MY155242A - Antireflective coating compositions - Google Patents

Antireflective coating compositions

Info

Publication number
MY155242A
MY155242A MYPI2011000055A MYPI20110055A MY155242A MY 155242 A MY155242 A MY 155242A MY PI2011000055 A MYPI2011000055 A MY PI2011000055A MY PI20110055 A MYPI20110055 A MY PI20110055A MY 155242 A MY155242 A MY 155242A
Authority
MY
Malaysia
Prior art keywords
coating compositions
antireflective coating
antireflective
disclosed
related polymers
Prior art date
Application number
MYPI2011000055A
Other languages
English (en)
Inventor
Yao Huirong
Xiang Zhong
Shan Jianhui
Mullen Salem
Wu Hengpeng
Original Assignee
Merck Patent Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck Patent Gmbh filed Critical Merck Patent Gmbh
Publication of MY155242A publication Critical patent/MY155242A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D167/00Coating compositions based on polyesters obtained by reactions forming a carboxylic ester link in the main chain; Coating compositions based on derivatives of such polymers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/3236Heterocylic compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09DCOATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D163/00Coating compositions based on epoxy resins; Coating compositions based on derivatives of epoxy resins
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/111Anti-reflection coatings using layers comprising organic materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/68Polyesters containing atoms other than carbon, hydrogen and oxygen
    • C08G63/685Polyesters containing atoms other than carbon, hydrogen and oxygen containing nitrogen
    • C08G63/6854Polyesters containing atoms other than carbon, hydrogen and oxygen containing nitrogen derived from polycarboxylic acids and polyhydroxy compounds
MYPI2011000055A 2008-07-08 2009-04-29 Antireflective coating compositions MY155242A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/133,562 US8221965B2 (en) 2008-07-08 2008-07-08 Antireflective coating compositions

Publications (1)

Publication Number Publication Date
MY155242A true MY155242A (en) 2015-09-30

Family

ID=40886504

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2011000055A MY155242A (en) 2008-07-08 2009-04-29 Antireflective coating compositions

Country Status (8)

Country Link
US (1) US8221965B2 (US20100009293A1-20100114-C00010.png)
EP (1) EP2300518B1 (US20100009293A1-20100114-C00010.png)
JP (1) JP5568791B2 (US20100009293A1-20100114-C00010.png)
KR (1) KR101429326B1 (US20100009293A1-20100114-C00010.png)
CN (1) CN102056969B (US20100009293A1-20100114-C00010.png)
MY (1) MY155242A (US20100009293A1-20100114-C00010.png)
TW (1) TWI512063B (US20100009293A1-20100114-C00010.png)
WO (1) WO2010004377A1 (US20100009293A1-20100114-C00010.png)

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KR102414150B1 (ko) * 2017-10-17 2022-06-29 에스케이이노베이션 주식회사 바닥반사방지막 형성용 중합체, 이를 포함하는 바닥반사방지막 형성용 조성물 및 이를 이용한 바닥반사방지막의 형성방법
KR102264693B1 (ko) * 2018-06-11 2021-06-11 삼성에스디아이 주식회사 레지스트 하층막용 조성물 및 이를 이용한 패턴형성방법
WO2020004122A1 (ja) * 2018-06-26 2020-01-02 日産化学株式会社 グリシジルエステル化合物との反応生成物を含むレジスト下層膜形成組成物
WO2020026834A1 (ja) * 2018-07-31 2020-02-06 日産化学株式会社 レジスト下層膜形成組成物
KR102288386B1 (ko) * 2018-09-06 2021-08-10 삼성에스디아이 주식회사 레지스트 하층막용 조성물 및 이를 이용한 패턴 형성 방법
US20240004295A1 (en) * 2020-10-07 2024-01-04 Nissan Chemical Corporation Resist underlayer film-forming composition containing a reaction product of trifunctional compound
CN116082914B (zh) * 2022-11-24 2024-04-30 厦门恒坤新材料科技股份有限公司 一种有机抗反射涂层组合物及其制备方法和图案形成方法
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Also Published As

Publication number Publication date
KR101429326B1 (ko) 2014-08-12
JP5568791B2 (ja) 2014-08-13
US20100009293A1 (en) 2010-01-14
TW201002793A (en) 2010-01-16
WO2010004377A8 (en) 2011-03-31
EP2300518A1 (en) 2011-03-30
CN102056969B (zh) 2014-09-24
US8221965B2 (en) 2012-07-17
EP2300518B1 (en) 2012-08-15
CN102056969A (zh) 2011-05-11
JP2011527460A (ja) 2011-10-27
KR20110042262A (ko) 2011-04-26
TWI512063B (zh) 2015-12-11
WO2010004377A1 (en) 2010-01-14

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