KR970025779U - Semiconductor manufacturing device with constant gas supply system - Google Patents

Semiconductor manufacturing device with constant gas supply system

Info

Publication number
KR970025779U
KR970025779U KR2019950035163U KR19950035163U KR970025779U KR 970025779 U KR970025779 U KR 970025779U KR 2019950035163 U KR2019950035163 U KR 2019950035163U KR 19950035163 U KR19950035163 U KR 19950035163U KR 970025779 U KR970025779 U KR 970025779U
Authority
KR
South Korea
Prior art keywords
gas supply
supply system
semiconductor manufacturing
manufacturing device
constant gas
Prior art date
Application number
KR2019950035163U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950035163U priority Critical patent/KR970025779U/en
Publication of KR970025779U publication Critical patent/KR970025779U/en

Links

KR2019950035163U 1995-11-23 1995-11-23 Semiconductor manufacturing device with constant gas supply system KR970025779U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950035163U KR970025779U (en) 1995-11-23 1995-11-23 Semiconductor manufacturing device with constant gas supply system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950035163U KR970025779U (en) 1995-11-23 1995-11-23 Semiconductor manufacturing device with constant gas supply system

Publications (1)

Publication Number Publication Date
KR970025779U true KR970025779U (en) 1997-06-20

Family

ID=60906841

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950035163U KR970025779U (en) 1995-11-23 1995-11-23 Semiconductor manufacturing device with constant gas supply system

Country Status (1)

Country Link
KR (1) KR970025779U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010073407A (en) * 2000-01-14 2001-08-01 김재욱 bulk specialty gas supply system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010073407A (en) * 2000-01-14 2001-08-01 김재욱 bulk specialty gas supply system

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application