KR970018572A - Capacitor Manufacturing Method of Semiconductor Memory Device - Google Patents
Capacitor Manufacturing Method of Semiconductor Memory Device Download PDFInfo
- Publication number
- KR970018572A KR970018572A KR1019950031085A KR19950031085A KR970018572A KR 970018572 A KR970018572 A KR 970018572A KR 1019950031085 A KR1019950031085 A KR 1019950031085A KR 19950031085 A KR19950031085 A KR 19950031085A KR 970018572 A KR970018572 A KR 970018572A
- Authority
- KR
- South Korea
- Prior art keywords
- insulating layer
- storage electrode
- layer
- memory device
- semiconductor memory
- Prior art date
Links
Abstract
반도체 메모리장치의 커패시터 제조방법에 개시되어 있다. 반도체기판상에 제1절연층, 식각저지층, 및 제2절연층을 차례로 형성하고, 상기 제2절연층 상에 스토리지 전극 패턴을 형성한 다음, 상기 제2절연층의 일부를 등방성 식각한다. 이어서, 상기 결과물 상에 제2도전층을 형성하고, 상기 결과물을 이방성식각한 다음, 상기 제2절연층을 제거하여 상기 스토리지 전극 패턴 및 제2도전층을 구비하는 스토리지 전극을 형성한다. 따라서 커패시터의 유효면적을 증가시킬 수 있다.Disclosed is a method of manufacturing a capacitor of a semiconductor memory device. A first insulating layer, an etch stop layer, and a second insulating layer are sequentially formed on the semiconductor substrate, a storage electrode pattern is formed on the second insulating layer, and a portion of the second insulating layer is isotropically etched. Subsequently, a second conductive layer is formed on the resultant, the resultant is anisotropically etched, and the second insulating layer is removed to form a storage electrode having the storage electrode pattern and the second conductive layer. Therefore, the effective area of the capacitor can be increased.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제5도는 본 발명의 일 실시예에 따른 커패시터 제조방법을 순서대로 도시한 단면도이다.5 is a cross-sectional view sequentially showing a capacitor manufacturing method according to an embodiment of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950031085A KR970018572A (en) | 1995-09-21 | 1995-09-21 | Capacitor Manufacturing Method of Semiconductor Memory Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950031085A KR970018572A (en) | 1995-09-21 | 1995-09-21 | Capacitor Manufacturing Method of Semiconductor Memory Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970018572A true KR970018572A (en) | 1997-04-30 |
Family
ID=66616123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950031085A KR970018572A (en) | 1995-09-21 | 1995-09-21 | Capacitor Manufacturing Method of Semiconductor Memory Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970018572A (en) |
-
1995
- 1995-09-21 KR KR1019950031085A patent/KR970018572A/en not_active Application Discontinuation
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Legal Events
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WITN | Withdrawal due to no request for examination |