MD249Y - Procedeu de fabricare a racitorului termoelectric pentru substratul circuitului integrat - Google Patents

Procedeu de fabricare a racitorului termoelectric pentru substratul circuitului integrat Download PDF

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Publication number
MD249Y
MD249Y MDS20090070A MDS20090070A MD249Y MD 249 Y MD249 Y MD 249Y MD S20090070 A MDS20090070 A MD S20090070A MD S20090070 A MDS20090070 A MD S20090070A MD 249 Y MD249 Y MD 249Y
Authority
MD
Moldova
Prior art keywords
thermoelectric cooler
substrate
integrated circuit
layer
manufacturing
Prior art date
Application number
MDS20090070A
Other languages
English (en)
Inventor
Efim ZASAVITCHI
Alexandr Belenciuc
Oleg Sapoval
Original Assignee
Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei filed Critical Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei
Priority to MDS20090070A priority Critical patent/MD249Z/ro
Publication of MD249Y publication Critical patent/MD249Y/ro
Publication of MD249Z publication Critical patent/MD249Z/ro

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Abstract

Inventia se refera la procedee de fabricare a racitorului termoelectric pentru substratul circuitului integrat si poate fi aplicata in diferite domenii ale microelectronicii, tehnicii de calcul, medicinii si in alte domenii, care necesita indepartarea caldurii. Procedeul de fabricare a racitorului termoelectric pentru substratul circuitului integrat consta in aceea ca substratul circuitului integrat executat din siliciu se trateaza chimic, se recoace la temperatura de 1073K timp de 3(5 min intr-o camera de vid suprainalt. Apoi pe acesta se depune un strat intermediar dublu pe baza de fluoruri la temperatura de 973K, compus dintr-un strat de CaF2 cu grosimea de 2(3 nm si un strat de BaF2 cu grosimea de aproximativ 150 nm, cu o viteza de 0,1 nm/s. Pe stratul intermediar dublu se depune un strat termoelectric de convertizare executat din material semiconductor de tipul A4B6, pe care se amplaseaza un radiator cu ventilator.
MDS20090070A 2009-04-29 2009-04-29 Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat MD249Z (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20090070A MD249Z (ro) 2009-04-29 2009-04-29 Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20090070A MD249Z (ro) 2009-04-29 2009-04-29 Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat

Publications (2)

Publication Number Publication Date
MD249Y true MD249Y (ro) 2010-07-30
MD249Z MD249Z (ro) 2011-02-28

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ID=45815089

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20090070A MD249Z (ro) 2009-04-29 2009-04-29 Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat

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MD (1) MD249Z (ro)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5762131A (en) * 1993-09-03 1998-06-09 Kabushiki Kaisha Sekuto Kagaku Heat radiating board and method for cooling by using the same
MD627G2 (ro) * 1994-07-25 1997-06-30 Государственный Университет Молд0 Procedeu de obţinere a straturilor epitaxiale de fosfură de indiu din fază gazoasă
MD957G2 (ro) * 1996-09-12 1999-02-28 Государственный Университет Молд0 Procedeu şi instalaţie pentru obţinerea structurilor epitaxiale multestratificate
US6197435B1 (en) * 1997-11-07 2001-03-06 Denki Kagaku Kogyo Kabushiki Kaisha Substrate
GB9814835D0 (en) * 1998-07-08 1998-09-09 Europ Org For Nuclear Research A thermal management board
JP3690171B2 (ja) * 1999-03-16 2005-08-31 株式会社日立製作所 複合材料とその製造方法及び用途
MD20000111A (ro) * 2000-06-27 2002-07-31 Vieru Stanislav Dispozitiv pentru clivarea în vid a structurilor epitaxiale semiconductoare
RU2206502C2 (ru) * 2000-11-21 2003-06-20 Акционерное общество закрытого типа "Карбид" Композиционный материал
WO2004097934A2 (en) * 2003-05-01 2004-11-11 Queen Mary & Westfield College An encased thermal management device and method of making such a device
US7550097B2 (en) * 2003-09-03 2009-06-23 Momentive Performance Materials, Inc. Thermal conductive material utilizing electrically conductive nanoparticles
KR100652621B1 (ko) * 2003-11-21 2006-12-06 엘지전자 주식회사 휴대용 단말기의 방열장치
MD2556G2 (ro) * 2004-06-01 2005-03-31 Ион ТИГИНЯНУ Procedeu de obtinere a nanostructurilor semiconductoare
MD20070209A (ro) * 2007-07-23 2009-01-31 Технический университет Молдовы Procedeu de obţinere a straturilor subţiri de semiconductori oxidici
MD4013G2 (ro) * 2007-10-31 2010-08-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Procedeu de obţinere a aliajului cu magnetorezistenţă mărită pentru confecţionarea microfirelor
MD20080058A (ro) * 2008-02-25 2009-08-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Dispozitiv de obţinere a peliculelor supraconductoare
MD3934C2 (ro) * 2008-09-08 2010-01-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Procedeu de obţinere a substratului de BaF2 cu suprafaţă perfectă
  • 2009

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Publication number Publication date
MD249Z (ro) 2011-02-28

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Legal Events

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KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)