KR970052662A - Impurity Removal Method of Semiconductor Device - Google Patents
Impurity Removal Method of Semiconductor Device Download PDFInfo
- Publication number
- KR970052662A KR970052662A KR1019950055135A KR19950055135A KR970052662A KR 970052662 A KR970052662 A KR 970052662A KR 1019950055135 A KR1019950055135 A KR 1019950055135A KR 19950055135 A KR19950055135 A KR 19950055135A KR 970052662 A KR970052662 A KR 970052662A
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning
- semiconductor device
- surfactant
- sodium hydroxide
- silicon substrate
- Prior art date
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- Cleaning Or Drying Semiconductors (AREA)
Abstract
본 발명은 반도체 소자의 불순물 제거방법을 제공하는 것으로, 금속의 식각성을 가지는 수산화나틀륨 및 미세패턴의 침투를 용이하게 하는 계면활성제를 포함하는 세정액으로 실시하여 금속성 불순물을 완전히 제거함으로서 금속배선간의 양호한 접속으로 소자의 수율을 향상시킬 수 있는 효과가 있다.The present invention provides a method for removing impurities in a semiconductor device. The present invention provides a method for removing impurities from a metal by completely removing metallic impurities by performing a cleaning solution containing sodium hydroxide having an etching property of a metal and a surfactant that facilitates penetration of a fine pattern. There is an effect that the yield of the device can be improved by good connection.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2도는 본 발명에 따른 반도체 소자의 불순물 제거방법을 설명하기 위한 구성도.2 is a block diagram illustrating a method for removing impurities in a semiconductor device according to the present invention.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950055135A KR970052662A (en) | 1995-12-23 | 1995-12-23 | Impurity Removal Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950055135A KR970052662A (en) | 1995-12-23 | 1995-12-23 | Impurity Removal Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970052662A true KR970052662A (en) | 1997-07-29 |
Family
ID=66617588
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950055135A KR970052662A (en) | 1995-12-23 | 1995-12-23 | Impurity Removal Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970052662A (en) |
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1995
- 1995-12-23 KR KR1019950055135A patent/KR970052662A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |