RU2016115042A - Газорасходное устройство для установки для облучения подложек - Google Patents

Газорасходное устройство для установки для облучения подложек Download PDF

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Publication number
RU2016115042A
RU2016115042A RU2016115042A RU2016115042A RU2016115042A RU 2016115042 A RU2016115042 A RU 2016115042A RU 2016115042 A RU2016115042 A RU 2016115042A RU 2016115042 A RU2016115042 A RU 2016115042A RU 2016115042 A RU2016115042 A RU 2016115042A
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RU
Russia
Prior art keywords
gas
installation
flow channels
substrates
flow
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Application number
RU2016115042A
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English (en)
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RU2670926C2 (ru
RU2670926C9 (ru
Inventor
Карлос РИБЕЙРО
Original Assignee
Эрликон Серфиз Солюшнз Аг, Пфеффикон
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Publication of RU2016115042A publication Critical patent/RU2016115042A/ru
Publication of RU2670926C2 publication Critical patent/RU2670926C2/ru
Application granted granted Critical
Publication of RU2670926C9 publication Critical patent/RU2670926C9/ru

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065—After-treatment
    • B05D3/066—After-treatment involving also the use of a gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B13/00—Conditioning or physical treatment of the material to be shaped
    • B29B13/06—Conditioning or physical treatment of the material to be shaped by drying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0092—Drying moulded articles or half products, e.g. preforms, during or after moulding or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C71/00—After-treatment of articles without altering their shape; Apparatus therefor
    • B29C71/04—After-treatment of articles without altering their shape; Apparatus therefor by wave energy or particle radiation, e.g. for curing or vulcanising preformed articles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/02—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure
    • F26B21/022—Circulating air or gases in closed cycles, e.g. wholly within the drying enclosure with provisions for changing the drying gas flow pattern, e.g. by reversing gas flow, by moving the materials or objects through subsequent compartments, at least two of which have a different direction of gas flow
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
    • F26B25/06—Chambers, containers, or receptacles
    • F26B25/08—Parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/02—Drying solid materials or objects by processes involving the application of heat by convection, i.e. heat being conveyed from a heat source to the materials or objects to be dried by a gas or vapour, e.g. air
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B3/00—Drying solid materials or objects by processes involving the application of heat
    • F26B3/28—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun
    • F26B3/30—Drying solid materials or objects by processes involving the application of heat by radiation, e.g. from the sun from infrared-emitting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0822—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/04—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould using liquids, gas or steam
    • B29C35/045—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould using liquids, gas or steam using gas or flames

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microbiology (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Oral & Maxillofacial Surgery (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Drying Of Solid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Furnace Details (AREA)
  • Cleaning In General (AREA)
  • Coating Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Claims (4)

1. Установка (401) для облучения подложек, которая в камере над подложкодержателями (11, 11') для оснащения подлежащими обработке подложками содержит по меньшей мере один источник (9, 9', 9") излучения, причем камера содержит средства для поддержания газового потока в камере с газорасходным устройством с по меньшей мере одним впуском (421, 421') газа и по меньшей мере одним выпуском (423, 405) газа, отличающаяся тем, что газорасходное устройство расположено в области ниже подложкодержателей (11, 11') и выполнено так, что впуск (421, 421') газа и выпуск (423, 405) газа содержат элементы, которые образуют сужающиеся в направлении потока и затем ниже по потоку снова расширяющиеся проточные каналы, вследствие чего при работе установки устанавливается, по существу, ламинарное течение по меньшей мере у газорасходного устройства и поэтому не происходит отложений из-за турбулентности.
2. Установка по п.1, отличающаяся тем, что образующие проточные каналы элементы выполнены из деформируемых пластин, предпочтительно из стального листа.
3. Установка по п.2, отличающаяся тем, что по меньшей мере два из образующих проточные каналы элементов удерживаются вместе в верхней части посредством шин, скоб и/или колпаков, что позволяет легкий монтаж или демонтаж.
4. Установка по п.3, отличающаяся тем, что образующие проточные каналы элементы являются по меньшей мере двустенными, причем указанные по меньшей мере две стенки отстоят друг от друга, в результате чего образуется теплоизолирующий зазор (S).
RU2016115042A 2013-09-20 2014-09-05 Газорасходное устройство для установки для облучения подложек RU2670926C9 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE201310015580 DE102013015580A1 (de) 2013-09-20 2013-09-20 Gasstromvorrichtung für Anlage zur Strahlungsbehandlung von Substraten
DE102013015580.0 2013-09-20
PCT/EP2014/002406 WO2015039732A1 (de) 2013-09-20 2014-09-05 Gasstromvorrichtung für anlage zur strahlungsbehandlung von substraten

Publications (3)

Publication Number Publication Date
RU2016115042A true RU2016115042A (ru) 2017-10-25
RU2670926C2 RU2670926C2 (ru) 2018-10-25
RU2670926C9 RU2670926C9 (ru) 2018-12-13

Family

ID=51542322

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2016115042A RU2670926C9 (ru) 2013-09-20 2014-09-05 Газорасходное устройство для установки для облучения подложек

Country Status (14)

Country Link
US (1) US10245616B2 (ru)
EP (1) EP3046686B1 (ru)
JP (1) JP6492089B2 (ru)
KR (1) KR20160075518A (ru)
CN (1) CN105555423B (ru)
CA (1) CA2924785A1 (ru)
DE (1) DE102013015580A1 (ru)
ES (1) ES2712992T3 (ru)
HU (1) HUE043144T2 (ru)
MX (1) MX369668B (ru)
PL (1) PL3046686T3 (ru)
PT (1) PT3046686T (ru)
RU (1) RU2670926C9 (ru)
WO (1) WO2015039732A1 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI667123B (zh) * 2018-11-30 2019-08-01 國家中山科學研究院 Improved intake structure for laminated manufacturing
CN216631458U (zh) * 2021-11-05 2022-05-31 江苏时代新能源科技有限公司 风嘴及涂布机

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Also Published As

Publication number Publication date
PL3046686T3 (pl) 2019-04-30
US10245616B2 (en) 2019-04-02
JP6492089B2 (ja) 2019-03-27
WO2015039732A1 (de) 2015-03-26
RU2670926C2 (ru) 2018-10-25
RU2670926C9 (ru) 2018-12-13
EP3046686A1 (de) 2016-07-27
MX369668B (es) 2019-11-14
JP2016538163A (ja) 2016-12-08
CN105555423A (zh) 2016-05-04
HUE043144T2 (hu) 2019-08-28
ES2712992T3 (es) 2019-05-17
CA2924785A1 (en) 2015-03-26
US20160214138A1 (en) 2016-07-28
KR20160075518A (ko) 2016-06-29
MX2016003237A (es) 2016-10-28
CN105555423B (zh) 2017-11-21
EP3046686B1 (de) 2018-11-07
PT3046686T (pt) 2019-02-12
DE102013015580A1 (de) 2015-03-26

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