MD2556G2 - Process for semiconductor nanostructures obtaining - Google Patents

Process for semiconductor nanostructures obtaining

Info

Publication number
MD2556G2
MD2556G2 MDa20040138A MD20040138A MD2556G2 MD 2556 G2 MD2556 G2 MD 2556G2 MD 20040138 A MD20040138 A MD 20040138A MD 2556 G2 MD2556 G2 MD 2556G2
Authority
MD
Moldova
Prior art keywords
obtaining
semiconductor
mask
process
carried out
Prior art date
Application number
MDa20040138A
Other languages
Romanian (ro)
Russian (ru)
Other versions
MD2556F1 (en
Inventor
Ион ТИГИНЯНУ
Вячеслав УРСАКИ
Вячеслав ПОПА
Эдуард МОНАЙКО
Original Assignee
Ион ТИГИНЯНУ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ион ТИГИНЯНУ filed Critical Ион ТИГИНЯНУ
Priority to MDa20040138A priority Critical patent/MD2556G2/en
Publication of MD2556F1 publication Critical patent/MD2556F1/en
Publication of MD2556G2 publication Critical patent/MD2556G2/en

Links

Abstract

The invention relates to the semiconductor technology, in particular to the processes for semiconductor nonostructures obtaining.Summary of the invention consists in that onto one of the surfaces of a semiconducting crystal, by photolithography, it is deposited a mask, it is carried out the electrochemical pickling and it is removed the mask. Novelty of the invention consists in that after removal of the mask it is additionally carried out the electrochemical pickling by light irradiation, the quanta energy of which exceeds the value of the semiconductor prohibited zone.
MDa20040138A 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining MD2556G2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDa20040138A MD2556G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDa20040138A MD2556G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Publications (2)

Publication Number Publication Date
MD2556F1 MD2556F1 (en) 2004-09-30
MD2556G2 true MD2556G2 (en) 2005-03-31

Family

ID=33095721

Family Applications (1)

Application Number Title Priority Date Filing Date
MDa20040138A MD2556G2 (en) 2004-06-01 2004-06-01 Process for semiconductor nanostructures obtaining

Country Status (1)

Country Link
MD (1) MD2556G2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD3811G2 (en) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructural zones
MD152Z (en) * 2009-03-10 2010-09-30 Институт Прикладной Физики Академии Наук Молдовы Process for the formation of a three-dimensional microstructure
MD193Z (en) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Process for the obtaining of polysulphide film
MD249Z (en) * 2009-04-29 2011-02-28 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Process for manufacturing a thermoelectric cooler for the Chip substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709880B2 (en) * 2001-09-18 2004-03-23 Hitachi, Ltd. Semiconductor device and a manufacturing method of the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6709880B2 (en) * 2001-09-18 2004-03-23 Hitachi, Ltd. Semiconductor device and a manufacturing method of the same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
McCord et al. Lithography with the Scanning Tunneling Microscope. J. Vac. Science Technology, B 4, 86, 1986 *
S. H. Zaidi et al. Scalable Fabrication and Optical Characterization of nm Si Structures. Materials Research Society Symp. Proc., Vol. 358, p. 957-968, 1995 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MD3811G2 (en) * 2007-11-06 2009-08-31 Институт Прикладной Физики Академии Наук Молдовы Process for obtaining semiconductor nanostructural zones
MD152Z (en) * 2009-03-10 2010-09-30 Институт Прикладной Физики Академии Наук Молдовы Process for the formation of a three-dimensional microstructure
MD249Z (en) * 2009-04-29 2011-02-28 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Process for manufacturing a thermoelectric cooler for the Chip substrate
MD193Z (en) * 2009-06-04 2010-11-30 Институт Прикладной Физики Академии Наук Молдовы Process for the obtaining of polysulphide film

Also Published As

Publication number Publication date
MD2556F1 (en) 2004-09-30

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