NL144201B - Werkwijze voor het bekleden van het oppervlak van een substraat. - Google Patents
Werkwijze voor het bekleden van het oppervlak van een substraat.Info
- Publication number
- NL144201B NL144201B NL656505685A NL6505685A NL144201B NL 144201 B NL144201 B NL 144201B NL 656505685 A NL656505685 A NL 656505685A NL 6505685 A NL6505685 A NL 6505685A NL 144201 B NL144201 B NL 144201B
- Authority
- NL
- Netherlands
- Prior art keywords
- covering
- substrate
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/025—Polyxylylenes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G2261/30—Monomer units or repeat units incorporating structural elements in the main chain
- C08G2261/34—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain
- C08G2261/342—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms
- C08G2261/3424—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms non-conjugated, e.g. paracyclophanes or xylenes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US364381A US3379803A (en) | 1964-05-04 | 1964-05-04 | Coating method and apparatus for deposition of polymer-forming vapor under vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| NL6505685A NL6505685A (nl) | 1965-11-05 |
| NL144201B true NL144201B (nl) | 1974-12-16 |
Family
ID=23434283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL656505685A NL144201B (nl) | 1964-05-04 | 1965-05-04 | Werkwijze voor het bekleden van het oppervlak van een substraat. |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3379803A (nl) |
| DE (1) | DE1646153C3 (nl) |
| GB (1) | GB1112894A (nl) |
| NL (1) | NL144201B (nl) |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3663265A (en) * | 1970-11-16 | 1972-05-16 | North American Rockwell | Deposition of polymeric coatings utilizing electrical excitation |
| US3753773A (en) * | 1972-04-26 | 1973-08-21 | North American Rockwell | Coating of poly-para-heterocyclic-xylene polymer |
| CA1031919A (en) * | 1972-07-17 | 1978-05-30 | Union Carbide Corporation | Plural mold process for producing non-uniform pellicles |
| US3892892A (en) * | 1973-05-01 | 1975-07-01 | Union Carbide Corp | Masking process with cold sink |
| US3936531A (en) * | 1973-05-01 | 1976-02-03 | Union Carbide Corporation | Masking process with thermal destruction of edges of mask |
| US3895135A (en) * | 1973-05-01 | 1975-07-15 | Union Carbide Corp | Masking process with constricted flow path for coating |
| US4226207A (en) * | 1978-07-06 | 1980-10-07 | Dso "Cherna Metalurgia" | Apparatus for applying protective coatings to graphite bodies |
| JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
| FR2526631B1 (fr) * | 1982-05-12 | 1985-05-31 | Agronomique Inst Nat Rech | Procede de fabrication de globules encapsulables |
| US4572846A (en) * | 1983-11-18 | 1986-02-25 | Motorola, Inc. | Method of hermetically sealing electronic packages |
| AT380641B (de) * | 1984-08-21 | 1986-06-25 | Karl Dipl Ing Dr Czeija | Vorrichtung zur herstellung von semipermeablen, asymmetrischen verbund-folien bzw. von solchen filter-membranen fuer umkehrosmose-anlagen und in einer derartigen beschichtungs-vorrichtung hergestellte verbund-folien |
| IT1191646B (it) * | 1985-12-19 | 1988-03-23 | Montedison Spa | Processo per l'adesione di poli-p.xililene a substrati e articoli ottenuti |
| US4808453A (en) * | 1987-04-13 | 1989-02-28 | Romberg Val G | Pharmaceutical elastomeric coating |
| IT1222434B (it) * | 1987-08-03 | 1990-09-05 | Ausimont Spa | Contenitore a bassa permeabilita' ai vapori idrocarburi e processo per la loro produzione |
| IT1222879B (it) * | 1987-10-13 | 1990-09-12 | Ausimont Spa | Processo per il consolidamento di materiali bassofondenti |
