SE8602870D0 - SET AND DEVICE FOR CLEANING NITROGEN - Google Patents

SET AND DEVICE FOR CLEANING NITROGEN

Info

Publication number
SE8602870D0
SE8602870D0 SE8602870A SE8602870A SE8602870D0 SE 8602870 D0 SE8602870 D0 SE 8602870D0 SE 8602870 A SE8602870 A SE 8602870A SE 8602870 A SE8602870 A SE 8602870A SE 8602870 D0 SE8602870 D0 SE 8602870D0
Authority
SE
Sweden
Prior art keywords
cleaning nitrogen
nitrogen
weight
cleaning
superpurifier
Prior art date
Application number
SE8602870A
Other languages
Swedish (sv)
Other versions
SE463149B (en
SE8602870L (en
Inventor
K Nagi
C Boffito
F Doni
M Succi
Original Assignee
Taiyo Sanso Co Ltd
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Sanso Co Ltd, Getters Spa filed Critical Taiyo Sanso Co Ltd
Publication of SE8602870D0 publication Critical patent/SE8602870D0/en
Publication of SE8602870L publication Critical patent/SE8602870L/en
Publication of SE463149B publication Critical patent/SE463149B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0494—Combined chemical and physical processing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/04—Purification or separation of nitrogen
    • C01B21/0405—Purification or separation processes
    • C01B21/0433—Physical processing only
    • C01B21/045—Physical processing only by adsorption in solids
    • C01B21/0483—Physical processing only by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0003—Chemical processing
    • C01B2210/0004—Chemical processing by oxidation
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0001—Separation or purification processing
    • C01B2210/0009—Physical processing
    • C01B2210/0014—Physical processing by adsorption in solids
    • C01B2210/0023—Physical processing by adsorption in solids in getters
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00—Purification or separation of specific gases
    • C01B2210/0042—Making ultrapure specific gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)

Abstract

A superpurifier for nitrogen provides means for contacting an impurity-containing nitrogen gas with a getter of an alloy consisting of from 15 to 30% by weight iron and from 70 to 55% by weight zirconium. A higher purity than that obtained by conventional purification processes is given. <IMAGE>
SE8602870A 1985-06-28 1986-06-27 SUPER CLEANING DEVICE FOR PURIFICATION OF NITROGEN GAS AND SUITABLE FOR SUPERRANE NITROGEN GAS SE463149B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140628A JPS623006A (en) 1985-06-28 1985-06-28 Nitrogen super purification facilities and purification process

Publications (3)

Publication Number Publication Date
SE8602870D0 true SE8602870D0 (en) 1986-06-27
SE8602870L SE8602870L (en) 1986-12-29
SE463149B SE463149B (en) 1990-10-15

Family

ID=15273115

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8602870A SE463149B (en) 1985-06-28 1986-06-27 SUPER CLEANING DEVICE FOR PURIFICATION OF NITROGEN GAS AND SUITABLE FOR SUPERRANE NITROGEN GAS

Country Status (10)

Country Link
JP (1) JPS623006A (en)
KR (1) KR930006690B1 (en)
BE (1) BE904998A (en)
CA (1) CA1300346C (en)
DE (1) DE3621013C2 (en)
FR (1) FR2584062B1 (en)
GB (1) GB2177080B (en)
IT (1) IT1204420B (en)
NL (1) NL192104C (en)
SE (1) SE463149B (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (en) * 1988-09-26 1991-03-27 Getters Spa APPARATUS AND RELATED METHOD TO REMOVE GASEOUS IMPURITIES FROM INERT GASES AND ENSURE EXTREMELY LOW HYDROGEN LEVELS
DE3835825C1 (en) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (en) * 1989-02-07 1990-08-10 Air Liquide Process for producing a gaseous atmosphere in contact with a metal at high temperature
DE3926015A1 (en) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh METHOD FOR THE FINE PURIFICATION OF GASES
IT1237944B (en) * 1990-01-05 1993-06-19 Getters Spa METHOD FOR DETERMINING THE END OF THE USEFUL LIFE OF AN INERT GAS PURIFIER AND RELATED EQUIPMENT
IT1246358B (en) * 1990-07-12 1994-11-17 Getters Spa PROCESS TO ELIMINATE IMPURITIES FROM A WATER GAS
IT1244006B (en) * 1990-11-02 1994-06-28 Getters Spa PURIFICATION PROCESS OF AMMONIA.
IT1270875B (en) * 1993-04-29 1997-05-13 Getters Spa HYDROGEN PURIFICATION PROCEDURE AND RELATIVE PURIFIER
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
JPH1157371A (en) * 1997-08-11 1999-03-02 Taiyo Toyo Sanso Co Ltd Production of ultraclean air
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
ES2171044T3 (en) 1997-10-15 2002-08-16 Saes Pure Gas Inc GAS PURIFICATION SYSTEM EQUIPPED WITH A GAS PURIFICATION SECURITY DEVICE AND PROCEDURE.
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system
KR100356611B1 (en) * 2000-08-10 2002-10-18 주식회사 아토 Purification Method and Apparatus for Nitrogen
ITMI20010930A1 (en) 2001-05-07 2002-11-07 Getters Spa METHOD FOR THE MEASUREMENT OF THE CONCENTRATION OF HYDROGEN AND METHANE IN NITROGEN BY IONIC MOBILITY SPETROSCOPY
ITMI20011193A1 (en) 2001-06-06 2002-12-06 Getters Spa METHOD FOR MEASUREMENT USING IONIC MOBILITY SPECTROSCOPY OF THE CONCENTRATION OF WATER IN ARGON, HYDROGEN, NITROGEN AND HELIUM
JP4918255B2 (en) * 2005-12-22 2012-04-18 ウチヤ・サーモスタット株式会社 Nitrogen gas generator
CN110759323A (en) * 2018-07-27 2020-02-07 隆基绿能科技股份有限公司 Gas purification reactor and gas purification method
CN112978692B (en) * 2021-03-04 2022-08-05 北京高麦克仪器科技有限公司 780 helium purifier
JP7210803B1 (en) * 2022-10-04 2023-01-23 レール・リキード－ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード gas purifier

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
IT1115156B (en) * 1979-04-06 1986-02-03 Getters Spa ZR-FE ALLOYS FOR HYDROGEN ABSORPTION AT LOW TEMPERATURES
DE3137569A1 (en) * 1981-09-22 1983-04-21 Leybold-Heraeus GmbH, 5000 Köln METHOD AND DEVICE FOR PRODUCING HIGH PURITY NITROGEN
JPS6020323A (en) * 1983-07-15 1985-02-01 Toshiba Corp Disk device

Also Published As

Publication number Publication date
GB8615619D0 (en) 1986-07-30
SE463149B (en) 1990-10-15
JPH0456763B2 (en) 1992-09-09
BE904998A (en) 1986-10-16
IT1204420B (en) 1989-03-01
KR930006690B1 (en) 1993-07-22
CA1300346C (en) 1992-05-12
IT8620963A0 (en) 1986-06-27
FR2584062A1 (en) 1987-01-02
GB2177080B (en) 1989-08-31
NL192104B (en) 1996-10-01
NL192104C (en) 1997-02-04
SE8602870L (en) 1986-12-29
NL8601692A (en) 1987-01-16
GB2177080A (en) 1987-01-14
DE3621013A1 (en) 1987-01-08
FR2584062B1 (en) 1990-12-21
JPS623006A (en) 1987-01-09
KR870000237A (en) 1987-02-17
DE3621013C2 (en) 1996-02-15

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