MY173674A - Passivation stack on a crystalline silicon solar cell - Google Patents

Passivation stack on a crystalline silicon solar cell

Info

Publication number
MY173674A
MY173674A MYPI2016701768A MYPI2016701768A MY173674A MY 173674 A MY173674 A MY 173674A MY PI2016701768 A MYPI2016701768 A MY PI2016701768A MY PI2016701768 A MYPI2016701768 A MY PI2016701768A MY 173674 A MY173674 A MY 173674A
Authority
MY
Malaysia
Prior art keywords
layer
crystalline
depositing
silicon
silicon oxynitride
Prior art date
Application number
MYPI2016701768A
Other languages
English (en)
Inventor
Junjie Zhu
Su Zhou
Halvard Haug
Marstein Erik Stensrud
Sean Erik Foss
Wenjing Wang
Chunlan Zhou
Original Assignee
Inst Energiteknik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inst Energiteknik filed Critical Inst Energiteknik
Publication of MY173674A publication Critical patent/MY173674A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308—Oxynitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H01L21/0214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC the material being a silicon oxynitride, e.g. SiON or SiON:H
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
    • H01L21/02301—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment in-situ cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Photovoltaic Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Chemical Vapour Deposition (AREA)
MYPI2016701768A 2013-11-19 2014-11-19 Passivation stack on a crystalline silicon solar cell MY173674A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO20131549A NO341687B1 (no) 2013-11-19 2013-11-19 Passiveringssabel på en solcelle av krystallinsk silisium

Publications (1)

Publication Number Publication Date
MY173674A true MY173674A (en) 2020-02-14

Family

ID=50030409

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2016701768A MY173674A (en) 2013-11-19 2014-11-19 Passivation stack on a crystalline silicon solar cell

Country Status (7)

Country Link
US (1) US9660130B2 (zh)
EP (1) EP3072165B1 (zh)
JP (1) JP2017504186A (zh)
CN (1) CN105745768B (zh)
MY (1) MY173674A (zh)
NO (1) NO341687B1 (zh)
WO (1) WO2015076678A1 (zh)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3059463B1 (fr) * 2016-11-30 2018-12-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Structure et procede de passivation.
KR101846444B1 (ko) * 2017-01-13 2018-04-06 엘지전자 주식회사 태양 전지
KR102053912B1 (ko) * 2017-09-01 2019-12-09 주식회사 한화 계면 특성이 향상된 perc 솔라셀, 솔라셀 제조 방법 및 제조 장치
CN109950363A (zh) * 2019-03-29 2019-06-28 山西潞安太阳能科技有限责任公司 一种perc太阳能电池的背面钝化工艺
CN110854243B (zh) * 2019-12-31 2024-03-22 太仓市哲泰天产品设计有限公司 一种氮氧化硅perc背钝化方法及钝化炉
CN111416013A (zh) * 2020-05-02 2020-07-14 熵熠(上海)能源科技有限公司 一种以氢化非晶氮氧化硅薄膜为钝化层的异质结太阳电池
CN112382696B (zh) * 2020-10-15 2022-05-10 山西潞安太阳能科技有限责任公司 一种新型晶硅SiON双面电池背钝化工艺
CN116314356A (zh) 2021-02-23 2023-06-23 浙江晶科能源有限公司 太阳能电池及其制作方法、太阳能组件
CN116845115A (zh) * 2021-09-06 2023-10-03 上海晶科绿能企业管理有限公司 太阳能电池及光伏组件
CN114883453B (zh) * 2022-06-17 2023-03-28 意诚新能(苏州)科技有限公司 一种双面多层钝化膜、制备方法及晶硅太阳能电池
CN118198200B (zh) * 2024-05-14 2024-08-20 金阳(泉州)新能源科技有限公司 一种背接触电池的制作方法

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
US4717631A (en) * 1986-01-16 1988-01-05 Rca Corporation Silicon oxynitride passivated semiconductor body and method of making same
DE10152707B4 (de) * 2001-10-19 2004-08-26 Rwe Schott Solar Gmbh Verfahren zur Herstellung einer Solarzelle
JP2006140282A (ja) * 2004-11-11 2006-06-01 Sharp Corp 結晶シリコン太陽電池の製造方法
WO2006110048A1 (en) * 2005-04-14 2006-10-19 Renewable Energy Corporation Asa Surface passivation of silicon based wafers
US20080179762A1 (en) * 2007-01-25 2008-07-31 Au Optronics Corporation Layered structure with laser-induced aggregation silicon nano-dots in a silicon-rich dielectric layer, and applications of the same
JPWO2010087320A1 (ja) * 2009-01-27 2012-08-02 株式会社アルバック 太陽電池及び太陽電池の製造方法
JP5334645B2 (ja) * 2009-03-31 2013-11-06 富士フイルム株式会社 可撓性太陽電池モジュール
GB2471128A (en) * 2009-06-18 2010-12-22 Rec Solar As Surface passivation of silicon wafers
EP2561558A4 (en) * 2010-04-23 2014-04-16 Solexel Inc PASSIVATION METHODS AND APPARATUS FOR OBTAINING ULTRA-SLOW SURFACE RECOMBINATION SPEEDS FOR HIGH-EFFICIENCY SOLAR CELLS
DE102011086351A1 (de) * 2011-11-15 2013-05-16 International Solar Energy Research Center Konstanz E.V. Verfahren zur Herstellung einer Solarzelle mit PECVD-Kombinationsschicht und Solarzelle mit PECVD-Kombinationsschicht
JP2013128077A (ja) * 2011-12-19 2013-06-27 Sharp Corp 界面パッシベーション構造、裏面パッシベーション型太陽電池および界面パッシベーション構造の製造方法

Also Published As

Publication number Publication date
WO2015076678A1 (en) 2015-05-28
NO20131549A1 (no) 2015-05-20
EP3072165A4 (en) 2017-09-06
US20160276519A1 (en) 2016-09-22
EP3072165A1 (en) 2016-09-28
NO341687B1 (no) 2017-12-18
CN105745768A (zh) 2016-07-06
CN105745768B (zh) 2017-11-24
EP3072165B1 (en) 2020-07-01
JP2017504186A (ja) 2017-02-02
US9660130B2 (en) 2017-05-23

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