MY204678A - Lighting for defect inspection of sheet-shaped objects, defect inspection apparatus for sheet-shaped objects, and method of defect inspection of sheet-shaped objects - Google Patents

Lighting for defect inspection of sheet-shaped objects, defect inspection apparatus for sheet-shaped objects, and method of defect inspection of sheet-shaped objects

Info

Publication number
MY204678A
MY204678A MYPI2021001478A MYPI2021001478A MY204678A MY 204678 A MY204678 A MY 204678A MY PI2021001478 A MYPI2021001478 A MY PI2021001478A MY PI2021001478 A MYPI2021001478 A MY PI2021001478A MY 204678 A MY204678 A MY 204678A
Authority
MY
Malaysia
Prior art keywords
sheet
light
light shielding
defect inspection
shaped objects
Prior art date
Application number
MYPI2021001478A
Other languages
English (en)
Inventor
Sugihara Hiroki
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Publication of MY204678A publication Critical patent/MY204678A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V11/00—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00
    • F21V11/08—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00 using diaphragms containing one or more apertures
    • F21V11/14—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00 using diaphragms containing one or more apertures with many small apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/86—Investigating moving sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8905—Directional selective optics, e.g. slits, spatial filters

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
MYPI2021001478A 2018-09-21 2019-08-23 Lighting for defect inspection of sheet-shaped objects, defect inspection apparatus for sheet-shaped objects, and method of defect inspection of sheet-shaped objects MY204678A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018176918 2018-09-21
PCT/JP2019/033190 WO2020059426A1 (ja) 2018-09-21 2019-08-23 シート状物の欠点検査用照明、シート状物の欠点検査装置、およびシート状物の欠点検査方法

Publications (1)

Publication Number Publication Date
MY204678A true MY204678A (en) 2024-09-09

Family

ID=69887156

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2021001478A MY204678A (en) 2018-09-21 2019-08-23 Lighting for defect inspection of sheet-shaped objects, defect inspection apparatus for sheet-shaped objects, and method of defect inspection of sheet-shaped objects

Country Status (7)

Country Link
US (1) US11341630B2 (https=)
EP (1) EP3855172B1 (https=)
JP (1) JP7392470B2 (https=)
KR (1) KR102721999B1 (https=)
CN (1) CN112703393B (https=)
MY (1) MY204678A (https=)
WO (1) WO2020059426A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12427528B2 (en) * 2020-01-15 2025-09-30 Jdc Corporation Rotary crushing apparatus
CN115598127A (zh) * 2021-07-08 2023-01-13 捷将科技有限公司（Tw） 用于编织状素材的红外线检测装置及红外线检测方法
TWI767828B (zh) * 2021-08-27 2022-06-11 開必拓數據股份有限公司 應用於具有卷對卷機構的設備的馬達控制系統
JP7706659B2 (ja) * 2022-06-08 2025-07-11 株式会社ヴィーネックス 光学ラインセンサ
CN115993369A (zh) * 2022-12-31 2023-04-21 浙江洁美电子科技股份有限公司 一种膜缺陷检测方法及装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04270949A (ja) * 1991-02-27 1992-09-28 Toyobo Co Ltd 欠点検出装置
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method
US6490032B1 (en) * 2000-05-31 2002-12-03 Newport Fab, Llc Method and apparatus for improving a dark field inspection environment
KR100543733B1 (ko) * 2001-11-30 2006-01-23 인터내셔널 비지네스 머신즈 코포레이션 패턴 프로파일의 검사 장치 및 검사 방법, 노광 장치
JP2004177377A (ja) * 2002-11-29 2004-06-24 Hitachi Ltd 検査方法および検査装置
JP2006098198A (ja) * 2004-09-29 2006-04-13 Futec Inc 透明部材の欠陥検査装置
US7796805B1 (en) * 2005-09-26 2010-09-14 Kla-Tencor Corporation Defect detection
JP4908995B2 (ja) * 2006-09-27 2012-04-04 株式会社日立ハイテクノロジーズ 欠陥分類方法及びその装置並びに欠陥検査装置
JP4615532B2 (ja) 2007-03-06 2011-01-19 株式会社メック 欠陥検査装置、照明装置
US7710557B2 (en) * 2007-04-25 2010-05-04 Hitachi High-Technologies Corporation Surface defect inspection method and apparatus
JP2013253906A (ja) * 2012-06-08 2013-12-19 Toppan Printing Co Ltd ウェブ搬送物の検査方法及び検査装置
JP2015068670A (ja) * 2013-09-27 2015-04-13 東レ株式会社 シート状物の欠点検査装置およびシート状物の欠点検査方法
JP6679942B2 (ja) * 2016-01-15 2020-04-15 東レ株式会社 シートのキズ欠点検査装置
JP6789141B2 (ja) * 2017-01-31 2020-11-25 大王製紙株式会社 衛生薄葉紙の評価方法
JP6389977B1 (ja) * 2018-06-05 2018-09-12 株式会社ヒューテック 欠陥検査装置

Also Published As

Publication number Publication date
US20210358109A1 (en) 2021-11-18
KR102721999B1 (ko) 2024-10-25
KR20210060466A (ko) 2021-05-26
JPWO2020059426A1 (ja) 2021-08-30
CN112703393A (zh) 2021-04-23
WO2020059426A1 (ja) 2020-03-26
EP3855172A1 (en) 2021-07-28
JP7392470B2 (ja) 2023-12-06
US11341630B2 (en) 2022-05-24
EP3855172B1 (en) 2025-04-16
EP3855172A4 (en) 2022-06-22
CN112703393B (zh) 2023-06-27

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