KR970070234A - 탄화규소성형체의 제조방법 - Google Patents
탄화규소성형체의 제조방법 Download PDFInfo
- Publication number
- KR970070234A KR970070234A KR1019970014727A KR19970014727A KR970070234A KR 970070234 A KR970070234 A KR 970070234A KR 1019970014727 A KR1019970014727 A KR 1019970014727A KR 19970014727 A KR19970014727 A KR 19970014727A KR 970070234 A KR970070234 A KR 970070234A
- Authority
- KR
- South Korea
- Prior art keywords
- silicon carbide
- silicon
- industry
- producing
- molded article
- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/571—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained from Si-containing polymer precursors or organosilicon monomers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Ceramic Products (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
1. 청구범위에 기재된 발명이 속한 기술분야
본 발명은, 반도체산업이나 전자산업 혹은 요업이나 제철업 등의 내열분야에 있어서 사용되는 탄화규소성형체의 제조방법에 관한 것이다.
2. 발명이 해결하고자 하는 기술적 과제
본 발명은, 종래기술의 문제점을 해소하고, 고밀도이면서 치밀하며, 필름형상의 얇은 성형물에 성형하여도 휘어짐이 발생하는 일이 없는 탄화규소성형체의 제조방법을 제공하는 것을 목적으로 한다.
3. 발명의 해결방법의 요지
본 발명의 탄화규소성형체의 제조방법은, 폴리카르보디이미드수지를 적절한 형상의 성형물로 하고, 이어서 그 성형물을 탄소화한 후, 규소 혹은 규소를 함유하는 가스와 반응시키는 것을 특징으로 하거나, 또는 얻어진 탄화규소성형체상에 CVD법에 의해서 탄화규소층을 형성하는 것을 특징으로 한다.
4. 발명의 중요한 용도
본 발명은 반도체산업이나 전자산업 또는 요업이나 제철업 등의 내열분야에 있어서 사용되는 탄화규소성형체의 제조방법으로서 매우 유용하다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
Claims (4)
- 폴리카르보디이미드수지를 적절한 형상의 성형물로 하고, 이어서 그 성형물을 탄소화한 후, 규소 또는 규소를 함유하는 가스와 반응시키는 것을 특징으로 하는 탄화규소성형체의 제조방법.
- 제1항에 있어서, 성형물의 탄소화는, 불활성분위기하, 1000℃~3000℃로 행하는 것을 특징으로 하는 탄화규소성형체의 제조방법.
- 폴리카르보디이미드수지를 적절한 형상의 성형물로 하고, 이어서 그 성형물을 탄소화한 후, 규소 혹는 규소를 함유하는 가스와 반응시킴으로써 탄화규소성형체로 하고, 이어서 그 탄화규소성형체상에 CVD법에 의해서 탄화규소층을 형성하는 것을 특징으로 하는 탄화규소성형체의 제조방법.
- 제3항에 있어서, 성형물의 탄소화는, 불활성분위기하, 1000℃~3000℃로 행하는 것을 특징으로 하는 탄화규소성형체의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP96-126465 | 1996-04-22 | ||
JP12646596 | 1996-04-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970070234A true KR970070234A (ko) | 1997-11-07 |
Family
ID=14935899
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019970014727A KR970070234A (ko) | 1996-04-22 | 1997-04-21 | 탄화규소성형체의 제조방법 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0803485B1 (ko) |
KR (1) | KR970070234A (ko) |
DE (1) | DE69704227T2 (ko) |
TW (1) | TW427951B (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1012692A (ja) * | 1996-06-25 | 1998-01-16 | Nisshinbo Ind Inc | ダミーウエハ |
US9314854B2 (en) | 2013-01-30 | 2016-04-19 | Lam Research Corporation | Ductile mode drilling methods for brittle components of plasma processing apparatuses |
US8893702B2 (en) | 2013-02-20 | 2014-11-25 | Lam Research Corporation | Ductile mode machining methods for hard and brittle components of plasma processing apparatuses |
CN112521154A (zh) * | 2020-12-22 | 2021-03-19 | 中国科学院上海硅酸盐研究所 | 具有高纯工作表面的SiC陶瓷器件及其制备方法和应用 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0521297Y2 (ko) * | 1986-07-31 | 1993-06-01 | ||
DE69325350T2 (de) * | 1992-12-25 | 2000-03-02 | Oji Paper Co | Verfahren zur Herstellung von Siliciumcarbidfasern |
JPH0797286A (ja) * | 1993-09-28 | 1995-04-11 | Nisshinbo Ind Inc | 不浸透性炭素による被覆材及びその製造方法 |
-
1997
- 1997-04-15 DE DE69704227T patent/DE69704227T2/de not_active Expired - Fee Related
- 1997-04-15 EP EP97106160A patent/EP0803485B1/en not_active Expired - Lifetime
- 1997-04-16 TW TW086104943A patent/TW427951B/zh not_active IP Right Cessation
- 1997-04-21 KR KR1019970014727A patent/KR970070234A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE69704227D1 (de) | 2001-04-19 |
EP0803485B1 (en) | 2001-03-14 |
DE69704227T2 (de) | 2001-08-30 |
EP0803485A3 (en) | 1998-04-29 |
EP0803485A2 (en) | 1997-10-29 |
TW427951B (en) | 2001-04-01 |
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