KR960027031U - Process solution supply device for semiconductor manufacturing equipment - Google Patents

Process solution supply device for semiconductor manufacturing equipment

Info

Publication number
KR960027031U
KR960027031U KR2019950000041U KR19950000041U KR960027031U KR 960027031 U KR960027031 U KR 960027031U KR 2019950000041 U KR2019950000041 U KR 2019950000041U KR 19950000041 U KR19950000041 U KR 19950000041U KR 960027031 U KR960027031 U KR 960027031U
Authority
KR
South Korea
Prior art keywords
supply device
semiconductor manufacturing
manufacturing equipment
solution supply
process solution
Prior art date
Application number
KR2019950000041U
Other languages
Korean (ko)
Other versions
KR0120502Y1 (en
Inventor
최근만
김두호
서병주
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019950000041U priority Critical patent/KR0120502Y1/en
Publication of KR960027031U publication Critical patent/KR960027031U/en
Application granted granted Critical
Publication of KR0120502Y1 publication Critical patent/KR0120502Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
KR2019950000041U 1995-01-05 1995-01-05 Chemical supplying apparatus for semiconductor manufacturing equipment KR0120502Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950000041U KR0120502Y1 (en) 1995-01-05 1995-01-05 Chemical supplying apparatus for semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950000041U KR0120502Y1 (en) 1995-01-05 1995-01-05 Chemical supplying apparatus for semiconductor manufacturing equipment

Publications (2)

Publication Number Publication Date
KR960027031U true KR960027031U (en) 1996-08-17
KR0120502Y1 KR0120502Y1 (en) 1998-08-01

Family

ID=19406363

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950000041U KR0120502Y1 (en) 1995-01-05 1995-01-05 Chemical supplying apparatus for semiconductor manufacturing equipment

Country Status (1)

Country Link
KR (1) KR0120502Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104926468A (en) * 2015-06-10 2015-09-23 苏州御亭现代农业产业园发展有限公司 Bio-enzyme organic compound fertilizer for pomegranate

Also Published As

Publication number Publication date
KR0120502Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
O032 Opposition [utility model]: request for opposition
O131 Decision on opposition [utility model]
O062 Revocation of registration by opposition: final registration of opposition [utility model]
LAPS Lapse due to unpaid annual fee