MX2016003237A - Dispositivo de flujo de gas para un sistema para el tratamiento con radiacion de sustratos. - Google Patents

Dispositivo de flujo de gas para un sistema para el tratamiento con radiacion de sustratos.

Info

Publication number
MX2016003237A
MX2016003237A MX2016003237A MX2016003237A MX2016003237A MX 2016003237 A MX2016003237 A MX 2016003237A MX 2016003237 A MX2016003237 A MX 2016003237A MX 2016003237 A MX2016003237 A MX 2016003237A MX 2016003237 A MX2016003237 A MX 2016003237A
Authority
MX
Mexico
Prior art keywords
substrates
gas
gas flow
chamber
radiation treatment
Prior art date
Application number
MX2016003237A
Other languages
English (en)
Other versions
MX369668B (es
Inventor
ribeiro Carlos
Original Assignee
Oerlikon Surface Solutions Ag Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfäffikon filed Critical Oerlikon Surface Solutions Ag Pfäffikon
Publication of MX2016003237A publication Critical patent/MX2016003237A/es
Publication of MX369668B publication Critical patent/MX369668B/es

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00Drying solid materials or objects by processes involving the application of heat
    • F26B3/28Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065After-treatment
    • B05D3/066After-treatment involving also the use of a gas
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29BPREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B13/00Conditioning or physical treatment of the material to be shaped
    • B29B13/06Conditioning or physical treatment of the material to be shaped by drying
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0092Drying moulded articles or half products, e.g. preforms, during or after moulding or cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/04After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/02Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
    • F26B21/022Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure with provisions for changing the drying gas flow pattern, e.g. by reversing gas flow, by moving the materials or objects through subsequent compartments, at least two of which have a different direction of gas flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06Chambers, containers, or receptacles
    • F26B25/08Parts thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00Drying solid materials or objects by processes involving the application of heat
    • F26B3/02Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00Drying solid materials or objects by processes involving the application of heat
    • F26B3/28Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/30Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0822Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/04Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould using liquids, gas or steam
    • B29C35/045Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould using liquids, gas or steam using gas or flames

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Drying Of Solid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Furnace Details (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Cleaning In General (AREA)

Abstract

La invención se refiere a un sistema para el tratamiento con radiación de sustratos, que incluye al menos una fuente de radiación por encima de los sujetadores de sustrato en una cámara, cuyos sujetadores van a ser equipados con sustratos que se van a tratar, y la cámara tiene medios para mantener una flujo de gas en la cámara, que tiene al menos una entrada de gas y al menos una salida de gas, caracterizado porque al menos una entrada de gas está situada en las proximidades de los sujetadores de sustrato, de manera que el gas que fluye dentro por medio de al menos una primera entrada de gas fluye alrededor de los sujetadores de sustrato ya se antes de salir de la cámara directamente a través de la salida de gas o bien salir después de fluir alrededor de la al menos una fuente de radiación.
MX2016003237A 2013-09-20 2014-09-05 Dispositivo de flujo de gas para un sistema para el tratamiento con radiacion de sustratos. MX369668B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE201310015580 DE102013015580A1 (de) 2013-09-20 2013-09-20 Gasstromvorrichtung für Anlage zur Strahlungsbehandlung von Substraten
PCT/EP2014/002406 WO2015039732A1 (de) 2013-09-20 2014-09-05 Gasstromvorrichtung für anlage zur strahlungsbehandlung von substraten

Publications (2)

Publication Number Publication Date
MX2016003237A true MX2016003237A (es) 2016-10-28
MX369668B MX369668B (es) 2019-11-14

Family

ID=51542322

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2016003237A MX369668B (es) 2013-09-20 2014-09-05 Dispositivo de flujo de gas para un sistema para el tratamiento con radiacion de sustratos.

Country Status (14)

Country Link
US (1) US10245616B2 (es)
EP (1) EP3046686B1 (es)
JP (1) JP6492089B2 (es)
KR (1) KR20160075518A (es)
CN (1) CN105555423B (es)
CA (1) CA2924785A1 (es)
DE (1) DE102013015580A1 (es)
ES (1) ES2712992T3 (es)
HU (1) HUE043144T2 (es)
MX (1) MX369668B (es)
PL (1) PL3046686T3 (es)
PT (1) PT3046686T (es)
RU (1) RU2670926C9 (es)
WO (1) WO2015039732A1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI667123B (zh) * 2018-11-30 2019-08-01 國家中山科學研究院 Improved intake structure for laminated manufacturing
CN216631458U (zh) * 2021-11-05 2022-05-31 江苏时代新能源科技有限公司 风嘴及涂布机

