requiring ever more precise microtechnics require nitrogen gas of even better purity for the future production of highly integrated chains. In fact, 192104 2 already has a strong demand for high purity nitrogen gas for research purposes.

The process according to the invention is based on a nitrogen purification process in which first purified nitrogen gas is purified in the usual manner by passing it through a bed of a metal oxide catalyst for oxidation at an oxidation temperature and then through an adsorbent bed of a zeolite molecular sieve and the like, after which the residual impurities are removed by adsorption from the low purity nitrogen gas by passing it further through a gas binder bed packed with an alloy gas binder consisting of 15-30 wt% iron and 85-70% wt. % zirconium, which is maintained at a temperature of 20-500 ° C. As the gas binder for use in the invention, an alloy consisting of 15-30 wt% iron and 85-70 wt% zirconium as described in U.S. Patent 4,306,887 can be used.

In view of the property of the iron-zirconium alloy gas binder, which selectively adsorbs not nitrogen but other impurities, a gas binder consisting of an alloy of 22-25 wt.% Iron and 75-78 is desired. % wt% zirconium.

The gas binder of such an iron-zirconium alloy is substantially a non-adsorbent to nitrogen 15 but almost completely adsorbs and removes impurities such as carbon dioxide, moisture and hydrogen at a temperature between 20 and 500 ° C.

Desirably, the iron-zirconium compositions contain 15-30 wt% iron and 85-70 wt% zirconium. At higher zirconium percentages, the alloy begins to sorb significant amounts of nitrogen, the gas which it is desired to purify and not sorb, while at lower percent zirconium, the efficiency of removal (sorption) of active gases from the nitrogen is significantly reduced.

It is desirable that the alloy be used in the form of an intermetallic compound which is easily pulverizable and easy to handle. In addition, the powdered material becomes more active due to the increased specific surface.

The process for preparing such an alloy can generally be similar to the procedures described in U.S. Patent No. 4,312,669, which describes the preparation of a temary iron-zirconium-vanadium alloy.

While practically following the same procedure but omitting the addition of vanadium, a desired alloy can be made. Commercially available products made and sold by SAES Getters, S.p.A., Milan, Italy are suitable for this purpose.

The binary alloy getter is disposed in at least one bed zone, provided centrally in a gas flow passage connecting an inlet for crude nitrogen gas and an outlet for the purified nitrogen gas from an outer jacket.

The gas binder bed is combined with a heater connected to the outer jacket to maintain the gas binder at its adsorptive reaction temperature, which are the essential parts of the nitrogen purifier of the invention. Nitrogen to be purified is passed through this purifier, such that its impurities are contacted with the gas binder and removed by adsorption.

The gas binder to be placed in the chamber is preferably in the form of pellets rather than fine particles since the former more readily have sufficient spacing therebetween for the gas flow. Also, the gas binder in the form of uniformly sized pellets, rather than small lumps of irregular size, makes it easier to maintain a constant void space ratio in the gas binder bed. Thus, although fine particles or small lumps are not objectionable in the gas binder, use of a pelletized gas binder compressed from the alloy powder is preferred since the requirements of industrial design and fabrication of the nitrogen gas plant for extensive purification are clearly better met.

The heater member to be incorporated in the apparatus of the invention to keep the gas binder hot enough to allow the adsorption reaction to take place may take various forms as will be explained later in conjunction with preferred embodiments of the invention. The heating method can be electric or indirect using a heating medium circulated in a double wall structure 50, and the like. Also, the heating zone may be selected at a suitable location, for example, in the gas preheating region upstream of the gas binder bed or chamber or around or within the gas binder mass. Since sufficient heating is desired to effect an easy adsorption reaction of the gas binder with the gas and to produce the most uniform temperature distribution possible, the combination of the heating method and zone can be varied as necessary to best accomplish this goal. Although it is possible that the gas-binding chamber in the device of the invention is provided in the outer jacket, for example, packed directly into the latter, the preferred arrangement is such that the gas-binding bed consists of at least one cartridge packed with the gas-binding material, which is adapted to fit releasably for easy replacement in the outer jacket.

