KR970053391A - Device Separation Method of Semiconductor Device - Google Patents
Device Separation Method of Semiconductor Device Download PDFInfo
- Publication number
- KR970053391A KR970053391A KR1019950050461A KR19950050461A KR970053391A KR 970053391 A KR970053391 A KR 970053391A KR 1019950050461 A KR1019950050461 A KR 1019950050461A KR 19950050461 A KR19950050461 A KR 19950050461A KR 970053391 A KR970053391 A KR 970053391A
- Authority
- KR
- South Korea
- Prior art keywords
- nitride film
- pattern
- semiconductor substrate
- forming
- oxide film
- Prior art date
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- Element Separation (AREA)
Abstract
본 발명은 반도체소자의 소자분리막 제조방법에 관한 것으로, 본 발명의 반도체소자의 소자분리막 제조방법은 반도체기판의 상부에 필드산화막과, 질화막을 차례로 형성하고, 상기 질화막 경사지게 식각하여 질화막패턴을 형성하고, 상기 질화막패턴을 마스크로 반도체기판의 일정깊이를 식각한 후, 필드산화막을 형성하므로써, 고집적 반도체소자에 적합하며, 소자의 신뢰성을 향상한다.The present invention relates to a method of manufacturing a device isolation film of a semiconductor device, the method of manufacturing a device isolation film of a semiconductor device of the present invention to form a field oxide film and a nitride film on top of the semiconductor substrate, the nitride film is etched obliquely to form a nitride film pattern After etching a predetermined depth of the semiconductor substrate using the nitride film pattern as a mask, a field oxide film is formed, which is suitable for a highly integrated semiconductor device and improves the reliability of the device.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2A도 내지 제2D도는 본 발명의 실시예에 따른 반도체소자의 소자분리막 제조 공정도.2A through 2D are diagrams illustrating a process of fabricating an isolation layer of a semiconductor device in accordance with an embodiment of the present invention.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050461A KR970053391A (en) | 1995-12-15 | 1995-12-15 | Device Separation Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950050461A KR970053391A (en) | 1995-12-15 | 1995-12-15 | Device Separation Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970053391A true KR970053391A (en) | 1997-07-31 |
Family
ID=66594992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950050461A KR970053391A (en) | 1995-12-15 | 1995-12-15 | Device Separation Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970053391A (en) |
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1995
- 1995-12-15 KR KR1019950050461A patent/KR970053391A/en not_active Application Discontinuation
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