MXPA01010337A - Metodo para incrementar la produccion en procesos de deposicion de capas delgadas sobre un substrato. - Google Patents

Metodo para incrementar la produccion en procesos de deposicion de capas delgadas sobre un substrato.

Info

Publication number
MXPA01010337A
MXPA01010337A MXPA01010337A MXPA01010337A MXPA01010337A MX PA01010337 A MXPA01010337 A MX PA01010337A MX PA01010337 A MXPA01010337 A MX PA01010337A MX PA01010337 A MXPA01010337 A MX PA01010337A MX PA01010337 A MXPA01010337 A MX PA01010337A
Authority
MX
Mexico
Prior art keywords
chamber
degassing device
pressure
degassing
mbar
Prior art date
Application number
MXPA01010337A
Other languages
English (en)
Spanish (es)
Inventor
Andrea Conte
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT1999MI000744A external-priority patent/IT1312248B1/it
Application filed by Getters Spa filed Critical Getters Spa
Publication of MXPA01010337A publication Critical patent/MXPA01010337A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
MXPA01010337A 1999-04-12 2000-04-11 Metodo para incrementar la produccion en procesos de deposicion de capas delgadas sobre un substrato. MXPA01010337A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT1999MI000744A IT1312248B1 (it) 1999-04-12 1999-04-12 Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
PCT/IT2000/000136 WO2000061832A1 (en) 1999-04-12 2000-04-11 Method and getter devices for use in deposition of thin layers

Publications (1)

Publication Number Publication Date
MXPA01010337A true MXPA01010337A (es) 2002-03-27

Family

ID=34308071

Family Applications (1)

Application Number Title Priority Date Filing Date
MXPA01010337A MXPA01010337A (es) 1999-04-12 2000-04-11 Metodo para incrementar la produccion en procesos de deposicion de capas delgadas sobre un substrato.

Country Status (6)

Country Link
KR (1) KR100469527B1 (ko)
HK (1) HK1045860B (ko)
MX (1) MXPA01010337A (ko)
MY (1) MY123684A (ko)
RU (1) RU2240377C2 (ko)
TW (1) TWI232889B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2523718C2 (ru) * 2012-11-20 2014-07-20 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский университет "МИЭТ" (МИЭТ) Нанокомпозитная газопоглощающая структура и способ ее получения

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method

Also Published As

Publication number Publication date
HK1045860B (zh) 2006-09-15
HK1045860A1 (en) 2002-12-13
MY123684A (en) 2006-05-31
KR20010113796A (ko) 2001-12-28
RU2240377C2 (ru) 2004-11-20
KR100469527B1 (ko) 2005-02-02
TWI232889B (en) 2005-05-21

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