KR970017716A - 자성 박막 및 그를 사용한 박막 자기 소자 - Google Patents

자성 박막 및 그를 사용한 박막 자기 소자 Download PDF

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Publication number
KR970017716A
KR970017716A KR1019960042387A KR19960042387A KR970017716A KR 970017716 A KR970017716 A KR 970017716A KR 1019960042387 A KR1019960042387 A KR 1019960042387A KR 19960042387 A KR19960042387 A KR 19960042387A KR 970017716 A KR970017716 A KR 970017716A
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KR
South Korea
Prior art keywords
thin film
magnetic
rare earth
film
film according
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KR1019960042387A
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English (en)
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KR100227449B1 (ko
Inventor
히로시 도미따
데쓰히꼬 미조구찌
Original Assignee
니시무로 다이조
가부시끼가이샤 도시바
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Publication of KR970017716A publication Critical patent/KR970017716A/ko
Application granted granted Critical
Publication of KR100227449B1 publication Critical patent/KR100227449B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H01F10/133—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals
    • H01F10/135—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals containing transition metals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00—Thin magnetic films, e.g. of one-domain structure
    • H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/13—Amorphous metallic alloys, e.g. glassy metals
    • H01F10/133—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals
    • H01F10/135—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals containing transition metals
    • H01F10/137—Amorphous metallic alloys, e.g. glassy metals containing rare earth metals containing transition metals containing cobalt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/04—Fixed inductances of the signal type  with magnetic core
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/11—Magnetic recording head
    • Y10T428/115—Magnetic layer composition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12931—Co-, Fe-, or Ni-base components, alternative to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12951—Fe-base component
    • Y10T428/12972—Containing 0.01-1.7% carbon [i.e., steel]
    • Y10T428/12979—Containing more than 10% nonferrous elements [e.g., high alloy, stainless]

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Coils Or Transformers For Communication (AREA)

Abstract

실질적으로 하기 화학식으로 나타내는 조성을 가지며, 그의 전부 또는 인부가 비정질 영역으로 구성되는 자성 박막.
상기 식에서, X는 주기율표(CAS Version) 4B족 원소로부터 선택된 적어도 1종의 원소이고, RE는 Sm을 포함하는 희토류 원소이며, x, y, z 및 a는 각각 0<x<1, 0<z<1, 0.05<y<0.36 및 0<a≤0.1을 만족하는 수치이다.

Description

자성 박막 및 그를 사용한 박막 자기 소자
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 자성 박막의 모식도를 나타내는 도.

Claims (9)

  1. 실질적으로 하기 화학식으로 나타내는 조성을 가지며, 그 전부 또는 일부가 비정질 영역으로 구성됨을 특징으로 하는 자성 박막.
    상기 식에서, X는 주기율표(CAS Version) 4B족 원소로부터 선택된 적어도 1종의 원소이고, RE는 Sm을 포함하는 희토류 원소이며, x, y, z 및 a는 각각 0<x<1, 0<z<1, 0.05<y<0.36 및 0<a≤0.1을 만족하는 수치이다.
  2. 제1항에 있어서 막 중에 포함되는 희토류 원소의 총 몰수의 50% 이상인 Sm인 자성 박막.
  3. 제1항에 있어서, 막 중에 포함되는 희토류 원소가 실질적으로 Sm인 자성 박막.
  4. 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 박막이 복상 비정질 영역으로 구성된 자성 박막.
  5. 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 박막의 일부가 결정질 영역을 포함하고 있는 자성 박막.
  6. 제1항 내지 제5항 중 어느 한 항에 있어서, 상기 박막이 막 면내에서 일측 자기 이방성을 가지는 자성 박막.
  7. 제1항 내지 제6항 중 어느 한 항에 있어서, 상기 박막의 포화 자기 변형 정수가 4.0×10-5이하인 자성 박막.
  8. 기판, 상기 기판 작에 형성된 자성층, 상기 자성층상에 형성된 절연층 및 상기 절연층상에 형성된 코일층으로 이루어지고, 상기 자성층을 형성하는 자성막은 실질적으로 아래의 화학식에 의해 표시되는 조성을 가지며, 그의 전부 또는 일부가 비정질 영역으로 구성됨을 특징으로 하는 박막 자기 소자.
    상기 식에서, X는 주기율표(CAS Version) 4B족 원소로부터 선택된 적어도 1종의 원소이고, RE는 Sm을 포함하는 희토류 원소이며, x, y, z 및 a는 각각 0<x<1, 0<z<1, 0.05<y<0.36 및 0<a≤0.1을 만족하는 수치이다.
  9. 제8항에 있어서 상기 자성막 중에 포함되는 희토류 원소의 총 몰수의 50% 이상이 Sm인 박막 자기 소자.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960042387A 1995-09-28 1996-09-25 자성 박막 및 그를 사용한 박막 자기 소자 KR100227449B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP95-251334 1995-09-28
JP7251334A JPH0997715A (ja) 1995-09-28 1995-09-28 磁性薄膜およびそれを用いた薄膜磁気素子

Publications (2)

Publication Number Publication Date
KR970017716A true KR970017716A (ko) 1997-04-30
KR100227449B1 KR100227449B1 (ko) 1999-11-01

Family

ID=17221285

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960042387A KR100227449B1 (ko) 1995-09-28 1996-09-25 자성 박막 및 그를 사용한 박막 자기 소자

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Country Link
US (1) US5780177A (ko)
EP (1) EP0766272B1 (ko)
JP (1) JPH0997715A (ko)
KR (1) KR100227449B1 (ko)
DE (1) DE69618517T2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3182399B2 (ja) * 1997-09-17 2001-07-03 株式会社東芝 軟磁性合金膜とその製造方法、磁気ヘッド、および磁気ディスク
US6946096B2 (en) * 2002-05-03 2005-09-20 Honeywell International, Inc. Use of powder metal sintering/diffusion bonding to enable applying silicon carbide or rhenium alloys to face seal rotors
US7056595B2 (en) * 2003-01-30 2006-06-06 Metglas, Inc. Magnetic implement using magnetic metal ribbon coated with insulator
JP2006269690A (ja) * 2005-03-23 2006-10-05 Fujitsu Ltd 軟磁性薄膜および磁気記録ヘッド
TWI317954B (en) * 2006-12-22 2009-12-01 Ind Tech Res Inst Soft magnetism thin film inductor and magnetic multi-element alloy film
JP5622262B2 (ja) * 2010-03-12 2014-11-12 独立行政法人国立高等専門学校機構 磁性薄膜を用いた伝送線路デバイス
JP2014107413A (ja) * 2012-11-28 2014-06-09 Alps Green Devices Co Ltd 磁気素子

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202614A (ja) * 1983-05-04 1984-11-16 Showa Denko Kk 磁気素子
JPS6079702A (ja) * 1983-10-06 1985-05-07 Kokusai Denshin Denwa Co Ltd <Kdd> 光磁気記録媒体
JPH0834154B2 (ja) * 1986-11-06 1996-03-29 ソニー株式会社 軟磁性薄膜

Also Published As

Publication number Publication date
DE69618517D1 (de) 2002-02-21
US5780177A (en) 1998-07-14
KR100227449B1 (ko) 1999-11-01
DE69618517T2 (de) 2002-08-29
EP0766272A1 (en) 1997-04-02
JPH0997715A (ja) 1997-04-08
EP0766272B1 (en) 2002-01-16

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