KR970025793U - Gas supply device for semiconductor manufacturing equipment - Google Patents

Gas supply device for semiconductor manufacturing equipment

Info

Publication number
KR970025793U
KR970025793U KR2019950034806U KR19950034806U KR970025793U KR 970025793 U KR970025793 U KR 970025793U KR 2019950034806 U KR2019950034806 U KR 2019950034806U KR 19950034806 U KR19950034806 U KR 19950034806U KR 970025793 U KR970025793 U KR 970025793U
Authority
KR
South Korea
Prior art keywords
supply device
gas supply
semiconductor manufacturing
manufacturing equipment
equipment
Prior art date
Application number
KR2019950034806U
Other languages
Korean (ko)
Other versions
KR200201330Y1 (en
Inventor
김만봉
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019950034806U priority Critical patent/KR200201330Y1/en
Publication of KR970025793U publication Critical patent/KR970025793U/en
Application granted granted Critical
Publication of KR200201330Y1 publication Critical patent/KR200201330Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Toxicology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Pipeline Systems (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
KR2019950034806U 1995-11-22 1995-11-22 Gas supply system of semiconductor manufacturing apparatus KR200201330Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950034806U KR200201330Y1 (en) 1995-11-22 1995-11-22 Gas supply system of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950034806U KR200201330Y1 (en) 1995-11-22 1995-11-22 Gas supply system of semiconductor manufacturing apparatus

Publications (2)

Publication Number Publication Date
KR970025793U true KR970025793U (en) 1997-06-20
KR200201330Y1 KR200201330Y1 (en) 2000-11-01

Family

ID=19429793

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950034806U KR200201330Y1 (en) 1995-11-22 1995-11-22 Gas supply system of semiconductor manufacturing apparatus

Country Status (1)

Country Link
KR (1) KR200201330Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990042212A (en) * 1997-11-26 1999-06-15 윤종용 Gas supply with filter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100477534B1 (en) * 2002-05-03 2005-03-18 동부아남반도체 주식회사 Apparatus for gas supplying in semiconductor equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990042212A (en) * 1997-11-26 1999-06-15 윤종용 Gas supply with filter

Also Published As

Publication number Publication date
KR200201330Y1 (en) 2000-11-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090727

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee