NL184201C - Werkwijze en inrichting voor het onder een hoge elektrische spanning vormen van een bol aan het uiteinde van een metalen draad en voor het daarmee vormen van een elektrisch geleidende verbinding. - Google Patents

Werkwijze en inrichting voor het onder een hoge elektrische spanning vormen van een bol aan het uiteinde van een metalen draad en voor het daarmee vormen van een elektrisch geleidende verbinding.

Info

Publication number
NL184201C
NL184201C NL7807922A NL7807922A NL184201C NL 184201 C NL184201 C NL 184201C NL 7807922 A NL7807922 A NL 7807922A NL 7807922 A NL7807922 A NL 7807922A NL 184201 C NL184201 C NL 184201C
Authority
NL
Netherlands
Prior art keywords
forming
ball
electrically conductive
under high
metal wire
Prior art date
Application number
NL7807922A
Other languages
English (en)
Dutch (nl)
Other versions
NL184201B (nl
NL7807922A (nl
Original Assignee
Welding Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Welding Inst filed Critical Welding Inst
Publication of NL7807922A publication Critical patent/NL7807922A/xx
Publication of NL184201B publication Critical patent/NL184201B/xx
Application granted granted Critical
Publication of NL184201C publication Critical patent/NL184201C/xx

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
    • B23K20/004—Wire welding
    • B23K20/005—Capillary welding
    • B23K20/007—Ball bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Arc Welding In General (AREA)
NL7807922A 1977-07-26 1978-07-26 Werkwijze en inrichting voor het onder een hoge elektrische spanning vormen van een bol aan het uiteinde van een metalen draad en voor het daarmee vormen van een elektrisch geleidende verbinding. NL184201C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB31346/77A GB1600021A (en) 1977-07-26 1977-07-26 Electrical inter-connection method and apparatus

Publications (3)

Publication Number Publication Date
NL7807922A NL7807922A (nl) 1979-01-30
NL184201B NL184201B (nl) 1988-12-16
NL184201C true NL184201C (nl) 1989-05-16

Family

ID=10321761

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7807922A NL184201C (nl) 1977-07-26 1978-07-26 Werkwijze en inrichting voor het onder een hoge elektrische spanning vormen van een bol aan het uiteinde van een metalen draad en voor het daarmee vormen van een elektrisch geleidende verbinding.

Country Status (6)

