KR980004415A - 자기 헤드의 표면 개질 방법 - Google Patents

자기 헤드의 표면 개질 방법 Download PDF

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Publication number
KR980004415A
KR980004415A KR1019970015968A KR19970015968A KR980004415A KR 980004415 A KR980004415 A KR 980004415A KR 1019970015968 A KR1019970015968 A KR 1019970015968A KR 19970015968 A KR19970015968 A KR 19970015968A KR 980004415 A KR980004415 A KR 980004415A
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KR
South Korea
Prior art keywords
gas
layer
substrate
magnetic head
mbar
Prior art date
Application number
KR1019970015968A
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English (en)
Other versions
KR100215180B1 (ko
Inventor
하인즈 헐거스
피르 외리스
마틴 스트라우브
Original Assignee
제프리 엘. 포맨
인터내셔널 비지네스 머신즈 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 제프리 엘. 포맨, 인터내셔널 비지네스 머신즈 코포레이션 filed Critical 제프리 엘. 포맨
Publication of KR980004415A publication Critical patent/KR980004415A/ko
Application granted granted Critical
Publication of KR100215180B1 publication Critical patent/KR100215180B1/ko

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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8408—Processes or apparatus specially adapted for manufacturing record carriers protecting the magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)
  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Magnetic Heads (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

본 발명은 CF3기들의 고정된 공유 결합이 기관 상에 생성되는 플라즈마 내에서 기판에 도포된 층들중 최외측의 원자층을 개질시키는 방법이다. 이것에 정해진 두께를 갖는 층의 도포에 관한 것이 아니라 흡착 및 슬립의 소정 특성들을 미리 결정하도록 표면을 컨디셔닝(conditioning)하는 것에 관한 것이다. 물리적 파라미터들의 최대의 변화는 최소의 화학적 변화와 동시에 일어난다.

Description

자기 헤드의 표면 개질 방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (8)

  1. 플라즈마 체임버의 작동 방식을 근복적으로 결정짓는 파라미터, 즉 압력, 가스 조성 및 RF발생장치 출력을 플라즈마 채임버가 에칭과 가스상 중착 사이에 평형을 이룬 상태에서 작동되도록 서로 조절하고, 이때 가스 조정은 기판 표면을 화학적/물리적으로 활성화시키는 적어도 1종의 가스와, 플라즈마 내에서 반응성을 가지며 상기 활성화된 표면에 화학적으로 결합될 수 있는 성분들을 갖는 적어도 1종의 가스를 함유하는 것임을 특징으로, 하는 플라즈마 채임버 상에는 기판 상의 충돌중 외부 원자층을 개질시키는 방법.
  2. 제1항에 있어서, 기판이 자기 헤드인 것을 특징으로 하는 방법.
  3. 제2항에 있어서, 기판이 도포된 층이 다이아몬드형 층(카본오버코트(carbon overcoat)인 것을 특징으로 하는 방법.
  4. 제1항 내지 제3항중 어느 한항에 있어서 활성화 가스가 불활성 가스이고 결합가스가 불소화 가스인것을 특징으로 하는 방법.
  5. 제1항내지 제4항중 어느 한 항에 있어서, 압력이 2×10-3mbar내지 8×10-3mbar바람직하게는 6×10-3mbar이고,RF발생장치 출력이 100W내지 250W,바람직하게는 150W인것을 특징으로 하는 방법.
  6. 제4항에 있어서, 불활성 가스가 아르곤이고 불소화 가스가 CHF3인 것을 특징으로 하는 방법.
  7. 층의 최외측의 원자층만이 불소 함유 부분 관능기를 갖는 것을 특징으로 하는 기판에 도포되는 층.
  8. 자기 디스크 드라이브 내의 자기 헤드를 위한 표면으로서의 제7항에 따른 층의 용도.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970015968A 1996-06-07 1997-04-28 자기 헤드의 표면 개질 방법 KR100215180B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19622732A DE19622732C2 (de) 1996-06-07 1996-06-07 Oberflächenmodifikation von Magnetköpfen
DE19622732.1 1996-06-07