The gas binder components of the invention adsorb and remove impurities from nitrogen gas by chemical adsorption involving chemical changes. They are therefore consumed stoichiometrically and have a limited life. After use for a predetermined period of time, the gas tie must be replaced with a new one; otherwise the goal of the thorough purification of nitrogen gas will no longer be achieved. For this purpose, the purifier including the outer jacket packed with the gas binder can be handled as a single unit and replaced as such from time to time. It is also possible instead to fill the gas binder in a cartridge and to disassemble the cartridge from the outer jacket and replace it at suitable time intervals. The 10 cartridge type is more practical for large-scale equipment.

The cartridge desirably uses a metal sleeve that is perforated to facilitate gas flow.

Since the deep purification device of the invention is for purifying nitrogen gas to the concentrations of each of its ingredients as impurities is reduced to 0.1 ppm or less, it is recommended that the inner wall portion of the device with which the purified gas be which escapes from the gas-binding chamber, comes into contact is made of a metal the surface of which is polished so that it has a small grain and is smooth enough to minimize gas adsorption, nor will powder be formed by corrosion. Such materials include, but are not limited to, stainless steels and protected alloys such as Hastelloy, Incoloy and Monel 20 metal. Any other metal material that meets the above requirements can be suitably selected and used. The selected metal can be heated or "baked" before use to reduce the volume of gas released from the metal material itself.

As mentioned above, it is desirable that the interior wall material of the device, which comes in contact with the purified nitrogen gas, has a dense and smoothly polished surface to minimize gas adsorption. The desired degree of smoothness of the polished surface is defined numerically and is such that the roughness of the inner wall surface upon contact with nitrogen gas is 0.5 micrometers or preferably 0.25 micrometers or less, expressed in diameter mean height (Ra) ( Japanese Industrial Standard (JIS) B 0601-1970). This numerical trajectory is not always critical but is recommended as a reliable safe trajectory.

Although the polished inner wall material is advantageously used in the zone where the gas flowing out of the cartridge chamber comes into contact, it is of course also possible to use this material in the zone where the gas flowing through the cartridge comes into contact. In many cases it is quite inconvenient to use the polished material only in an area where the gas that has passed through the cartridge comes into contact with it. The surface polishing and firing will remarkably shorten the period of time required to obtain highly purified gas at a constant rate, even for new equipment.

It is clear that the invention is not limited to the specific embodiments and that various modifications can be made without departing from the scope of the invention.

In the process of the invention, it is essential that the nitrogen gas to be purified is passed through a bed of 40 metal oxide oxidation catalyst at its oxidation reaction temperature. This is due to the lack of adsorbability of the gas binder used in the invention with respect to methane and other hydrocarbons, so that the hydrocarbons and carbon monoxide present in the nitrogen gas must be converted into water and carbon dioxide and most of them by adsorption is removed by passage through an adsorbent bed of a zeolite molecular sieve and the like.

45 The nitrogen gas which has been purified to low impurity levels according to the known purification process is passed through a gas binder bed, which is filled with an alloy gas binder consisting of 15-30 wt.% Iron and 85-70% wt. Zirconium, and temperature in the range of 20-500 ° C is maintained so that the impurities in the nitrogen are adsorbed away.

If the reaction temperature at which the impurities are removed from the nitrogen gas by adsorption in the gas-binder bed is below 20 ° C, the impurities are adsorbed by the gas-binding surface but do not diffuse into the gas-binding mass. Thus, the adsorption practically comes to a halt in the saturation state at the surface, without full use of the capacity of the gas binder. In the specific range of 20-500 ° C, the gas binder exerts a complete adsorption, because impurities are diffused therein. The apparent life of the gas binder is thus also extended 55.

