KR970059847U - 반도체 웨이퍼 처리액 공급장치 - Google Patents

반도체 웨이퍼 처리액 공급장치

Info

Publication number
KR970059847U
KR970059847U KR2019960007717U KR19960007717U KR970059847U KR 970059847 U KR970059847 U KR 970059847U KR 2019960007717 U KR2019960007717 U KR 2019960007717U KR 19960007717 U KR19960007717 U KR 19960007717U KR 970059847 U KR970059847 U KR 970059847U
Authority
KR
South Korea
Prior art keywords
supply device
semiconductor wafer
liquid supply
processing liquid
wafer processing
Prior art date
Application number
KR2019960007717U
Other languages
English (en)
Other versions
KR200224866Y1 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960007717U priority Critical patent/KR200224866Y1/ko
Publication of KR970059847U publication Critical patent/KR970059847U/ko
Application granted granted Critical
Publication of KR200224866Y1 publication Critical patent/KR200224866Y1/ko

Links

KR2019960007717U 1996-04-10 1996-04-10 반도체 웨이퍼 처리액 공급장치 KR200224866Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960007717U KR200224866Y1 (ko) 1996-04-10 1996-04-10 반도체 웨이퍼 처리액 공급장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960007717U KR200224866Y1 (ko) 1996-04-10 1996-04-10 반도체 웨이퍼 처리액 공급장치

Publications (2)

Publication Number Publication Date
KR970059847U true KR970059847U (ko) 1997-11-10
KR200224866Y1 KR200224866Y1 (ko) 2001-11-30

Family

ID=60843900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960007717U KR200224866Y1 (ko) 1996-04-10 1996-04-10 반도체 웨이퍼 처리액 공급장치

Country Status (1)

Country Link
KR (1) KR200224866Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477055B1 (ko) * 2001-04-02 2005-03-17 미쓰비시덴키 가부시키가이샤 화학적 처리장치와 도금처리장치 및 화학적 처리방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477055B1 (ko) * 2001-04-02 2005-03-17 미쓰비시덴키 가부시키가이샤 화학적 처리장치와 도금처리장치 및 화학적 처리방법

Also Published As

Publication number Publication date
KR200224866Y1 (ko) 2001-11-30

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