KR980004415A - 자기 헤드의 표면 개질 방법 - Google Patents
자기 헤드의 표면 개질 방법 Download PDFInfo
- Publication number
- KR980004415A KR980004415A KR1019970015968A KR19970015968A KR980004415A KR 980004415 A KR980004415 A KR 980004415A KR 1019970015968 A KR1019970015968 A KR 1019970015968A KR 19970015968 A KR19970015968 A KR 19970015968A KR 980004415 A KR980004415 A KR 980004415A
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- layer
- substrate
- magnetic head
- mbar
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
- G11B5/82—Disk carriers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Magnetic Record Carriers (AREA)
- Magnetic Heads (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
본 발명은 CF3기들의 고정된 공유 결합이 기관 상에 생성되는 플라즈마 내에서 기판에 도포된 층들중 최외측의 원자층을 개질시키는 방법이다. 이것에 정해진 두께를 갖는 층의 도포에 관한 것이 아니라 흡착 및 슬립의 소정 특성들을 미리 결정하도록 표면을 컨디셔닝(conditioning)하는 것에 관한 것이다. 물리적 파라미터들의 최대의 변화는 최소의 화학적 변화와 동시에 일어난다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (8)
- 플라즈마 체임버의 작동 방식을 근복적으로 결정짓는 파라미터, 즉 압력, 가스 조성 및 RF발생장치 출력을 플라즈마 채임버가 에칭과 가스상 중착 사이에 평형을 이룬 상태에서 작동되도록 서로 조절하고, 이때 가스 조정은 기판 표면을 화학적/물리적으로 활성화시키는 적어도 1종의 가스와, 플라즈마 내에서 반응성을 가지며 상기 활성화된 표면에 화학적으로 결합될 수 있는 성분들을 갖는 적어도 1종의 가스를 함유하는 것임을 특징으로, 하는 플라즈마 채임버 상에는 기판 상의 충돌중 외부 원자층을 개질시키는 방법.
- 제1항에 있어서, 기판이 자기 헤드인 것을 특징으로 하는 방법.
- 제2항에 있어서, 기판이 도포된 층이 다이아몬드형 층(카본오버코트(carbon overcoat)인 것을 특징으로 하는 방법.
- 제1항 내지 제3항중 어느 한항에 있어서 활성화 가스가 불활성 가스이고 결합가스가 불소화 가스인것을 특징으로 하는 방법.
- 제1항내지 제4항중 어느 한 항에 있어서, 압력이 2×10-3mbar내지 8×10-3mbar바람직하게는 6×10-3mbar이고,RF발생장치 출력이 100W내지 250W,바람직하게는 150W인것을 특징으로 하는 방법.
- 제4항에 있어서, 불활성 가스가 아르곤이고 불소화 가스가 CHF3인 것을 특징으로 하는 방법.
- 층의 최외측의 원자층만이 불소 함유 부분 관능기를 갖는 것을 특징으로 하는 기판에 도포되는 층.
- 자기 디스크 드라이브 내의 자기 헤드를 위한 표면으로서의 제7항에 따른 층의 용도.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19622732.1 | 1996-06-07 | ||
DE19622732A DE19622732C2 (de) | 1996-06-07 | 1996-06-07 | Oberflächenmodifikation von Magnetköpfen |
Publications (2)
Publication Number | Publication Date |
---|---|
KR980004415A true KR980004415A (ko) | 1998-03-30 |
KR100215180B1 KR100215180B1 (ko) | 1999-08-16 |
Family
ID=7796308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970015968A KR100215180B1 (ko) | 1996-06-07 | 1997-04-28 | 자기 헤드의 표면 개질 방법 |
Country Status (9)
Country | Link |
---|---|
US (1) | US5989625A (ko) |
EP (1) | EP0811704B1 (ko) |
JP (1) | JP3304281B2 (ko) |
KR (1) | KR100215180B1 (ko) |
CN (1) | CN1177168A (ko) |
DE (2) | DE19622732C2 (ko) |
MY (1) | MY120696A (ko) |
SG (1) | SG60049A1 (ko) |
TW (1) | TW325562B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100267368B1 (ko) * | 1998-04-11 | 2000-10-16 | 윤종용 | 하드디스크 드라이브의 커버장치 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3992125B2 (ja) | 1999-04-08 | 2007-10-17 | Tdk株式会社 | 薄膜磁気ヘッド及びその保護膜形成方法 |
CN100341047C (zh) * | 2003-09-17 | 2007-10-03 | 新科实业有限公司 | 薄膜形成方法和系统 |
CN1322490C (zh) * | 2004-05-26 | 2007-06-20 | 富士通株式会社 | 磁头滑动器和磁记录装置 |
DE102004039512B4 (de) * | 2004-06-01 | 2009-01-08 | Schunk Kohlenstofftechnik Gmbh | Kohlenstoffhaltiger Körper sowie Verfahren zum Behandeln eines solchen |