On the other hand, when the temperature is above 500 ° C, the nitrogen gas is readily adsorbed by the gas binder. Thus, setting a reaction temperature higher than 500 ° C is undesirable.

192104 4

Within the said temperature range of 20-500 ° C, a narrow range of 350-450 ° C is most preferred. The temperature in the latter range is the most recommended temperature for the reaction since it provides a higher adsorption rate and a high diffusion of the impurities in the bed of the gas binder without the possibility of hydrogen desorption.

5

Embodiments

The invention will now be explained in more detail in connection with embodiments thereof.

Devices for far-reaching purification of nitrogen gas according to the invention are illustrated in Figures 1-9. Figure 1 shows a nitrogen gas purifier consisting of an outer jacket 3 made of stainless steel tube (quality SUS 304 TP according to Japanese Industrial standard JIS G 3448) with a nitrogen gas inlet 1 at the top and a nitrogen gas outlet 2 at the bottom, which jacket is over the entire surface covered with a heat insulating jacket 12; a lid 14 mounted above the outer jacket 3; a heater 6 inserted through the cover 14 into the space 25 within the jacket; a bed of 15 gas binder 4 packed in the space captured under heater 6 between upper and lower air flow divider 16, 15; and a perforated plate 7 supported by a support 13 which in turn is attached to the inner wall of the outer jacket and supports the bed as well as the perforated plate. The gas binder used was an iron (22-25 wt%) zirconium (75-78%) alloy gas binder manufactured and marketed by SAES Getters S.p.A., in the form of columnar pellets 3 mm in diameter and 4 mm in height.

The air flow distributors indicated at 16 and 17 each consist of a layer of small aluminum oxide spheres with a diameter of 4 mm packed to a height of about 5 cm. They correct any non-uniform gas flow through the gas binder bed, prevent the fine particles from dispersing from the gas binder and provide a uniform temperature distribution.

Although small aluminum oxide spheres are used in forming the air flow distributors in the described embodiment, small stainless steel balls or a stack of fine meshes and stainless steel meshes or screens may be used instead. Also, the air flow distributors do not always have to be used; an air flow distributorless embodiment will be described later.

Tubes 20, 19 are embedded in the upper parts of the air flow distributors 15, 16, respectively. thermometers 17 and 18. Chromel-Alumel thermocouples are used as thermometers.

The nitrogen gas 9 to be purified is introduced into the vessel through inlet 1, heated by heater 6, passed through the upper air flow divider 16 and then passed as a uniform flow through a bed of the gas binder 4 where it is freed from impure gases by adsorption. The purified gas is passed through perforated plate 7 and removed from the vessel through outlet 2.

Figure 2 and the following figures show other embodiments of the invention. In all these figures, like parts have like numbers and the description thereof is omitted or made as short as possible for each of them.

Figure 2 shows a purification device of the same construction as the embodiment of Figure 2 with the exception that an electric heater 21 is wrapped around the outer jacket 3 and a thermocouple 22 is installed to measure the heater temperature. This modification facilitates the temperature control of the gas binder bed.

Although Figures 1 and 2 are illustrations of embodiments in which the bed 4 is directly packed into the outer jacket 3, the bed can also be provided separately.

45 Figure 3 shows an arrangement of cartridge 5 in which the gas binder 4 and air flow distributors 15, 16 are incorporated in one cylinder at both ends equipped with perforated plates 7. After use for a certain period of time, the cartridge 5 can be removed by removing the cover 14 and bring in a new pattern. This allows a more efficient treatment than with the arrangements of Figures 1 and 2.

Figure 4 shows another embodiment 11 in which the outer jacket has a double-walled construction consisting of an inner wall 24 and an outer wall 23. The space between the walls provides a passage through which a heating medium, such as steam, flows from a heating medium inlet 30 to an outlet 31 .

