KR970063654A - 반도체 웨이퍼 운반용 캐리어 - Google Patents

반도체 웨이퍼 운반용 캐리어 Download PDF

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Publication number
KR970063654A
KR970063654A KR1019960004823A KR19960004823A KR970063654A KR 970063654 A KR970063654 A KR 970063654A KR 1019960004823 A KR1019960004823 A KR 1019960004823A KR 19960004823 A KR19960004823 A KR 19960004823A KR 970063654 A KR970063654 A KR 970063654A
Authority
KR
South Korea
Prior art keywords
wafers
slots
side wall
unloading
vertical
Prior art date
Application number
KR1019960004823A
Other languages
English (en)
Other versions
KR100187437B1 (ko
Inventor
김청협
김일호
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960004823A priority Critical patent/KR100187437B1/ko
Publication of KR970063654A publication Critical patent/KR970063654A/ko
Application granted granted Critical
Publication of KR100187437B1 publication Critical patent/KR100187437B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

웨이퍼의 대구경화에 따른 웨이퍼 처짐을 방지할 수 있도록 웨이퍼를 측면으로 세워서 로딩 및 언로딩시킬 수 있는 반도체 웨이퍼 운반용 캐리어에 관한 것이다.
그 구성은 다수매의 웨이퍼가 소정의 간격으로 유지되어 적재될 수 있도록 삽입되는 슬롯이 형성된 통상의 캐리어에 있어서, 상기 슬롯에 삽입된 웨이퍼를 수직방향으로 세워진 상태로 놓고, 측방에서 웨이퍼를 로딩 및 언로딩할 수 있도록 일측벽에 수직 및 수평지지바가 형성되고, 반대쪽 측벽에 캐리어를 들어 운반할 수 있도록 파지돌기가 형성된 것이다.
따라서 웨이퍼가 수직방향으로 세워진 상태에서 측방으로의 로딩 및 언로딩이 가능하게 된 것이므로 대구경 웨이퍼의 경우 처짐이 방지되어 표면응력이 감소되는 것이고, 웨이퍼의 로딩 및 언로딩시 슬롯에 간섭될 염려가 없으며, 파티클로부터의 오염이 감소되는 효과가 있다.

Description

반도체 웨이퍼 운반용 캐리어
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명에 따른 캐리어에 웨이퍼가 장착된 상태의 정면도이다.

Claims (2)

  1. 다수매의 웨이퍼가 소정의 간격으로 유지되어 적재될 수 있도록 삽입되는 슬롯이 형성된 통상의 캐리어에 있어서, 상기 슬롯에 삽입된 웨이퍼를 수직방향으로 세워진 상태로 놓고 측방에서 웨이퍼를 로딩 및 언로딩할 수 있도록 일측벽에 제1수직 및 수평지지바가 형성되고, 반대쪽 측벽에 캐리어를 들어 운반할 수 있도록 제1과지돌기가 형성됨을 특징으로 하는 반도체 웨이퍼 운반용 캐리어.
  2. 제1항에 있어서, 상기 슬롯에 삽입된 웨이퍼를 수평상태로 놓고 측방에서 웨이퍼를 로딩 및 언로딩할 수 있도록 전면벽에 제2수직 및 수평지지바가 형성되고, 후면벽에 캐리어를 들어 운반할 수 있도록 제2파지돌기가 형성됨을 특징으로 하는 반도체 웨이퍼 운반용 캐리어.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960004823A 1996-02-27 1996-02-27 반도체 웨이퍼 운반용 캐리어 KR100187437B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960004823A KR100187437B1 (ko) 1996-02-27 1996-02-27 반도체 웨이퍼 운반용 캐리어

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960004823A KR100187437B1 (ko) 1996-02-27 1996-02-27 반도체 웨이퍼 운반용 캐리어

Publications (2)

Publication Number Publication Date
KR970063654A true KR970063654A (ko) 1997-09-12
KR100187437B1 KR100187437B1 (ko) 1999-04-15

Family

ID=19451887

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960004823A KR100187437B1 (ko) 1996-02-27 1996-02-27 반도체 웨이퍼 운반용 캐리어

Country Status (1)

Country Link
KR (1) KR100187437B1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101393631B1 (ko) 2007-08-21 2014-05-09 삼성디스플레이 주식회사 유리기판 이송장치

Also Published As

Publication number Publication date
KR100187437B1 (ko) 1999-04-15

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