Country Link
US (1) US4323759A (xx)
JP (1) JPS5440570A (xx)
DE (1) DE2832050A1 (xx)
FR (1) FR2401522B1 (xx)
GB (1) GB1600021A (xx)
NL (1) NL184201C (xx)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4459452A (en) * 1980-06-30 1984-07-10 The Welding Institute Ball bonding of wire
NL8005922A (nl) * 1980-10-29 1982-05-17 Philips Nv Werkwijze voor het vormen van een draadverbinding.
US4388512A (en) * 1981-03-09 1983-06-14 Raytheon Company Aluminum wire ball bonding apparatus and method
US4390771A (en) * 1981-05-11 1983-06-28 Fairchild Camera & Instrument Corp. Bonding wire ball forming method and apparatus
US4387283A (en) * 1981-08-03 1983-06-07 Texas Instruments Incorporated Apparatus and method of forming aluminum balls for ball bonding
US4434347A (en) * 1981-08-19 1984-02-28 Fairchild Camera And Instrument Corporation Lead frame wire bonding by preheating
JPS58169918A (ja) * 1982-03-31 1983-10-06 Hitachi Ltd ワイヤボンダ
JPS58212145A (ja) * 1982-06-03 1983-12-09 Toshiba Corp ワイヤボンデイング方法
JPS5917254A (ja) * 1982-07-20 1984-01-28 Shinkawa Ltd ワイヤボンダにおけるボ−ル形成方法
US4476365A (en) * 1982-10-08 1984-10-09 Fairchild Camera & Instrument Corp. Cover gas control of bonding ball formation
US4549059A (en) * 1982-11-24 1985-10-22 Nec Corporation Wire bonder with controlled atmosphere
JPS59139637A (ja) * 1983-01-31 1984-08-10 Hitachi Ltd ワイヤボンダ
US4594493A (en) * 1983-07-25 1986-06-10 Fairchild Camera & Instrument Corp. Method and apparatus for forming ball bonds
US4482794A (en) * 1983-11-28 1984-11-13 Fairchild Camera & Instrument Corporation Pulse-width control of bonding ball formation
US4603802A (en) * 1984-02-27 1986-08-05 Fairchild Camera & Instrument Corporation Variation and control of bond force
US4597519A (en) * 1984-02-27 1986-07-01 Fairchild Camera & Instrument Corporation Lead wire bonding with increased bonding surface area
JPS60213038A (ja) * 1984-04-09 1985-10-25 Toshiba Corp ワイヤボンデイング装置
JPS60227432A (ja) * 1984-04-26 1985-11-12 Nec Corp ボンデイング用ワイヤのボ−ル形成装置
US4523071A (en) * 1984-05-14 1985-06-11 Hughes Aircraft Company Method and apparatus for forming a ball at the end of a wire
GB2165178A (en) * 1984-10-05 1986-04-09 Hitachi Ltd Method and apparatus for wire bonding
US4705204A (en) * 1985-03-01 1987-11-10 Mitsubishi Denki Kabushiki Kaisha Method of ball forming for wire bonding
JPH0640945B2 (ja) * 1987-12-10 1994-06-01 株式会社荏原製作所 放射線照射排ガス処理法
JPH01280330A (ja) * 1989-03-31 1989-11-10 Hitachi Ltd 半導体装置
US6001724A (en) * 1996-01-29 1999-12-14 Micron Technology, Inc. Method for forming bumps on a semiconductor die using applied voltage pulses to an aluminum wire
DE19618320A1 (de) * 1996-04-30 1997-11-13 F&K Delvotec Bondtechnik Gmbh Vorrichtung zum "Ball"-Bonden
DE69737621T2 (de) * 1996-10-01 2007-12-20 Matsushita Electric Industrial Co., Ltd., Kadoma Halbleiterelement mit einer Höckerelektrode
US6234376B1 (en) * 1999-07-13 2001-05-22 Kulicke & Soffa Investments, Inc. Supplying a cover gas for wire ball bonding

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2759088A (en) * 1951-07-07 1956-08-14 Baker & Co Inc Method of rounding wire end
US2679570A (en) * 1951-08-18 1954-05-25 Bell Telephone Labor Inc Formation of electrode tip by electric current heating
NL7406783A (nl) * 1974-05-21 1975-11-25 Philips Nv Werkwijze voor het aanbrengen van een draad- verbinding aan een halfgeleiderinrichting.
US3934108A (en) * 1974-09-16 1976-01-20 Uthe Technology, Inc. Lead bonding method and apparatus
DE2517017A1 (de) * 1975-04-17 1976-10-28 Transistor Ag Verfahren zum anschmelzen von kontaktkuegelchen an anschlussdraehten insbesondere fuer halbleitervorrichtungen
GB1536872A (en) * 1975-05-15 1978-12-20 Welding Inst Electrical inter-connection method and apparatus
GB1468974A (en) * 1975-05-23 1977-03-30 Ferranti Ltd Manufacture of semiconductor devices

Also Published As

Publication number Publication date
FR2401522B1 (fr) 1985-08-16
JPS5440570A (en) 1979-03-30
NL184201B (nl) 1988-12-16
JPS6126221B2 (xx) 1986-06-19
FR2401522A1 (fr) 1979-03-23
GB1600021A (en) 1981-10-14
DE2832050A1 (de) 1979-02-15
US4323759A (en) 1982-04-06
NL7807922A (nl) 1979-01-30
DE2832050C2 (xx) 1990-01-11

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