Included in the space defined by the inner wall is a cartridge 5 containing a gas binder 45, with a winding of an electric heater 6 embedded in the gas binder. The heater 6 is attached to an external voltage source, not shown, via wires 8 (only one of which is shown) and a socket 10. The cartridge 5 includes internal and external porous walls 26 which are held concentrically in a mutual spatial relationship by a support 13. The inner wall 24 of the outer jacket rests at its bottom against a bottom plate with the flange 27, through which a gas inlet pipe 1 and exhaust pipe 2 walk. The pipe 2 also serves to support cartridge 5. The nitrogen gas 9 to be purified is passed through the inlet 1 into the outer space 25, there it is heated to a correct temperature and from there it is forced through the porous wall 26 into the gas binder layer 4 for purification. The purified gas flows out into the inner space 25 'and is discharged through outlet 2.

Figure 5 shows yet another embodiment of the far-purification device 11. The outer jacket 3 again has a double-walled construction, with a space formed therebetween in which a heating medium, which is introduced at an inlet 30, is circulated and drained at a outlet 31 to establish temperature control. Within the inner wall, a pafeoon 5 is arranged packed with a gas binder 4 between perforated plates. Heater 6 is disposed on both sides of the cartridge and is connected to an external voltage source via wires 8. Impure nitrogen gas 9 is supplied at inlet 1, preheated by the heating medium, purified by passage through gas-bonding mass 4, which is kept at a given temperature by heater 6, and then exhausted via outlet 2.

Yet another embodiment of the purification device 11 is shown in Figure 7. A cylindrical outer jacket 3 supports a cartridge 5 by means of top and bottom plates (not shown). The cartridge 5 comprises a built-in electric heater 6 with wires 8 and a gas-bonding mass 4 filled in the space between the perforated top and bottom plates or air flow remnant days 20 with the heater embedded between them.

Figure 7 illustrates another device 11 of the invention. An internal cylinder is placed within an outer jacket 3 consisting of inner and outer walls and a heat insulator 12 which fills the space between the walls. A gas binder 4 is packed into the space between the inner cylinder and the outer jacket, while electric heater 6 is wrapped around a ceramic rod 36 and is inserted into the inner space in the inner cylinder. The nitrogen gas 9 to be purified enters the vessel at inlet 1, passes through a gas binder 4, the purified gas leaving the vessel at outlet 2.

Figure 8 shows yet another embodiment which is a modification of the far-purification device illustrated in Figure 3 and is characterized by means for recovering the heat from the purified nitrogen. The nitrogen gas 9 to be purified enters heat exchanger 28, which is installed below the purifier housing, undergoes heat exchange with the outgoing gas, the gas thus preheated through a pipe 29 surrounded by a heat insulator 12, and one, upper inlet 1 arrives in the bed of gas binder 4. The purified gas is cooled in the heat exchanger and leaves the purifier at the outlet 2.

Figure 9 illustrates another embodiment. The outer jacket 3 is a double-walled cylinder, the heating medium is introduced into the space between the walls at inlet 33 and discharged through exhaust 34. Inside the outer jacket 3 there is a gas-tight cartridge 35. The space in the cartridge sleeve is horizontal by a multiple of perforated plates 7 to form a plurality of gas binder beds 4, each of which fills the space formed by a pair of perforated plates. Electric heater 6 is embedded in the beds, one per bed, with electrical connecting wires 37 and 38. The nitrogen gas to be purified 40 flows in at inlet 1 while the purified gas flows out at outlet 2.

Examples of the invention using a specific gas tie composition are now illustrated. The instruments used for the gas analyzes in the examples were the following:

Gas Analysis Instrument: Gas Chromatography Mass Spectrometer, Model TE-360 B (Manufactured by Anelca Corp.).

45 Moisture Measuring Hygrometer, Model 700 (manufactured by Panametric Corp.)

Surface roughness meter: Surfcorder, model SE-3H (manufactured by Kosaka Laboratory Co., Member.)

