KR950015710A - Device Separation Method of Semiconductor Device - Google Patents
Device Separation Method of Semiconductor Device Download PDFInfo
- Publication number
- KR950015710A KR950015710A KR1019930023070A KR930023070A KR950015710A KR 950015710 A KR950015710 A KR 950015710A KR 1019930023070 A KR1019930023070 A KR 1019930023070A KR 930023070 A KR930023070 A KR 930023070A KR 950015710 A KR950015710 A KR 950015710A
- Authority
- KR
- South Korea
- Prior art keywords
- device isolation
- film
- forming
- isolation film
- semiconductor device
- Prior art date
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- Element Separation (AREA)
Abstract
본 발명은 반도체소자의 소자분리막 제조방법에 관한 것으로, 특히 공지의 LOCOS기술에 의하여 제1 소자분리막을 형성한 후, 소자 분리영역에 형성된 제1 소자분리막만을 플라즈마 식각하고, 소자분리막의 형성시 발생된 버즈빅은 존속시킨 다음, 소자분리영역에 기 형성된 버즈빅을 이용하여 제2소자분리막을 형성함으로써, 상부의 단차를 완화시키고 버즈빅의 크기를 억제하여 후속공정을 용이하게 하는 기술이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a device isolation film of a semiconductor device. In particular, after the first device isolation film is formed by a known LOCOS technique, only the first device isolation film formed in the device isolation region is plasma-etched, and is generated when the device isolation film is formed. The existing Buzzvik is a technology for forming a second device isolation layer by using the Buzzvik pre-formed in the device isolation region, thereby alleviating the step difference in the upper part and reducing the size of the Buzzvik to facilitate the subsequent process.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1도 내지 제4도는 본 발명의 실시예에 의해 반도체소자의 소자분리막 제조공정을 도시한 단면도.1 to 4 are cross-sectional views showing a device isolation film manufacturing process of a semiconductor device according to an embodiment of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023070A KR950015710A (en) | 1993-11-02 | 1993-11-02 | Device Separation Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930023070A KR950015710A (en) | 1993-11-02 | 1993-11-02 | Device Separation Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950015710A true KR950015710A (en) | 1995-06-17 |
Family
ID=66824879
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930023070A KR950015710A (en) | 1993-11-02 | 1993-11-02 | Device Separation Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950015710A (en) |
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1993
- 1993-11-02 KR KR1019930023070A patent/KR950015710A/en not_active Application Discontinuation
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