| WO1990002546A1 (en) * | 1988-09-09 | 1990-03-22 | The Ronald T. Dodge Company | Pharmaceuticals microencapsulated by vapor deposited polymers and method |
| US5354286A (en) * | 1993-12-07 | 1994-10-11 | Survival Technology, Inc. | Injection device having polyparaxylylene coated container |
| ATE288622T1 (de) * | 1996-06-24 | 2005-02-15 | Imec Inter Uni Micro Electr | Vorrichtung und verfahren zur nassreinigung oder zum ätzen eines flachen substrats |
| US6337102B1 (en) * | 1997-11-17 | 2002-01-08 | The Trustees Of Princeton University | Low pressure vapor phase deposition of organic thin films |
| US6045864A (en) * | 1997-12-01 | 2000-04-04 | 3M Innovative Properties Company | Vapor coating method |
| JPH11227210A (ja) | 1997-12-05 | 1999-08-24 | Canon Inc | 液体吐出ヘッド、該ヘッドの製造方法、ヘッドカートリッジおよび液体吐出装置 |
| GB2340759B (en) * | 1998-08-26 | 2003-05-07 | Bespak Plc | Improvements in drug delivery devices |
| JP3986039B2 (ja) | 1998-12-03 | 2007-10-03 | キヤノン株式会社 | 液体吐出ヘッドの製造方法、液体吐出ヘッド、ヘッドカートリッジおよび液体吐出記録装置 |
| US6386686B1 (en) | 1998-12-03 | 2002-05-14 | Canon Kabushiki Kaisha | Liquid discharge head, manufacturing method of liquid discharge head, head cartridge, and liquid discharge apparatus |
| JP2001162804A (ja) | 1999-12-10 | 2001-06-19 | Canon Inc | 液体吐出ヘッド、ヘッドカートリッジおよび液体吐出装置 |
| US20030196680A1 (en) * | 2002-04-19 | 2003-10-23 | Dielectric Systems, Inc | Process modules for transport polymerization of low epsilon thin films |
| US20050274322A1 (en) * | 2001-02-26 | 2005-12-15 | Lee Chung J | Reactor for producing reactive intermediates for low dielectric constant polymer thin films |
| US7192645B2 (en) | 2001-02-26 | 2007-03-20 | Dielectric Systems, Inc. | Porous low E (<2.0) thin films by transport co-polymerization |
| US6881447B2 (en) * | 2002-04-04 | 2005-04-19 | Dielectric Systems, Inc. | Chemically and electrically stabilized polymer films |
| US20030198578A1 (en) * | 2002-04-18 | 2003-10-23 | Dielectric Systems, Inc. | Multi-stage-heating thermal reactor for transport polymerization |
| US6797343B2 (en) | 2001-12-20 | 2004-09-28 | Dielectric Systems, Inc. | Dielectric thin films from fluorinated precursors |
| US6703462B2 (en) * | 2001-08-09 | 2004-03-09 | Dielectric Systems Inc. | Stabilized polymer film and its manufacture |
| US6825303B2 (en) | 2001-02-26 | 2004-11-30 | Dielectric Systems, Inc. | Integration of low ε thin films and Ta into Cu dual damascene |
| US20040055539A1 (en) * | 2002-09-13 | 2004-03-25 | Dielectric Systems, Inc. | Reactive-reactor for generation of gaseous intermediates |
| US7026052B2 (en) * | 2001-02-26 | 2006-04-11 | Dielectric Systems, Inc. | Porous low k(<2.0) thin film derived from homo-transport-polymerization |
| US20040255862A1 (en) * | 2001-02-26 | 2004-12-23 | Lee Chung J. | Reactor for producing reactive intermediates for low dielectric constant polymer thin films |
| US7115304B2 (en) * | 2004-02-19 | 2006-10-03 | Nanosolar, Inc. | High throughput surface treatment on coiled flexible substrates |
| US7094661B2 (en) * | 2004-03-31 | 2006-08-22 | Dielectric Systems, Inc. | Single and dual damascene techniques utilizing composite polymer dielectric film |
| US7309395B2 (en) | 2004-03-31 | 2007-12-18 | Dielectric Systems, Inc. | System for forming composite polymer dielectric film |
| US6962871B2 (en) * | 2004-03-31 | 2005-11-08 | Dielectric Systems, Inc. | Composite polymer dielectric film |
| US20060201426A1 (en) * | 2004-05-25 | 2006-09-14 | Lee Chung J | Reactor for Producing Reactive Intermediates for Transport Polymerization |
| US20060046044A1 (en) * | 2004-08-24 | 2006-03-02 | Lee Chung J | Porous composite polymer dielectric film |
