KR940023538U - Constant pressure holding device for semiconductor manufacturing equipment - Google Patents

Constant pressure holding device for semiconductor manufacturing equipment

Info

Publication number
KR940023538U
KR940023538U KR2019930003649U KR930003649U KR940023538U KR 940023538 U KR940023538 U KR 940023538U KR 2019930003649 U KR2019930003649 U KR 2019930003649U KR 930003649 U KR930003649 U KR 930003649U KR 940023538 U KR940023538 U KR 940023538U
Authority
KR
South Korea
Prior art keywords
holding device
semiconductor manufacturing
constant pressure
manufacturing equipment
pressure holding
Prior art date
Application number
KR2019930003649U
Other languages
Korean (ko)
Other versions
KR960002543Y1 (en
Inventor
장성학
궁원경
Original Assignee
엘지반도체 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체 주식회사 filed Critical 엘지반도체 주식회사
Priority to KR2019930003649U priority Critical patent/KR960002543Y1/en
Publication of KR940023538U publication Critical patent/KR940023538U/en
Application granted granted Critical
Publication of KR960002543Y1 publication Critical patent/KR960002543Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
KR2019930003649U 1993-03-12 1993-03-12 Constant pressure keeping apparatus of semiconductor manufacturing apparatus KR960002543Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003649U KR960002543Y1 (en) 1993-03-12 1993-03-12 Constant pressure keeping apparatus of semiconductor manufacturing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003649U KR960002543Y1 (en) 1993-03-12 1993-03-12 Constant pressure keeping apparatus of semiconductor manufacturing apparatus

Publications (2)

Publication Number Publication Date
KR940023538U true KR940023538U (en) 1994-10-22
KR960002543Y1 KR960002543Y1 (en) 1996-03-27

Family

ID=19351974

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003649U KR960002543Y1 (en) 1993-03-12 1993-03-12 Constant pressure keeping apparatus of semiconductor manufacturing apparatus

Country Status (1)

Country Link
KR (1) KR960002543Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102082228B1 (en) * 2019-03-19 2020-02-26 김한일 Local dryroom air-conditioning system and conrol method therefor

Also Published As

Publication number Publication date
KR960002543Y1 (en) 1996-03-27

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Legal Events

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20070221

Year of fee payment: 12

EXPY Expiration of term