Publications (2)

Publication Number Publication Date
KR980004415A true KR980004415A (ko) 1998-03-30
KR100215180B1 KR100215180B1 (ko) 1999-08-16

Family

ID=7796308

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019970015968A KR100215180B1 (ko) 1996-06-07 1997-04-28 자기 헤드의 표면 개질 방법

Country Status (9)

Country Link
US (1) US5989625A (ko)
EP (1) EP0811704B1 (ko)
JP (1) JP3304281B2 (ko)
KR (1) KR100215180B1 (ko)
CN (1) CN1177168A (ko)
DE (2) DE19622732C2 (ko)
MY (1) MY120696A (ko)
SG (1) SG60049A1 (ko)
TW (1) TW325562B (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100267368B1 (ko) * 1998-04-11 2000-10-16 윤종용 하드디스크 드라이브의 커버장치

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3992125B2 (ja) 1999-04-08 2007-10-17 Ｔｄｋ株式会社 薄膜磁気ヘッド及びその保護膜形成方法
CN100341047C (zh) * 2003-09-17 2007-10-03 新科实业有限公司 薄膜形成方法和系统
CN1322490C (zh) * 2004-05-26 2007-06-20 富士通株式会社 磁头滑动器和磁记录装置
DE102004039512B4 (de) * 2004-06-01 2009-01-08 Schunk Kohlenstofftechnik Gmbh Kohlenstoffhaltiger Körper sowie Verfahren zum Behandeln eines solchen
US7508632B2 (en) * 2005-07-25 2009-03-24 Seagate Technology Llc Head-disc interface (HDI) with solid lubricants
CN101889101B (zh) 2007-12-06 2014-09-24 因特瓦克公司 用于基板的双面溅射蚀刻的系统和方法
JP5287592B2 (ja) * 2009-08-11 2013-09-11 東京エレクトロン株式会社 成膜装置
JP5396264B2 (ja) * 2009-12-25 2014-01-22 東京エレクトロン株式会社 成膜装置
US8518563B2 (en) * 2010-02-23 2013-08-27 Seagate Technology Llc Covalently bound monolayer for a protective carbon overcoat
US10304482B2 (en) 2015-03-22 2019-05-28 Seagate Technology Llc Devices including an overcoat layer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3374152D1 (en) * 1983-05-02 1987-11-26 Ibm Deutschland Device consisting of a magnetic disc with a lubricant and a magnetic head, and process for manufacturing the device
US4863809A (en) * 1988-03-10 1989-09-05 Magnetic Peripherals, Inc. Surface treatment for sliders and carbon coated magnetic media
WO1990006575A1 (de) * 1988-12-07 1990-06-14 Siemens Aktiengesellschaft Magnetisches aufzeichnungsmedium sowie verfahren zu dessen herstellung
US5266409A (en) * 1989-04-28 1993-11-30 Digital Equipment Corporation Hydrogenated carbon compositions
JP2781656B2 (ja) * 1990-11-21 1998-07-30 株式会社日立製作所 記録媒体
US5661618A (en) * 1995-12-11 1997-08-26 International Business Machines Corporation Magnetic recording device having a improved slider

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100267368B1 (ko) * 1998-04-11 2000-10-16 윤종용 하드디스크 드라이브의 커버장치

Also Published As

Publication number Publication date
MY120696A (en) 2005-11-30
EP0811704A1 (en) 1997-12-10
JP3304281B2 (ja) 2002-07-22
CN1177168A (zh) 1998-03-25
JPH1068083A (ja) 1998-03-10
DE69704231T2 (de) 2001-08-09
DE69704231D1 (de) 2001-04-19
DE19622732A1 (de) 1998-01-29
SG60049A1 (en) 1999-02-22
EP0811704B1 (en) 2001-03-14
TW325562B (en) 1998-01-21
KR100215180B1 (ko) 1999-08-16
US5989625A (en) 1999-11-23
DE19622732C2 (de) 2000-04-13

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