MD249Y - Process for manufacturing a thermoelectric cooler for the Chip substrate - Google Patents

Process for manufacturing a thermoelectric cooler for the Chip substrate Download PDF

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Publication number
MD249Y
MD249Y MDS20090070A MDS20090070A MD249Y MD 249 Y MD249 Y MD 249Y MD S20090070 A MDS20090070 A MD S20090070A MD S20090070 A MDS20090070 A MD S20090070A MD 249 Y MD249 Y MD 249Y
Authority
MD
Moldova
Prior art keywords
thermoelectric cooler
substrate
integrated circuit
layer
manufacturing
Prior art date
Application number
MDS20090070A
Other languages
Romanian (ro)
Inventor
Efim ZASAVITCHI
Alexandr Belenciuc
Oleg Sapoval
Original Assignee
Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei filed Critical Institutul De Inginerie Electronica Si Tehnologii Industriale Al Academiei De Stiinte A Moldovei
Priority to MDS20090070A priority Critical patent/MD249Z/en
Publication of MD249Y publication Critical patent/MD249Y/en
Publication of MD249Z publication Critical patent/MD249Z/en

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Abstract

Inventia se refera la procedee de fabricare a racitorului termoelectric pentru substratul circuitului integrat si poate fi aplicata in diferite domenii ale microelectronicii, tehnicii de calcul, medicinii si in alte domenii, care necesita indepartarea caldurii. Procedeul de fabricare a racitorului termoelectric pentru substratul circuitului integrat consta in aceea ca substratul circuitului integrat executat din siliciu se trateaza chimic, se recoace la temperatura de 1073K timp de 3(5 min intr-o camera de vid suprainalt. Apoi pe acesta se depune un strat intermediar dublu pe baza de fluoruri la temperatura de 973K, compus dintr-un strat de CaF2 cu grosimea de 2(3 nm si un strat de BaF2 cu grosimea de aproximativ 150 nm, cu o viteza de 0,1 nm/s. Pe stratul intermediar dublu se depune un strat termoelectric de convertizare executat din material semiconductor de tipul A4B6, pe care se amplaseaza un radiator cu ventilator.The invention relates to processes for the manufacture of the thermoelectric cooler for the substrate of the integrated circuit and can be applied in different fields of microelectronics, computing technique, medicine and in other fields, which require the removal of heat. The process of manufacturing the thermoelectric cooler for the substrate of the integrated circuit consists in the fact that the substrate of the integrated circuit made of silicon is chemically treated, annealed at a temperature of 1073K for 3 (5 minutes in a super vacuum chamber). fluorine-based double intermediate layer at 973K, composed of a layer of CaF2 with a thickness of 2 (3 nm and a layer of BaF2 with a thickness of about 150 nm, with a velocity of 0.1 nm / s). the double intermediate layer is deposited a thermoelectric conversion layer made of semiconductor material of type A4B6, on which a radiator with fan is located.

MDS20090070A 2009-04-29 2009-04-29 Process for manufacturing a thermoelectric cooler for the Chip substrate MD249Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20090070A MD249Z (en) 2009-04-29 2009-04-29 Process for manufacturing a thermoelectric cooler for the Chip substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20090070A MD249Z (en) 2009-04-29 2009-04-29 Process for manufacturing a thermoelectric cooler for the Chip substrate

Publications (2)

Publication Number Publication Date
MD249Y true MD249Y (en) 2010-07-30
MD249Z MD249Z (en) 2011-02-28

Family

ID=45815089

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20090070A MD249Z (en) 2009-04-29 2009-04-29 Process for manufacturing a thermoelectric cooler for the Chip substrate

Country Status (1)

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MD (1) MD249Z (en)

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2129246C1 (en) * 1993-09-03 1999-04-20 Кабусики Кайся Секуто Кагаку Heat-radial panel and method of cooling by means of such panel
MD627G2 (en) * 1994-07-25 1997-06-30 Государственный Университет Молд0 The method of making epitaxy layers of phosphide indium from gaz phase
MD957G2 (en) * 1996-09-12 1999-02-28 Государственный Университет Молд0 Process and installation for obtaining multilayer epitaxial structures
US6197435B1 (en) * 1997-11-07 2001-03-06 Denki Kagaku Kogyo Kabushiki Kaisha Substrate
GB9814835D0 (en) * 1998-07-08 1998-09-09 Europ Org For Nuclear Research A thermal management board
JP3690171B2 (en) * 1999-03-16 2005-08-31 株式会社日立製作所 Composite material and its production method and application
MD20000111A (en) * 2000-06-27 2002-07-31 Vieru Stanislav Device for vacuum cleaving of epitaxial semiconductor structures
RU2206502C2 (en) * 2000-11-21 2003-06-20 Акционерное общество закрытого типа "Карбид" Composite material
KR20060010763A (en) * 2003-05-01 2006-02-02 퀸 메리 앤드 웨스트필드 컬리지 Cased thermal management device and manufacturing method thereof
US7550097B2 (en) * 2003-09-03 2009-06-23 Momentive Performance Materials, Inc. Thermal conductive material utilizing electrically conductive nanoparticles
KR100652621B1 (en) * 2003-11-21 2006-12-06 엘지전자 주식회사 Heat dissipation device of portable terminal
MD2556G2 (en) * 2004-06-01 2005-03-31 Ион ТИГИНЯНУ Process for semiconductor nanostructures obtaining
MD20070209A (en) * 2007-07-23 2009-01-31 Технический университет Молдовы Process for obtaining thin films of oxide semiconductors
MD4013G2 (en) * 2007-10-31 2010-08-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Process for obtaining an alloy with increased magnetic resistance for the manufacture of microwires
MD20080058A (en) * 2008-02-25 2009-08-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Device for obtaining superconducting layers
MD3934C2 (en) * 2008-09-08 2010-01-31 Институт Электронной Инженерии И Промышленных Технологий Академии Наук Молдовы Process for obtaining the substrate of BaF2 with perfect surface
  • 2009

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Publication number Publication date
MD249Z (en) 2011-02-28

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Legal Events

Date Code Title Description
KA4Y Short-term patent lapsed due to non-payment of fees (with right of restoration)