Example I

A non-evaporable getteration powder with a weight composition of 76.6% zirconium and 23.4% 50 iron and a particle size between 50 and 250 microns was introduced into the nitrogen high purification device shown in Figure 1. The stainless steel (trade designation SUS 304) cüfinder had an outer diameter of 21.7 mm and an inner diameter of 17.5 mm, with a length of 350 mm. The length of the cylinder occupied by the gas-binding material was 200 mm while the heights of the top and bottom air flow dividers of the alumina spheres were 5 cm each. Crude sphincter gas 55 was introduced into the far-purification device at a temperature of 25 ° C and an overpressure of 6 kg / cm2 (at a flow rate of 0.17 l / min. The nitrogen flowed through the bed which was heated to 375 ° C and exited from the outlet at an overpressure of 4 kg / cm 2 The impurity level was measured for 192 104 6 different gases 40 minutes after the start of the gas flow The results of Table A were obtained.

TABLE A

5 -

Impurity Inlet impurity level (ppm) Outlet impurity level (ppm) 02 0.4 0.006 CH4 0.01 0.01 10 CO 0.06 0.008 CO2 02.00 0.007 H20 3.0 no trace 15 The level of impurities in the exhaust gas remained for 1030 hours constantly.

Example II

Pellets 3 mm in diameter and 4 mm in height were produced by compressing and pelletizing a non-evaporable getter alloy having a composition and particle size identical to that of the alloy of Example I. The pellets were loaded into a high purification device of Figure 2. The stainless steel (SUS 304) cylinder had an outer diameter of 89.1 mm by an inner diameter of 83.1 mm. Its length was 660 mm. The length of the cylinder occupied by the pellets of the gas-binding material including the thicknesses of the top and bottom air flow dividers (of aluminum oxide spheres) each with a bed height of 5 cm was 185 mm. Crude nitrogen was introduced into the high purification device at a temperature of 25 ° C and an overpressure of 4 kg / cm 2 at a flow rate of 12 l / min. The crude nitrogen passed through the non-evaporable bed maintained at a temperature of 375 ° C by means of a resistance coil heater and exited at an overpressure of 3.95 kg / cm 2 from the outlet. The impurity level was measured for various gases 40 minutes after the start of the nitrogen flow. The results obtained are shown in Table B30.

TABLE B

Impurity Inlet impurity level (ppm) Outlet impurity level (ppm) 35 - 02 11.29 0.006 CH4 0.01 0.01 CO 8.8 0.008 C02 8.3 0.007 40 H20 5.0 no trace

The level of the impurities in the exhaust gas remained constant for 760 hours.

45 Example III

As in Example II, pellets were produced which were placed in the pattern shown in Figure 3. The cartridge had an outer diameter of 80 mm, an inner diameter of 78 mm and a length of 244 mm. The same mass of pellets as in Example II was used. The cartridge was then placed in a cylinder identical to that of Example II (Except that its length was 719 mm 50). The crude nitrogen was flowed through the high purification device at the same inlet pressure, temperature and flow rate as described in Example II. The cartridge was kept at 375 ° C. The exhaust gas pressure and composition were found to be identical to those found in Example II at 40 minutes after the start of nitrogen flow. The level of impurities in the exhaust gas again remained constant for 760 hours.

7 192104

Example IV

In this example, the procedure of Example II was completely followed except that the roughness of the interior surface of the cylinder was Ra = 0.5 micrometers (normally Ra = 2.5 micrometers) while the stainless steel exhaust pipe was 9.5 mm outside diameter , had an inner diameter of 7.5 mm and an inner surface roughness of Ra = 0.2 micrometer. The results shown in Table C were obtained 40 minutes after the start of the nitrogen flow.

TABLE C

10 Impurity Inlet impurity level (ppm) Outlet impurity level (ppm) 02 11.29 0.003 CH4 0.01 0.01 CO 8.8 0.008 15 CO2 8.3 0.003 H20 5.0 no trace

The level of the impurities in the exhaust gas remained constant for 760 hours.