US7508632B2 (en) * | 2005-07-25 | 2009-03-24 | Seagate Technology Llc | Head-disc interface (HDI) with solid lubricants |
CN103093766A (zh) | 2007-12-06 | 2013-05-08 | 因特瓦克公司 | 用于构图介质的商业制造的系统和方法 |
JP5287592B2 (ja) * | 2009-08-11 | 2013-09-11 | 東京エレクトロン株式会社 | 成膜装置 |
JP5396264B2 (ja) * | 2009-12-25 | 2014-01-22 | 東京エレクトロン株式会社 | 成膜装置 |
US8518563B2 (en) * | 2010-02-23 | 2013-08-27 | Seagate Technology Llc | Covalently bound monolayer for a protective carbon overcoat |
US10304482B2 (en) | 2015-03-22 | 2019-05-28 | Seagate Technology Llc | Devices including an overcoat layer |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3374152D1 (en) * | 1983-05-02 | 1987-11-26 | Ibm Deutschland | Device consisting of a magnetic disc with a lubricant and a magnetic head, and process for manufacturing the device |
US4863809A (en) * | 1988-03-10 | 1989-09-05 | Magnetic Peripherals, Inc. | Surface treatment for sliders and carbon coated magnetic media |
WO1990006575A1 (de) * | 1988-12-07 | 1990-06-14 | Siemens Aktiengesellschaft | Magnetisches aufzeichnungsmedium sowie verfahren zu dessen herstellung |
US5266409A (en) * | 1989-04-28 | 1993-11-30 | Digital Equipment Corporation | Hydrogenated carbon compositions |
JP2781656B2 (ja) * | 1990-11-21 | 1998-07-30 | 株式会社日立製作所 | 記録媒体 |
US5661618A (en) * | 1995-12-11 | 1997-08-26 | International Business Machines Corporation | Magnetic recording device having a improved slider |
-
1996
- 1996-06-07 DE DE19622732A patent/DE19622732C2/de not_active Expired - Fee Related
- 1996-10-18 TW TW085112770A patent/TW325562B/zh active
-
1997
- 1997-03-31 SG SG1997001014A patent/SG60049A1/en unknown
- 1997-04-28 KR KR1019970015968A patent/KR100215180B1/ko not_active IP Right Cessation
- 1997-05-09 DE DE69704231T patent/DE69704231T2/de not_active Expired - Fee Related
- 1997-05-09 EP EP97107646A patent/EP0811704B1/en not_active Expired - Lifetime
- 1997-05-15 MY MYPI97002125A patent/MY120696A/en unknown
- 1997-05-16 CN CN97111568A patent/CN1177168A/zh active Pending
- 1997-05-19 JP JP12851097A patent/JP3304281B2/ja not_active Expired - Fee Related
- 1997-06-04 US US08/869,119 patent/US5989625A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100267368B1 (ko) * | 1998-04-11 | 2000-10-16 | 윤종용 | 하드디스크 드라이브의 커버장치 |
Also Published As
Publication number | Publication date |
---|---|
DE19622732A1 (de) | 1998-01-29 |
MY120696A (en) | 2005-11-30 |
EP0811704B1 (en) | 2001-03-14 |
KR100215180B1 (ko) | 1999-08-16 |
DE69704231D1 (de) | 2001-04-19 |
DE69704231T2 (de) | 2001-08-09 |
DE19622732C2 (de) | 2000-04-13 |
EP0811704A1 (en) | 1997-12-10 |
TW325562B (en) | 1998-01-21 |
JPH1068083A (ja) | 1998-03-10 |
JP3304281B2 (ja) | 2002-07-22 |
SG60049A1 (en) | 1999-02-22 |
US5989625A (en) | 1999-11-23 |
CN1177168A (zh) | 1998-03-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
G170 | Publication of correction | ||
FPAY | Annual fee payment |
Payment date: 20020307 Year of fee payment: 4 |
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LAPS | Lapse due to unpaid annual fee |