KR960701361A - 회로 전기 절연용 절연층 시스템(Insulation layer system for the electrical isolation of circuits) - Google Patents

회로 전기 절연용 절연층 시스템(Insulation layer system for the electrical isolation of circuits) Download PDF

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KR960701361A
KR960701361A KR1019950703369A KR19950703369A KR960701361A KR 960701361 A KR960701361 A KR 960701361A KR 1019950703369 A KR1019950703369 A KR 1019950703369A KR 19950703369 A KR19950703369 A KR 19950703369A KR 960701361 A KR960701361 A KR 960701361A
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layer
insulation
solid electrolyte
insulating
insulation layer
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KR100322981B1 (ko
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프리이제 칼-헤르만
가이어 하인츠
그륀발트 베르너
데 라 프리에타 클라우디오
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랄프 홀거 베렌스 · 페터 뢰저
로베르트 보쉬 게엠베하
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Abstract

적어도 하나의 전기 전도성 고체 전해질 층(10)과 전기 전도층(20) 및 상기 고체 전해질 층(10)과 전기 전도층(20)사이의 적어도 하나의 전기 절연층(13)을 갖는 가스 센서용 절연층 시스템이 제안되었다. 절연층(13)의 재료는 소결이전에 첨가물로서 니오브나 탄탈의 5가 금속 산화물을 함유하며, 첨가물은 소결중에 인접하는 고체 전해질 층(10)으로 확산될 수 있다.

Description

회로 전기 절연용 절연층 시스템(Insulation layer system for the electrical isolation of circuits)
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 제1실시에의 층 시스템을 도시하고 ,
제2도는 두개의 매칭되는 층을 갖는 제2실시예의 층 시스템을 도시하며,
제3도는 기판에 가열 소자를 갖는 제3실시예의 층 시스템을 도시하고 ,
제4도는 가스 센서의 개략단면도이다.

Claims (14)

  1. 전기회로 전기 절연용 절연층 시스템으로서, 전기 전도성 고체 전해질 층(10,ll)과, 전기 전도성층과, 상기 고체 전해질 층(10,ll)과 전도성층(19,20,30)사이의 적어도 하나의 전기 절연성 세라믹 층(13)을 가지며, 상기 절연층(13,14,15.18)중 적어도 하나의 재료는 소결 이전에 첨가물로서 니오브 또는 탄탈의 5가 금속 산화물을 함유하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  2. 제1항에 있어서, 상기 첨가물은 절연층(13,14.15.18)의 체적에 대하여 10체적 퍼센트까지의 양적 비율로 존재하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  3. 제1항에 있어서, 상기 절연층(13,14,15,18)은 산화 알루미늄, 포스테라이트, 포스테라이트/페러클레이스 공정 혼합물, MgO, CaO, SrO, BaO, 2MgO. SiO2La2O3, Gd2O3, 또는 Dy2O3또는 이들 재료의 혼합물을 포함하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  4. 제3항에 있어서, 상기절연층(13,14,15,18)은 그 열팽창계수가 고체전해질층(10,ll)의 열팽창 계수와 적어도 90%인 재료를 포함하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  5. 제3항에 있어서, 상기 절연층(13,14,15,18)의 열팽창 계수는 고체-전해질 층(10,ll)의 열팽창계수 이상인 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  6. 제1항에 있어서, 상기 절연층(13,14,15,18)은 적어도 하나의 절연층과 적어도 하나의 매칭층을 포함하고, 매칭층은 고체 전해질층(10,ll)과 인접하여 배치되며, 첨가물은 고체 전해질층(10,ll)부근의 매칭층에 함유되는 것을 특징으로 하는 회로전기절연용 절연층 시스템.
  7. 제6항에 있어서, 상기 매칭층은 고체 전해질 층(10,ll)과 절연층의 재료성분을 함유하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  8. 제7항에 있어서, 상기 매칭층은 고체 전해질층(10,ll)과 절연층의 재료성분을 균등한 체적비로 함유하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  9. 제7항에 있어서, 재료 조성이 상이한 복수개의 매칭층을 제공되며, 고체 전해질층(10,ll)의 재료 성분의 농도가 고체 전해질층 축으로 증가하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  10. 제9항에 있어서, 상기 첨가물의 농도는 고체 전해질 층(10,ll)측으로 증가하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  11. 제1항 내지 제10항 중 어느 한 항에 있어서, 절연층(13,14,15,18)에 더하여 추가 절연층이 제공되며, 절연층과 추가 절연층 사이에는 가열 소자(19,30)가 배치되는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  12. 제ll항에 있어서, 가스 센서의 감지 영역과 면하는 절연층(13,14,15,18)은 감지 영역과 외면하는 절연층 보다 우수한 열전도성을 갖는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  13. 제1항 내지 제12항 중 어느 한 항에 있어서, 절연층(13,14,15,18) 및 절연층의 재료에 소결 보조물 및 미소구멍 형성체가 추가되는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
  14. 제1항에 있어서, 상기 고체 전해질층(10,ll)은 안정화된 이산화 지르코늄 및 안정화된 이산화 하프늄을 포함하며, 안정화를 위해 삼산화 디이트륨 및 삼산화 디이테르븀이 존재하는 것을 특징으로 하는 회로 전기절연용 절연층 시스템.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950703369A 1993-12-09 1994-11-26 회로전기절연용절연층시스템 KR100322981B1 (ko)