| US20060275547A1 (en) * | 2005-06-01 | 2006-12-07 | Lee Chung J | Vapor Phase Deposition System and Method |
| US20060274474A1 (en) * | 2005-06-01 | 2006-12-07 | Lee Chung J | Substrate Holder |
| DE102005040648A1 (de) * | 2005-08-27 | 2007-03-01 | Leybold Vacuum Gmbh | Beschichtete Gegenstände |
| DE102005058869A1 (de) * | 2005-12-09 | 2007-06-14 | Cis Solartechnik Gmbh & Co. Kg | Verfahren und Vorrichtung zur Beschichtung von Bändern |
| BRPI0709199A2 (pt) * | 2006-03-26 | 2011-06-28 | Lotus Applied Technology Llc | sistema e método para depositar uma pelìcula fina em um substrato flexìvel |
| US20070281089A1 (en) * | 2006-06-05 | 2007-12-06 | General Electric Company | Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects |
| GB0614621D0 (en) * | 2006-07-24 | 2006-08-30 | 3M Innovative Properties Co | Metered dose dispensers |
| US8506984B2 (en) * | 2006-07-26 | 2013-08-13 | Cordis Corporation | Therapeutic agent elution control process |
| WO2008058412A2 (de) * | 2006-11-13 | 2008-05-22 | Tersuisse Multifils Ag | Beschichteter fadenförmiger gegenstand mit verbesserter elektrischer leitfähigkeit und/oder verbesserter optischer reflexion und vorrichtung und verfahren zum behandeln der oberfläche eines fadenförmigen gegenstandes |
| CN101965228B (zh) * | 2008-02-29 | 2013-10-16 | 株式会社康井精机 | 复合材料板的制造装置 |
| WO2009158613A1 (en) * | 2008-06-26 | 2009-12-30 | West Pharmaceutical Services, Inc. | Method of coating polyxylylene onto flouropolymer surfaces and devices coated thereby |
| CN102639749B (zh) | 2009-10-14 | 2015-06-17 | 莲花应用技术有限责任公司 | 在原子层沉积系统中抑制过量前体在单独前体区之间运送 |
| US10544502B2 (en) | 2009-11-30 | 2020-01-28 | Xefco Pty Ltd | Functional composite garment materials |
| KR101279606B1 (ko) * | 2009-12-11 | 2013-07-05 | 한국전자통신연구원 | 그래핀 박막의 증착방법 |
| US8723042B2 (en) * | 2011-03-17 | 2014-05-13 | Electronics And Telecommunications Research Institute | Flexible flat cable and manufacturing method thereof |
| CN104247132A (zh) * | 2012-03-30 | 2014-12-24 | 小岛冲压工业株式会社 | 锂离子二次电池的制造方法及制造装置 |
| US20160186320A1 (en) * | 2014-12-26 | 2016-06-30 | Metal Industries Research And Development Centre | Apparatus for continuously forming a film through chemical vapor deposition |
| FR3044023B1 (fr) * | 2015-11-19 | 2017-12-22 | Herakles | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
| DE102019007935B4 (de) * | 2019-11-14 | 2023-06-29 | Elfolion Gmbh | Verfahren zum Bearbeiten flexibler Substrate und Vakuumbearbeitungsanlage zur Umsetzung des Verfahrens |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2879739A (en) * | 1955-01-13 | 1959-03-31 | Nat Res Corp | Vaporized metal coating apparatus |
| US2971862A (en) * | 1957-04-26 | 1961-02-14 | Nat Res Corp | Vapor deposition method and apparatus |
| US3043715A (en) * | 1958-08-13 | 1962-07-10 | Nat Res Corp | Method and apparatus for vacuum coating metallic substrates |
| US3181209A (en) * | 1961-08-18 | 1965-05-04 | Temescal Metallurgical Corp | Foil production |
| US3301707A (en) * | 1962-12-27 | 1967-01-31 | Union Carbide Corp | Thin film resistors and methods of making thereof |
-
1964
- 1964-05-04 US US364381A patent/US3379803A/en not_active Expired - Lifetime
-
1965
- 1965-05-03 GB GB18532/65A patent/GB1112894A/en not_active Expired
- 1965-05-03 DE DE1646153A patent/DE1646153C3/de not_active Expired
- 1965-05-04 NL NL656505685A patent/NL144201B/nl unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3379803A (en) | 1968-04-23 |
| GB1112894A (en) | 1968-05-08 |
| DE1646153C3 (de) | 1974-05-02 |
| NL6505685A (nl) | 1965-11-05 |
| DE1646153A1 (de) | 1971-03-18 |
| DE1646153B2 (de) | 1973-09-13 |
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