MX2021013700A - Aparato de medición tridimensional y método de medición tridimensional. - Google Patents
Aparato de medición tridimensional y método de medición tridimensional.Info
- Publication number
- MX2021013700A MX2021013700A MX2021013700A MX2021013700A MX2021013700A MX 2021013700 A MX2021013700 A MX 2021013700A MX 2021013700 A MX2021013700 A MX 2021013700A MX 2021013700 A MX2021013700 A MX 2021013700A MX 2021013700 A MX2021013700 A MX 2021013700A
- Authority
- MX
- Mexico
- Prior art keywords
- measurement
- height
- range
- dimensional measurement
- height position
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0817—Monitoring of soldering processes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/083—Quality monitoring using results from monitoring devices, e.g. feedback loops
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
- G01N2021/95646—Soldering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Operations Research (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Image Analysis (AREA)
Abstract
Se proporciona un aparato de medición tridimensional y un método de medición tridimensional que obtiene mejoras de precisión de medición y similares. Un aparato de inspección de sustrato 10 incluye una cabeza de medición 12 que se proporciona con un dispositivo de irradiación 13, un dispositivo de proyección 14 y una cámara 15. El aparato de inspección de sustrato 10 primero irradia un intervalo de inspección sobre un tablero de circuito impreso 1 con luz de ranura desde el dispositivo de irradiación 13 y mide la altura del intervalo de inspección. El aparato de inspección de sustrato 10 subsecuentemente determina la altura de una superficie de referencia de medición de cada pasta de soldadura incluida en el intervalo de inspección, con base en la altura de este intervalo de inspección y específica un intervalo de enfoque requerido que se requiere para generación de imagen de un intervalo completo en una dirección de altura de cada pasta de soldadura en un estado de enfoque. El aparato de inspección de sustrato 10 subsecuentemente cartografía una posición de altura de una cabeza de medición 12 a la pasta de soldadura que es un objetivo medido en la posición de altura, con base en los intervalos de enfoque requeridos de las pastas de soldadura respectivas y una profundidad de campo de la cámara 15. El aparato de inspección de sustrato 10 sucesivamente mueve la cabeza de medición 12 a una posición de altura predeterminada determinada por la cartografía y realiza la medición de soldadura con respecto a la pasta de soldadura 5 que es el objetivo medido en la posición de altura.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019099886A JP7000380B2 (ja) | 2019-05-29 | 2019-05-29 | 三次元計測装置及び三次元計測方法 |
PCT/JP2020/015674 WO2020241061A1 (ja) | 2019-05-29 | 2020-04-07 | 三次元計測装置及び三次元計測方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2021013700A true MX2021013700A (es) | 2022-05-30 |
Family
ID=73548653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2021013700A MX2021013700A (es) | 2019-05-29 | 2020-04-07 | Aparato de medición tridimensional y método de medición tridimensional. |
Country Status (6)
Country | Link |
---|---|
US (1) | US11930600B2 (es) |
JP (1) | JP7000380B2 (es) |
CN (1) | CN113767263B (es) |
DE (1) | DE112020002626T5 (es) |
MX (1) | MX2021013700A (es) |
