KR960029722U - Gas supply device for semiconductor manufacturing equipment - Google Patents

Gas supply device for semiconductor manufacturing equipment

Info

Publication number
KR960029722U
KR960029722U KR2019950001848U KR19950001848U KR960029722U KR 960029722 U KR960029722 U KR 960029722U KR 2019950001848 U KR2019950001848 U KR 2019950001848U KR 19950001848 U KR19950001848 U KR 19950001848U KR 960029722 U KR960029722 U KR 960029722U
Authority
KR
South Korea
Prior art keywords
supply device
gas supply
semiconductor manufacturing
manufacturing equipment
equipment
Prior art date
Application number
KR2019950001848U
Other languages
Korean (ko)
Other versions
KR0121146Y1 (en
Inventor
이중재
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950001848U priority Critical patent/KR0121146Y1/en
Publication of KR960029722U publication Critical patent/KR960029722U/en
Application granted granted Critical
Publication of KR0121146Y1 publication Critical patent/KR0121146Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pipeline Systems (AREA)
KR2019950001848U 1995-02-08 1995-02-08 Gas supply system of semiconductor manufacture device KR0121146Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950001848U KR0121146Y1 (en) 1995-02-08 1995-02-08 Gas supply system of semiconductor manufacture device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950001848U KR0121146Y1 (en) 1995-02-08 1995-02-08 Gas supply system of semiconductor manufacture device

Publications (2)

Publication Number Publication Date
KR960029722U true KR960029722U (en) 1996-09-17
KR0121146Y1 KR0121146Y1 (en) 1998-08-01

Family

ID=19407590

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950001848U KR0121146Y1 (en) 1995-02-08 1995-02-08 Gas supply system of semiconductor manufacture device

Country Status (1)

Country Link
KR (1) KR0121146Y1 (en)

Also Published As

Publication number Publication date
KR0121146Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090323

Year of fee payment: 12

EXPY Expiration of term