MD498G2 - Process of thin - filmed structures production - Google Patents
Process of thin - filmed structures productionInfo
- Publication number
- MD498G2 MD498G2 MD95-0020A MD950020A MD498G2 MD 498 G2 MD498 G2 MD 498G2 MD 950020 A MD950020 A MD 950020A MD 498 G2 MD498 G2 MD 498G2
- Authority
- MD
- Moldova
- Prior art keywords
- filmed
- thin
- evaporator
- feeding
- heating
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Landscapes
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to the coating vacuum application technology, particularly to the thin-filmed semiconductive coating obtaining with the before hand determined compound distribution of the chemical composition along the layer thickness and may be used for the photosensitive structures production used in the electric photographical system of optical information registration.The process of thin - filmed structures production includes the charging of the obtained material, pumping of the working volume to the high vacuum, heating up of the evaporator, the material discontinuous evaporation by feeding it from the weigher to the beforehand heated up evaporator.The technical result of the invention consists in the possibility of carrying out the heating up of the evaporator to a temperature ensuring the discontinuous evaporation of all components of the obtained material and the feeding of its components is produced simultaneously on the beforehand settled law.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MD95-0020A MD498G2 (en) | 1994-12-22 | 1994-12-22 | Process of thin - filmed structures production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MD95-0020A MD498G2 (en) | 1994-12-22 | 1994-12-22 | Process of thin - filmed structures production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| MD498F1 MD498F1 (en) | 1996-10-31 |
| MD498G2 true MD498G2 (en) | 1997-05-31 |
Family
ID=19738612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| MD95-0020A MD498G2 (en) | 1994-12-22 | 1994-12-22 | Process of thin - filmed structures production |
Country Status (1)
| Country | Link |
|---|---|
| MD (1) | MD498G2 (en) |
-
1994
- 1994-12-22 MD MD95-0020A patent/MD498G2/en active IP Right Grant
Non-Patent Citations (1)
| Title |
|---|
| Журнал "ФТП", т.5, № 8, 1971 г., Б.Т. Коломиец, В.М.Любин, В.С.Майдзинский и др."Электрические и фотоэлектрические свойства некоторых пленочных аморфных гетероструктур", c. 1533-1540. * |
Also Published As
| Publication number | Publication date |
|---|---|
| MD498F1 (en) | 1996-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG3A | Granted patent for invention | ||
| IF99 | Valid patent on 19990615 |
Free format text: EXPIRES: 20141222 |