KR970025779U - Semiconductor manufacturing device with constant gas supply system - Google Patents
Semiconductor manufacturing device with constant gas supply systemInfo
- Publication number
- KR970025779U KR970025779U KR2019950035163U KR19950035163U KR970025779U KR 970025779 U KR970025779 U KR 970025779U KR 2019950035163 U KR2019950035163 U KR 2019950035163U KR 19950035163 U KR19950035163 U KR 19950035163U KR 970025779 U KR970025779 U KR 970025779U
- Authority
- KR
- South Korea
- Prior art keywords
- gas supply
- supply system
- semiconductor manufacturing
- manufacturing device
- constant gas
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950035163U KR970025779U (en) | 1995-11-23 | 1995-11-23 | Semiconductor manufacturing device with constant gas supply system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019950035163U KR970025779U (en) | 1995-11-23 | 1995-11-23 | Semiconductor manufacturing device with constant gas supply system |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970025779U true KR970025779U (en) | 1997-06-20 |
Family
ID=60906841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019950035163U KR970025779U (en) | 1995-11-23 | 1995-11-23 | Semiconductor manufacturing device with constant gas supply system |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970025779U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010073407A (en) * | 2000-01-14 | 2001-08-01 | 김재욱 | bulk specialty gas supply system |
-
1995
- 1995-11-23 KR KR2019950035163U patent/KR970025779U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010073407A (en) * | 2000-01-14 | 2001-08-01 | 김재욱 | bulk specialty gas supply system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |