MX2019012721A - Peliculas basadas en altin ricas en al. - Google Patents
Peliculas basadas en altin ricas en al.Info
- Publication number
- MX2019012721A MX2019012721A MX2019012721A MX2019012721A MX2019012721A MX 2019012721 A MX2019012721 A MX 2019012721A MX 2019012721 A MX2019012721 A MX 2019012721A MX 2019012721 A MX2019012721 A MX 2019012721A MX 2019012721 A MX2019012721 A MX 2019012721A
- Authority
- MX
- Mexico
- Prior art keywords
- altin
- based film
- aitin
- rich
- based films
- Prior art date
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0094—Reactive sputtering in transition mode
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Esta invención se refiere a un recubrimiento que comprende al menos una película a base de AlTiN depositada por medio de un proceso de DFV, en el que la al menos una película a base de AlTiN depositada comprende un contenido de Al, en relación con el contenido de Ti, en porcentaje atómico superior al 75 %, y en el que la película a base de AlTiN exhibe únicamente una fase cristalográfica cúbica y tensiones de compresión internas y esta invención se refiere a un método que implica la deposición de una película a base de AlTiN.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762554213P | 2017-09-05 | 2017-09-05 | |
PCT/EP2018/073915 WO2019048507A1 (en) | 2017-09-05 | 2018-09-05 | ALTIN FILMS RICH IN AL |
Publications (1)
Publication Number | Publication Date |
---|---|
MX2019012721A true MX2019012721A (es) | 2019-12-05 |
Family
ID=63517888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2019012721A MX2019012721A (es) | 2017-09-05 | 2018-09-05 | Peliculas basadas en altin ricas en al. |
Country Status (7)
Country | Link |
---|---|
US (2) | US11965234B2 (es) |
EP (1) | EP3625377A1 (es) |
JP (1) | JP7266810B2 (es) |
KR (1) | KR20200049701A (es) |
CN (1) | CN110573645B (es) |
MX (1) | MX2019012721A (es) |
WO (1) | WO2019048507A1 (es) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102064172B1 (ko) * | 2017-09-01 | 2020-01-09 | 한국야금 주식회사 | 내마모성과 인성이 우수한 경질피막 |
KR20210090227A (ko) | 2018-11-09 | 2021-07-19 | 외를리콘 서피스 솔루션즈 아게, 페피콘 | 세라믹 표적으로부터 증착된 입방정계 Al-풍부 AlTiN 코팅 |
US20220297196A1 (en) | 2019-06-19 | 2022-09-22 | Ab Sandvik Coromant | Method of producing a coated cutting tool and a coated cutting tool |
CN114929416A (zh) * | 2020-01-20 | 2022-08-19 | 京瓷株式会社 | 涂层刀具 |
US20230097468A1 (en) | 2020-02-21 | 2023-03-30 | Moldino Tool Engineering, Ltd. | Coated tool |
KR20210138231A (ko) | 2020-05-12 | 2021-11-19 | 이무헌 | Hvof를 이용한 삼상코팅 절삭공구 제조 방법 |
CN114277336B (zh) * | 2020-09-28 | 2022-10-14 | 上海交通大学 | 基于Al3Ti纳米针垂直排列的Al基合金薄膜及其制备方法 |
US20230399733A1 (en) * | 2020-09-29 | 2023-12-14 | Oerlikon Surface Solutions Ag, Pfäffikon | Al-rich altin coating layers produced by pvd from metallic targets |
KR20230121058A (ko) * | 2020-12-16 | 2023-08-17 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | PVD에 의해 세라믹 타겟으로부터 생성된 경질 입방체형 Al-풍부 AlTiN 코팅층 |
WO2022229427A1 (en) * | 2021-04-30 | 2022-11-03 | Walter Ag | A coated cutting tool |
JP7319600B6 (ja) * | 2021-12-10 | 2023-08-18 | 株式会社タンガロイ | 被覆切削工具 |
US11724317B1 (en) | 2022-03-10 | 2023-08-15 | Kennametal Inc. | Cubic phase refractory coatings and applications thereof |
DE102022124181A1 (de) | 2022-09-21 | 2024-03-21 | Kennametal Inc. | Verfahren zur Herstellung eines beschichteten Körpers sowie beschichteter Körper erhältlich gemäß dem Verfahren |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3700633C2 (de) * | 1987-01-12 | 1997-02-20 | Reinar Dr Gruen | Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma |
JPH0634818B2 (ja) * | 1992-04-09 | 1994-05-11 | 大 山岡 | Ti−Al−N組成物の皮膜を備えた器具 |
JP2816786B2 (ja) * | 1992-09-16 | 1998-10-27 | 健 増本 | Al−Ti系又はAl−Ta系耐摩耗性硬質膜及びその製造方法 |
JP4703349B2 (ja) * | 2005-10-11 | 2011-06-15 | Okiセミコンダクタ株式会社 | アモルファス膜の成膜方法 |
HUE047421T2 (hu) * | 2011-06-30 | 2020-04-28 | Oerlikon Surface Solutions Ag Pfaeffikon | Nanoréteg bevonat nagyteljesítményû szerszámokhoz |
JP6093363B2 (ja) | 2011-09-30 | 2017-03-08 | セメコン アーゲー | Hipimsを用いた基材のコーティング |
EP2954265B1 (en) * | 2013-02-08 | 2017-05-03 | Council of Scientific and Industrial Research | A hybrid multilayer solar selective coating for high temperature solar thermal applications and a process for the preparation thereof |
CN105088127B (zh) * | 2015-08-31 | 2018-04-24 | 科汇纳米技术(深圳)有限公司 | 一种涂层及其制备方法 |
WO2017110463A1 (ja) | 2015-12-22 | 2017-06-29 | コニカミノルタ株式会社 | ガスバリアーフィルム及びその製造方法 |
-
2018
- 2018-09-05 US US16/607,994 patent/US11965234B2/en active Active
- 2018-09-05 CN CN201880026991.7A patent/CN110573645B/zh active Active
- 2018-09-05 JP JP2019556340A patent/JP7266810B2/ja active Active
- 2018-09-05 WO PCT/EP2018/073915 patent/WO2019048507A1/en unknown
- 2018-09-05 EP EP18765625.1A patent/EP3625377A1/en active Pending
- 2018-09-05 MX MX2019012721A patent/MX2019012721A/es unknown
- 2018-09-05 KR KR1020197030661A patent/KR20200049701A/ko not_active Application Discontinuation
-
2023
- 2023-09-28 US US18/476,570 patent/US20240043985A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
KR20200049701A (ko) | 2020-05-08 |
US20210108306A1 (en) | 2021-04-15 |
US11965234B2 (en) | 2024-04-23 |
JP7266810B2 (ja) | 2023-05-01 |
US20240043985A1 (en) | 2024-02-08 |
EP3625377A1 (en) | 2020-03-25 |
WO2019048507A1 (en) | 2019-03-14 |
CN110573645B (zh) | 2021-08-17 |
CN110573645A (zh) | 2019-12-13 |
JP2020532644A (ja) | 2020-11-12 |
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