MD2556G2 - Procedeu de obtinere a nanostructurilor semiconductoare - Google Patents

Procedeu de obtinere a nanostructurilor semiconductoare Download PDF

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Publication number
MD2556G2
MD2556G2 MDA20040138A MD20040138A MD2556G2 MD 2556 G2 MD2556 G2 MD 2556G2 MD A20040138 A MDA20040138 A MD A20040138A MD 20040138 A MD20040138 A MD 20040138A MD 2556 G2 MD2556 G2 MD 2556G2
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MD
Moldova
Prior art keywords
obtaining
semiconductor
mask
semiconductor nanostructures
carried out
Prior art date
Application number
MDA20040138A
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English (en)
Russian (ru)
Other versions
MD2556F1 (ro
Inventor
Ион ТИГИНЯНУ
Вячеслав УРСАКИ
Вячеслав ПОПА
Эдуард МОНАЙКО
Original Assignee
Ион ТИГИНЯНУ
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Application filed by Ион ТИГИНЯНУ filed Critical Ион ТИГИНЯНУ
Priority to MDA20040138A priority Critical patent/MD2556G2/ro
Publication of MD2556F1 publication Critical patent/MD2556F1/ro
Publication of MD2556G2 publication Critical patent/MD2556G2/ro

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Abstract

Invenţia se referă la tehnologia semiconductoarelor, în special la procedee de obţinere a nanostructurilor semiconductoare.Procedeul de obţinere a nanostructurilor semiconductoare constă în faptul că pe una din feţele unui cristal de semiconductor, prin fotolitografie, se depune o mască, se corodează electrochimic şi se înlătură masca. Noutateainvenţiei constă în faptul că după înlăturarea măştii, se efectuează suplimentar corodarea electrochimică prin iradierea cu lumina, energia cuantelor cărei este mai mare decât valoarea benzii interzise a semiconductorului. 
MDA20040138A 2004-06-01 2004-06-01 Procedeu de obtinere a nanostructurilor semiconductoare MD2556G2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDA20040138A MD2556G2 (ro) 2004-06-01 2004-06-01 Procedeu de obtinere a nanostructurilor semiconductoare

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDA20040138A MD2556G2 (ro) 2004-06-01 2004-06-01 Procedeu de obtinere a nanostructurilor semiconductoare

Publications (2)

Publication Number Publication Date
MD2556F1 MD2556F1 (ro) 2004-09-30
MD2556G2 true MD2556G2 (ro) 2005-03-31

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MDA20040138A MD2556G2 (ro) 2004-06-01 2004-06-01 Procedeu de obtinere a nanostructurilor semiconductoare

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD3811G2 (ro) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a zonelor nanostructurale semiconductoare
MD152Z (ro) * 2009-03-10 2010-09-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de formare a unei microstructuri tridimensionale
MD193Z (ro) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a peliculei polisulfidice
MD249Z (ro) * 2009-04-29 2011-02-28 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709880B2 (en) * 2001-09-18 2004-03-23 Hitachi, Ltd. Semiconductor device and a manufacturing method of the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709880B2 (en) * 2001-09-18 2004-03-23 Hitachi, Ltd. Semiconductor device and a manufacturing method of the same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
McCord et al. Lithography with the Scanning Tunneling Microscope. J. Vac. Science Technology, B 4, 86, 1986 *
S. H. Zaidi et al. Scalable Fabrication and Optical Characterization of nm Si Structures. Materials Research Society Symp. Proc., Vol. 358, p. 957-968, 1995 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD3811G2 (ro) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a zonelor nanostructurale semiconductoare
MD152Z (ro) * 2009-03-10 2010-09-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de formare a unei microstructuri tridimensionale
MD249Z (ro) * 2009-04-29 2011-02-28 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Procedeu de fabricare a răcitorului termoelectric pentru substratul circuitului integrat
MD193Z (ro) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Procedeu de obţinere a peliculei polisulfidice

Also Published As

Publication number Publication date
MD2556F1 (ro) 2004-09-30

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MM4A Patent for invention definitely lapsed due to non-payment of fees