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1953074A1 (de) 1969-10-22 1970-10-29 Eisenmann Kg Strahlungshaerter fuer UV-Polyester
US3733461A (en) * 1971-05-26 1973-05-15 Powell R Radiant heater
GB1499770A (en) * 1974-10-15 1978-02-01 Ushio Electric Inc Light fitting for a tubular light source which includes a cooling arrangement
US4336279A (en) 1978-07-04 1982-06-22 Metzger Wesley A Apparatus and process for drying and curing coated substrates
US4220865A (en) * 1978-11-24 1980-09-02 Sun Chemical Corporation Ultraviolet curing oven with rotable lamp assembly
FI841491A (fi) * 1983-04-25 1984-10-26 Christian Lumpp Anordning foer aostadkommande och reflektering av infraroed eller ultraviolett straolning.
US4563589A (en) * 1984-01-09 1986-01-07 Scheffer Herbert D Ultraviolet curing lamp device
JPS60191038A (ja) * 1984-03-07 1985-09-28 Oak Seisakusho:Kk 紫外線照射装置
FR2599485B1 (fr) 1986-05-27 1988-08-26 Socoa Dispositif rechauffeur-melangeur d'un flux de gaz froid avec un flux de gaz chaud, et sechoir a grains comportant un tel dispositif
US5099586A (en) * 1989-09-08 1992-03-31 W. R. Grace & Co.-Conn. Reflector assembly for heating a substrate
US5445515A (en) * 1992-10-14 1995-08-29 Nissei Asb Machine Co., Ltd. Apparatus for forming a heat-resistant container
DE9306998U1 (de) 1993-05-08 1993-07-08 Novokeram Max Wagner GmbH, 8908 Krumbach Trockeneinrichtung für keramische Formlinge
JPH08174567A (ja) * 1994-10-25 1996-07-09 Ushio Inc 光照射器
US6072158A (en) 1998-10-22 2000-06-06 Konal Engineering And Equipment Inc. Method and apparatus for heating thin plastic sheet with air diffuser plate preventing sagging of the sheet
US6456895B1 (en) * 1999-09-13 2002-09-24 Fitel Usa Corp. Method and apparatus for detecting conditions in a UV curing lamp system
US6325981B1 (en) * 1999-09-28 2001-12-04 Alcatel Apparatus and method for curing a photocurable coating provided on a fiber
DE10125770C2 (de) * 2001-05-26 2003-06-26 Arccure Technologies Gmbh Bestrahlungsvorrichtung mit langgestreckter Strahlungsquelle und Verfahren zum Betrieb derselben
DE10224128A1 (de) * 2002-05-29 2003-12-18 Schmid Rhyner Ag Adliswil Verfahren zum Auftrag von Beschichtungen auf Oberflächen
DE102004030674A1 (de) * 2004-06-24 2006-01-19 Basf Ag Vorrichtung und Verfahren zum Härten mit energiereicher Strahlung unter Inertgasatmosphäre
CN2866577Y (zh) * 2005-11-15 2007-02-07 李朝基 纸板上光机的热风循环装置
BRPI0910056A2 (pt) * 2008-03-24 2015-12-29 Sherwin Williams Co método de pintura com cura a temperaturas ambientes
FR2960816B1 (fr) 2010-06-02 2012-07-13 Sidel Participations Four pour le conditionnement thermique de preformes et procede de commande d'un dispositif de refroidissement par air equipant un tel four
DE102012017230A1 (de) * 2012-08-31 2014-03-06 Oerlikon Trading Ag, Trübbach Anlage zur Strahlungsbehandlung von Substraten

Also Published As

Publication number Publication date
HUE043144T2 (hu) 2019-08-28
EP3046686A1 (de) 2016-07-27
US20160214138A1 (en) 2016-07-28
CN105555423B (zh) 2017-11-21
CN105555423A (zh) 2016-05-04
JP2016538163A (ja) 2016-12-08
RU2016115042A (ru) 2017-10-25
EP3046686B1 (de) 2018-11-07
PL3046686T3 (pl) 2019-04-30
CA2924785A1 (en) 2015-03-26
MX369668B (es) 2019-11-14
PT3046686T (pt) 2019-02-12
WO2015039732A1 (de) 2015-03-26
JP6492089B2 (ja) 2019-03-27
RU2670926C2 (ru) 2018-10-25
DE102013015580A1 (de) 2015-03-26
RU2670926C9 (ru) 2018-12-13
US10245616B2 (en) 2019-04-02
KR20160075518A (ko) 2016-06-29
ES2712992T3 (es) 2019-05-17

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