KR950034491A - 서셉터(suscepter) 및 그 제조방법 - Google Patents

서셉터(suscepter) 및 그 제조방법 Download PDF

Info

Publication number
KR950034491A
KR950034491A KR1019950000139A KR19950000139A KR950034491A KR 950034491 A KR950034491 A KR 950034491A KR 1019950000139 A KR1019950000139 A KR 1019950000139A KR 19950000139 A KR19950000139 A KR 19950000139A KR 950034491 A KR950034491 A KR 950034491A
Authority
KR
South Korea
Prior art keywords
susceptor
glassy carbon
polycarbodiimide resin
carbonizing
vacuum
Prior art date
Application number
KR1019950000139A
Other languages
English (en)
Other versions
KR100358527B1 (ko
Inventor
가즈오 사이토
다케시 이시마쯔
Original Assignee
모치쓰키 아키히로
닛신 보세키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 모치쓰키 아키히로, 닛신 보세키 가부시키가이샤 filed Critical 모치쓰키 아키히로
Publication of KR950034491A publication Critical patent/KR950034491A/ko
Application granted granted Critical
Publication of KR100358527B1 publication Critical patent/KR100358527B1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/524—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained from polymer precursors, e.g. glass-like carbon material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Ceramic Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

폴리카보디이미드 수지로부터 유도된 유리질 탄소로 거의 구성되는 서셉터; 폴리카보디이미드 수지 또는 주로 폴리카보디이미드 수지로 구성된 조성물을 서셉터 형태로 성형하고 또한 그 성형된 물질을 진공 또는 불활성 기체 대기에서 탄화하는 과정을 포함하여 구성되는 서셉터의 제조방법.
상기 서셉터는 선행 기술의 문제점이 없는, 즉 표면 상에 구멍이 없고 불순물을 생성하지 않으며 고온에서 사용될때 금이 가지 않는 것이다.

Description

서셉터(suscepter) 및 그 제조방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (5)

  1. 폴리카보디이미드 수지로부터 유도된 유리질 탄소로 거의 구성되는 서셉터.
  2. 제1항에 있어서, 유리질 탄소는 폴리카보디이미드 수지를 진공 또는 불활성 가스 대기 중에서 탄화하여 형성되는 서셉터.
  3. 제1항에 있어서, 유리질 탄소는 벌크 밀도가 1.5-1.8 g/㎤, 굽힘 강도가 1,800-4,000kg/㎤, 쇼어 강도가 121-140, 다공성이 0-0.09%이며 애쉬 함량이 0-4ppm인 서셉터.
  4. 폴리카보디이미드 수지 또는 주로 폴리카보디이미드 수지로 구성된 조성물을 서셉터 형태로 성형하고 또한 그 성형된 물질을 진공 또는 불활성 기체 대기에서 탄화하는 과정을 포함하여 구성되는 서셉터의 제조방법.
  5. 제4항에 있어서, 성형된 물질의 탄화는 1,000-3,000℃의 온도 범위에서 수행되는 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950000139A 1994-02-03 1995-01-06 서셉터및그제조방법 KR100358527B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP94-33127 1994-02-03
JP3312794 1994-02-03

Publications (2)

Publication Number Publication Date
KR950034491A true KR950034491A (ko) 1995-12-28
KR100358527B1 KR100358527B1 (ko) 2003-01-15

Family

ID=12377954

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950000139A KR100358527B1 (ko) 1994-02-03 1995-01-06 서셉터및그제조방법

Country Status (5)

Country Link
US (1) US5665636A (ko)
EP (1) EP0666245B1 (ko)
KR (1) KR100358527B1 (ko)
CA (1) CA2141269A1 (ko)
DE (1) DE69506292T2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101355327B1 (ko) * 2010-04-21 2014-01-23 이비덴 가부시키가이샤 탄소 부품 및 그의 제조 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104411630B (zh) * 2012-06-15 2016-05-11 蓝立方知识产权有限责任公司 玻璃碳组合物

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816338A (en) * 1986-06-10 1989-03-28 Denki Kagaku Kogyo Kabushiki Kaisha Glassy carbon-coated article
JP2725705B2 (ja) * 1988-12-02 1998-03-11 日清紡績株式会社 燃料電池用セルセパレーター
JP2939759B2 (ja) * 1990-02-21 1999-08-25 明 高久 炭素薄板及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101355327B1 (ko) * 2010-04-21 2014-01-23 이비덴 가부시키가이샤 탄소 부품 및 그의 제조 방법
US9156743B2 (en) 2010-04-21 2015-10-13 Ibiden Co., Ltd. Carbon component and method for manufacturing the same

Also Published As

Publication number Publication date
CA2141269A1 (en) 1995-08-04
DE69506292T2 (de) 1999-04-29
US5665636A (en) 1997-09-09
EP0666245B1 (en) 1998-12-02
EP0666245A3 (en) 1995-11-08
EP0666245A2 (en) 1995-08-09
DE69506292D1 (de) 1999-01-14
KR100358527B1 (ko) 2003-01-15

Similar Documents

Publication Publication Date Title
KR960010573A (ko) 위스커 보강된 알루미나 복합체의 무압 소결 방법
JP2005132711A (ja) 高純度炭素系材料及びセラミックス膜被覆高純度炭素系材料
US7708827B2 (en) Highly pure, replaceable wear insert and process for manufacturing the same
KR960007505A (ko) 예비세라믹 중합체 결합제를 사용하는 고밀도 탄화티탄 세라믹의 제조방법
KR950034491A (ko) 서셉터(suscepter) 및 그 제조방법
KR890011808A (ko) 고밀도 SiC 소결체의 제조방법
JPS5641817A (en) Manufacture of molded carbon material
JPH1017382A (ja) 炭化珪素成形体の製造方法
DE3367763D1 (en) Method of manufacturing a dense polycrystalline silicon carbide article
KR950035336A (ko) 반도체 제조용 기기 및 그 제조방법
KR900701686A (ko) 예비조밀화 처리에 의한 질화알루미늄의 열전도율 증가방법
KR970070234A (ko) 탄화규소성형체의 제조방법
JPS575923A (en) Preparation of carbon fiber
JPS6332841B2 (ko)
JPS57111300A (en) Preparation of ceramic whisker
JPS62138361A (ja) 炭素材料よりなる高密度成形体の製造方法
KR950034094A (ko) 자기 기록 매체용 기판 및 그 제조 방법
KR970063316A (ko) 써멧 펠렛을 이용한 음극 및 그 제조방법
KR900701691A (ko) 질화붕소 복합재 및 그 제조방법
KR970042955A (ko) 타르슬러지의 고형화방법 및 고형화된 타르슬렂를 이용한 코크스 제조방법
KR950017847A (ko) 탄화규소 휘스커 제조방법
JPH08119741A (ja) 炭素−炭化ホウ素焼結体及び炭素−炭化ホウ素−炭化ケイ素焼結体
SU502851A1 (ru) Способ изготовлени пеноматериалов
JPS6199773A (ja) シ−ル
CA2011037A1 (en) Composite material of boron nitride and method for the preparation thereof

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20081010

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee