KR970059847U - 반도체 웨이퍼 처리액 공급장치 - Google Patents
반도체 웨이퍼 처리액 공급장치Info
- Publication number
- KR970059847U KR970059847U KR2019960007717U KR19960007717U KR970059847U KR 970059847 U KR970059847 U KR 970059847U KR 2019960007717 U KR2019960007717 U KR 2019960007717U KR 19960007717 U KR19960007717 U KR 19960007717U KR 970059847 U KR970059847 U KR 970059847U
- Authority
- KR
- South Korea
- Prior art keywords
- supply device
- semiconductor wafer
- liquid supply
- processing liquid
- wafer processing
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960007717U KR200224866Y1 (ko) | 1996-04-10 | 1996-04-10 | 반도체 웨이퍼 처리액 공급장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019960007717U KR200224866Y1 (ko) | 1996-04-10 | 1996-04-10 | 반도체 웨이퍼 처리액 공급장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR970059847U true KR970059847U (ko) | 1997-11-10 |
KR200224866Y1 KR200224866Y1 (ko) | 2001-11-30 |
Family
ID=60843900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019960007717U KR200224866Y1 (ko) | 1996-04-10 | 1996-04-10 | 반도체 웨이퍼 처리액 공급장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200224866Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100477055B1 (ko) * | 2001-04-02 | 2005-03-17 | 미쓰비시덴키 가부시키가이샤 | 화학적 처리장치와 도금처리장치 및 화학적 처리방법 |
-
1996
- 1996-04-10 KR KR2019960007717U patent/KR200224866Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100477055B1 (ko) * | 2001-04-02 | 2005-03-17 | 미쓰비시덴키 가부시키가이샤 | 화학적 처리장치와 도금처리장치 및 화학적 처리방법 |
Also Published As
Publication number | Publication date |
---|---|
KR200224866Y1 (ko) | 2001-11-30 |
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Legal Events
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Payment date: 20060220 Year of fee payment: 6 |
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