WO (1) | WO2020241061A1 (es) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102019126419A1 (de) * | 2019-05-08 | 2020-11-12 | Docter Optics Se | Vorrichtung zum optischen Abbilden von Merkmalen einer Hand |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3872007B2 (ja) | 2002-12-16 | 2007-01-24 | シーケーディ株式会社 | 計測装置及び検査装置 |
JP4862149B2 (ja) * | 2005-09-02 | 2012-01-25 | 国立大学法人 岡山大学 | クリームはんだ印刷の検査方法および装置 |
US7545512B2 (en) * | 2006-01-26 | 2009-06-09 | Koh Young Technology Inc. | Method for automated measurement of three-dimensional shape of circuit boards |
CN201069355Y (zh) * | 2007-07-09 | 2008-06-04 | 深圳市隆威自动化科技有限公司 | 一种三维锡膏测厚仪 |
JP4931728B2 (ja) * | 2007-08-08 | 2012-05-16 | シーケーディ株式会社 | 三次元計測装置及び基板検査機 |
CN103134446B (zh) * | 2008-02-26 | 2017-03-01 | 株式会社高永科技 | 三维形状测量装置及测量方法 |
JP4744610B2 (ja) * | 2009-01-20 | 2011-08-10 | シーケーディ株式会社 | 三次元計測装置 |
US8369603B2 (en) * | 2009-07-03 | 2013-02-05 | Koh Young Technology Inc. | Method for inspecting measurement object |
KR101078781B1 (ko) * | 2010-02-01 | 2011-11-01 | 주식회사 고영테크놀러지 | 3차원 형상 검사방법 |
US9124810B2 (en) * | 2010-04-14 | 2015-09-01 | Koh Young Technology Inc. | Method of checking an inspection apparatus and method of establishing a measurement variable of the inspection apparatus |
JP2011252864A (ja) * | 2010-06-03 | 2011-12-15 | Sony Corp | 検査装置及び検査方法 |
KR101547218B1 (ko) * | 2010-11-19 | 2015-08-25 | 주식회사 고영테크놀러지 | 기판 검사방법 |
US9885669B2 (en) * | 2010-12-29 | 2018-02-06 | Koh Young Technology Inc. | Method of inspecting a substrate |
US20130027538A1 (en) * | 2011-07-29 | 2013-01-31 | Mitutoyo Corporation | Multi-region focus navigation interface |
JP5847568B2 (ja) * | 2011-12-15 | 2016-01-27 | Ckd株式会社 | 三次元計測装置 |
KR101215083B1 (ko) * | 2011-12-27 | 2012-12-24 | 경북대학교 산학협력단 | 기판 검사장치의 높이정보 생성 방법 |
TWI546518B (zh) * | 2012-04-20 | 2016-08-21 | 德律科技股份有限公司 | 三維量測系統與三維量測方法 |
JP6116164B2 (ja) * | 2012-09-11 | 2017-04-19 | 株式会社キーエンス | 形状測定装置、形状測定方法および形状測定プログラム |
JP5997127B2 (ja) * | 2013-11-18 | 2016-09-28 | Ckd株式会社 | 半田印刷検査装置及び基板製造システム |
TWI526671B (zh) * | 2015-01-20 | 2016-03-21 | 德律科技股份有限公司 | 板彎量測裝置和其板彎量測方法 |
WO2016137624A1 (en) * | 2015-02-24 | 2016-09-01 | Rambus Inc. | Depth measurement using a phase grating |
JP6109255B2 (ja) * | 2015-07-14 | 2017-04-05 | Ckd株式会社 | 三次元計測装置 |
JP6027204B1 (ja) * | 2015-10-05 | 2016-11-16 | Ckd株式会社 | 三次元計測装置 |
JP2017122641A (ja) * | 2016-01-07 | 2017-07-13 | Ckd株式会社 | 三次元計測装置 |
JP6189984B2 (ja) * | 2016-02-12 | 2017-08-30 | Ckd株式会社 | 三次元計測装置 |
JP6450697B2 (ja) * | 2016-03-22 | 2019-01-09 | Ckd株式会社 | 基板検査装置 |
JP6450700B2 (ja) * | 2016-03-29 | 2019-01-09 | Ckd株式会社 | 基板検査装置 |
JP6722522B2 (ja) * | 2016-06-24 | 2020-07-15 | 株式会社キーエンス | 三次元測定装置及びその制御方法 |
-
2019
- 2019-05-29 JP JP2019099886A patent/JP7000380B2/ja active Active
-
2020
- 2020-04-07 DE DE112020002626.4T patent/DE112020002626T5/de active Pending
- 2020-04-07 WO PCT/JP2020/015674 patent/WO2020241061A1/ja active Application Filing
- 2020-04-07 CN CN202080032457.4A patent/CN113767263B/zh active Active
- 2020-04-07 MX MX2021013700A patent/MX2021013700A/es unknown
-
2021
- 2021-11-10 US US17/523,266 patent/US11930600B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2020193880A (ja) | 2020-12-03 |
US20220071073A1 (en) | 2022-03-03 |
JP7000380B2 (ja) | 2022-01-19 |
US11930600B2 (en) | 2024-03-12 |
CN113767263A (zh) | 2021-12-07 |
WO2020241061A1 (ja) | 2020-12-03 |
CN113767263B (zh) | 2024-05-07 |
DE112020002626T5 (de) | 2022-02-17 |
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