20

Example V

In this example, the nitrogen gas to be purified was first passed through a stainless steel (SUS 304) cylinder with an outer diameter of 89.1 mm, an inner diameter of 83.1 mm and a length of 660 mm filled to a bed height of 185 mm with pellets ( 3 mm diameter and 4 mm length) and kept at a temperature of 450 ° C. Thereafter, the water vapor content of the nitrogen gas to be purified was reduced by passing it through a drying device consisting of a stainless steel (SUS 304) cylinder with an outer diameter of 89.1 mm, an inner diameter of 83.1 mm and a length of 660 mm, to a bed height of 200 mm filled with a molecular sieve type 5-A, the pellet size of which was 3.2 mm transverse and 24 mm long. This gas was treated according to the procedure of Example II. The outlet pressure from the drying bed and therefore the inlet pressure to the far-purification device was 4 kg / cm2 (overpressure). The temperature was varied to observe the effect of different gas-binding temperatures. The results are shown in Table D.

TABLE D

35 -

Inlet impurity level (ppm) Outlet impurity level (ppm) at temperature

20 ° C 250 ° C 375 ° C 500 ° C

02 11.29 0.006 0.006 0.006 0.004 40 CH4 3.7 0.009 0.009 0.009 0.009 CO 8.8 0.008 0.008 0.008 0.004 CO2 8.3 0.007 0.007 0.007 0.004 H20 5.0 no trace no trace no trace no trace 45 Exhaust gas constant for 21 hours 1050 hours 2330 hours 2390 hours

Gas binder cylinder energy consumption. 0 0.61 kW / h 1.1 kW / h 1.7 kW / h 50 The table shows that the gas binder of the invention exhibits excellent purification capacity in the temperature range of 20-500 ° C.

Examples VI and VII

Pellets 3 mm in diameter and 4 mm in length were produced by compressing non-evaporable gas binder powder consisting of an alloy of Zr 84% and Fe 16% (weight percent) (Example VI) and a alloy of Zr 71% and Fe 20% (weight percent) (Example VII) with particle sizes of 50-250 microns (150 microns average). These pellets are placed in a facility

Claims (3)

192104 8 loaded for extensive purification with the same structure as in example II. The nitrogen gas with impurities was introduced into the deep purification device at a temperature of 25 ° C, an overpressure of 4 kg / crn 2 and a flow rate of 12 l / min. The impurity-containing nitrogen gas was passed through the bed of the non-evaporable gas binder held at a temperature of 375 ° C by means of a resistance coil and emerged from the outlet at an overpressure of 3.95 kg / cm 2. The impurity level was measured 40 minutes after the start of the flow of the nitrogen gas, the results of which are shown in Table E. TABLE E 10 - Gas Inlet impurity (ppm) Outlet impurity Example VI (ppm) Example Vil (ppm) 02 11.29 0.003 0.01 15 CH4 0.01 0.01 0.01 CO 8.8 0.005 0.009 CO2 8, 3 0.005 0.01 Hz 5 5.0 no trace no trace 20 The exhaust impurity levels were constant for 960 and 690 hours, respectively. 25 1. Gas purification device consisting of an outer jacket having an inlet for the gas to be purified, an outlet for the purified gas, a gas flow passage connecting the gas inlet and outlet, at least one gas binder chamber packed with a gas binder, which chamber in the center of the gas flow passage, as well as a heater means for maintaining the gas binder at the temperature at which it functions as desired, characterized in that the gas to be purified is nitrogen gas, the gas binder consisting of 15-30 wt% iron and 85- 70 wt% zirconium, and a hydrocarbon removal pretreatment unit comprising a metal oxide oxidation catalyst has been added. Method for the extensive purification of a gas, characterized in that nitrogen gas is purified by passing it into an installation according to claim 1, wherein the gas binder is kept at a temperature of 20-500 ° C. Method according to claim 2, characterized in that the gas binder is kept at a temperature of 350-450 ° C. Hereby 3 sheets drawing