CN112703393B - 片状物的缺陷检查用照明、片状物的缺陷检查装置和片状物的缺陷检查方法 - Google Patents

片状物的缺陷检查用照明、片状物的缺陷检查装置和片状物的缺陷检查方法 Download PDF

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Publication number
CN112703393B
CN112703393B CN201980060619.2A CN201980060619A CN112703393B CN 112703393 B CN112703393 B CN 112703393B CN 201980060619 A CN201980060619 A CN 201980060619A CN 112703393 B CN112703393 B CN 112703393B
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light
sheet
defect inspection
shielding
illumination
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CN112703393A (zh
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杉原洋树
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Toray Industries Inc
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Toray Industries Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V11/00—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00
    • F21V11/08—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00 using diaphragms containing one or more apertures
    • F21V11/14—Screens not covered by groups F21V1/00, F21V3/00, F21V7/00 or F21V9/00 using diaphragms containing one or more apertures with many small apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/86—Investigating moving sheets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8905—Directional selective optics, e.g. slits, spatial filters

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Multimedia (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201980060619.2A 2018-09-21 2019-08-23 片状物的缺陷检查用照明、片状物的缺陷检查装置和片状物的缺陷检查方法 Active CN112703393B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2018176918 2018-09-21
JP2018-176918 2018-09-21
PCT/JP2019/033190 WO2020059426A1 (ja) 2018-09-21 2019-08-23 シート状物の欠点検査用照明、シート状物の欠点検査装置、およびシート状物の欠点検査方法

Publications (2)

Publication Number Publication Date
CN112703393A CN112703393A (zh) 2021-04-23
CN112703393B true CN112703393B (zh) 2023-06-27

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CN201980060619.2A Active CN112703393B (zh) 2018-09-21 2019-08-23 片状物的缺陷检查用照明、片状物的缺陷检查装置和片状物的缺陷检查方法

Country Status (7)

Country Link
US (1) US11341630B2 (https=)
EP (1) EP3855172B1 (https=)
JP (1) JP7392470B2 (https=)
KR (1) KR102721999B1 (https=)
CN (1) CN112703393B (https=)
MY (1) MY204678A (https=)
WO (1) WO2020059426A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12427528B2 (en) * 2020-01-15 2025-09-30 Jdc Corporation Rotary crushing apparatus
CN115598127A (zh) * 2021-07-08 2023-01-13 捷将科技有限公司（Tw） 用于编织状素材的红外线检测装置及红外线检测方法
TWI767828B (zh) * 2021-08-27 2022-06-11 開必拓數據股份有限公司 應用於具有卷對卷機構的設備的馬達控制系統
JP7706659B2 (ja) * 2022-06-08 2025-07-11 株式会社ヴィーネックス 光学ラインセンサ
CN115993369A (zh) * 2022-12-31 2023-04-21 浙江洁美电子科技股份有限公司 一种膜缺陷检测方法及装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04270949A (ja) * 1991-02-27 1992-09-28 Toyobo Co Ltd 欠点検出装置
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method
US6490032B1 (en) * 2000-05-31 2002-12-03 Newport Fab, Llc Method and apparatus for improving a dark field inspection environment
KR100543733B1 (ko) * 2001-11-30 2006-01-23 인터내셔널 비지네스 머신즈 코포레이션 패턴 프로파일의 검사 장치 및 검사 방법, 노광 장치
JP2004177377A (ja) * 2002-11-29 2004-06-24 Hitachi Ltd 検査方法および検査装置
JP2006098198A (ja) * 2004-09-29 2006-04-13 Futec Inc 透明部材の欠陥検査装置
US7796805B1 (en) * 2005-09-26 2010-09-14 Kla-Tencor Corporation Defect detection
JP4908995B2 (ja) * 2006-09-27 2012-04-04 株式会社日立ハイテクノロジーズ 欠陥分類方法及びその装置並びに欠陥検査装置
JP4615532B2 (ja) 2007-03-06 2011-01-19 株式会社メック 欠陥検査装置、照明装置
US7710557B2 (en) * 2007-04-25 2010-05-04 Hitachi High-Technologies Corporation Surface defect inspection method and apparatus
JP2013253906A (ja) * 2012-06-08 2013-12-19 Toppan Printing Co Ltd ウェブ搬送物の検査方法及び検査装置
JP2015068670A (ja) * 2013-09-27 2015-04-13 東レ株式会社 シート状物の欠点検査装置およびシート状物の欠点検査方法
JP6679942B2 (ja) * 2016-01-15 2020-04-15 東レ株式会社 シートのキズ欠点検査装置
JP6789141B2 (ja) * 2017-01-31 2020-11-25 大王製紙株式会社 衛生薄葉紙の評価方法
JP6389977B1 (ja) * 2018-06-05 2018-09-12 株式会社ヒューテック 欠陥検査装置

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Publication number Publication date
US20210358109A1 (en) 2021-11-18
KR102721999B1 (ko) 2024-10-25
KR20210060466A (ko) 2021-05-26
JPWO2020059426A1 (ja) 2021-08-30
CN112703393A (zh) 2021-04-23
WO2020059426A1 (ja) 2020-03-26
EP3855172A1 (en) 2021-07-28
JP7392470B2 (ja) 2023-12-06
US11341630B2 (en) 2022-05-24
MY204678A (en) 2024-09-09
EP3855172B1 (en) 2025-04-16
EP3855172A4 (en) 2022-06-22

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