MD498G2 - Process of thin - filmed structures production - Google Patents

Process of thin - filmed structures production

Info

Publication number
MD498G2
MD498G2 MD95-0020A MD950020A MD498G2 MD 498 G2 MD498 G2 MD 498G2 MD 950020 A MD950020 A MD 950020A MD 498 G2 MD498 G2 MD 498G2
Authority
MD
Moldova
Prior art keywords
evaporator
evaporation
components
dispensers
thin film
Prior art date
Application number
MD95-0020A
Other languages
Romanian (ro)
Russian (ru)
Other versions
MD498F1 (en
Inventor
Vadim Septichin
Original Assignee
Государственный Университет Молд0
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Государственный Университет Молд0 filed Critical Государственный Университет Молд0
Priority to MD95-0020A priority Critical patent/MD498G2/en
Publication of MD498F1 publication Critical patent/MD498F1/en
Publication of MD498G2 publication Critical patent/MD498G2/en

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  • Physical Vapour Deposition (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)

Abstract

Invenţia se referă la tehnologia depunerii straturilor în vid, în special, la prepararea structurilor peliculare subţiri pe baza semiconductoarelor, cu distribuţie complicată a componentelor de-a lungul grosimii în corespundere cu o lege stabilită în prealabil, şi poate fi utilizată la prepararea straturilor fotosensibile folosite în cadrul sistemelor electrofotografice de înregistrare a informaţiei optice. Procedeul de obţinere a structurilor peliculare subţiri conţine în sine încărcarea materialului iniţial în dozatoare, vidarea incintei până la un vid înalt, încălzirea evaporatorului, evaporarea materialului prin utilizarea evaporării instantanee, presărându-l din dozatoare pe suprafaţa evaporatorului deja încălzit.Rezultatul tehnic al invenţiei constă în posibilitatea efectuării încălzirii evaporatorului până la temperatura, ce asigură evaporarea instantanee a tuturor componentelor materialului iniţial, şi în presărarea concomitentă a componentelor, conform unei legi stabilite în prealabil.The invention relates to the technology of vacuum coating, in particular, to the preparation of thin film structures based on semiconductors, with complicated distribution of components along the thickness in accordance with a previously established law, and can be used in the preparation of used photosensitive layers. within the electrophotographic systems for recording optical information. The process of obtaining the thin film structures contains by itself the loading of the initial material into dispensers, the emptying of the enclosure to a high vacuum, the heating of the evaporator, the evaporation of the material by the use of instant evaporation, sprinkling it from the dispensers on the surface of the already heated evaporator. The technical result in the possibility of heating the evaporator to the temperature, which ensures the instantaneous evaporation of all the components of the starting material, and in the simultaneous sprinkling of the components, according to a previously established law.

MD95-0020A 1994-12-22 1994-12-22 Process of thin - filmed structures production MD498G2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MD95-0020A MD498G2 (en) 1994-12-22 1994-12-22 Process of thin - filmed structures production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MD95-0020A MD498G2 (en) 1994-12-22 1994-12-22 Process of thin - filmed structures production

Publications (2)

Publication Number Publication Date
MD498F1 MD498F1 (en) 1996-10-31
MD498G2 true MD498G2 (en) 1997-05-31

Family

ID=19738612

Family Applications (1)

Application Number Title Priority Date Filing Date
MD95-0020A MD498G2 (en) 1994-12-22 1994-12-22 Process of thin - filmed structures production

Country Status (1)

Country Link
MD (1) MD498G2 (en)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Журнал "ФТП", т.5, № 8, 1971 г., Б.Т. Коломиец, В.М.Любин, В.С.Майдзинский и др."Электрические и фотоэлектрические свойства некоторых пленочных аморфных гетероструктур", c. 1533-1540. *

Also Published As

Publication number Publication date
MD498F1 (en) 1996-10-31

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Legal Events

Date Code Title Description
FG3A Granted patent for invention
IF99 Valid patent on 19990615

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