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DE4342033 1993-12-09
DEP4342033.8 1993-12-09
DE4439883A DE4439883A1 (de) 1993-12-09 1994-11-08 Isolationsschichtsystem zur galvanischen Trennung von Stromkreisen
DEP4439883.2 1994-11-08
PCT/DE1994/001397 WO1995016199A1 (de) 1993-12-09 1994-11-26 Isolationsschichtsystem zur galvanischen trennung von stromkreisen

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Publication number Priority date Publication date Assignee Title
DE19834276A1 (de) * 1998-07-30 2000-02-10 Bosch Gmbh Robert Abgassonde
JP4453166B2 (ja) * 2000-06-19 2010-04-21 株式会社デンソー 積層型ガスセンサ素子及びその製造方法
US6630062B1 (en) * 2000-08-04 2003-10-07 Delphi Technologies, Inc. Poison resistant sensor
DE10222791B4 (de) * 2002-05-23 2004-07-01 Robert Bosch Gmbh Heizeinrichtung
US7211180B2 (en) * 2003-02-10 2007-05-01 Robert Bosch Corporation Contamination-resistant gas sensor element
US20090101502A1 (en) * 2003-02-10 2009-04-23 Robert Bosch Gmbh Thermal Shock Resistant Gas Sensor Element
US8906214B2 (en) * 2003-02-10 2014-12-09 Robert Bosch Gmbh Contamination-resistant gas sensor element
DE102004016008A1 (de) 2004-04-01 2005-10-20 Bosch Gmbh Robert Keramisches Heizelement für Gassensoren
DE102007053427A1 (de) 2007-11-09 2009-05-14 Robert Bosch Gmbh Sensorelement mit Festelektrolyt und isoliertem leitenden Element
DE102008042427A1 (de) 2008-09-29 2010-04-01 Robert Bosch Gmbh Keramisches Sensorelement mit isoliertem leitenden Element
US9297791B2 (en) 2012-12-20 2016-03-29 Robert Bosch Gmbh Gas sensor with thermal shock protection

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348594A (en) * 1976-10-14 1978-05-02 Nissan Motor Oxygen sensor
DE2852647C2 (de) * 1978-12-06 1986-04-30 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur Herstellung eines Schichtsystems auf Festelektrolyten für elektrochemische Anwendungen
JPS57137850A (en) * 1981-02-20 1982-08-25 Nissan Motor Co Ltd Oxygen concentration measuring element
US4507394A (en) * 1982-12-24 1985-03-26 Ngk Insulators, Ltd. High electric resistant zirconia and/or hafnia ceramics
JPS6036948A (ja) * 1983-08-09 1985-02-26 Ngk Insulators Ltd 電気化学的装置
JP2502961B2 (ja) * 1984-04-26 1996-05-29 日本碍子株式会社 電気化学的装置の製造方法
US5169513A (en) * 1984-06-06 1992-12-08 Ngk Insulators, Ltd. Electrochemical element and method of making
JPH0646189B2 (ja) * 1985-01-25 1994-06-15 株式会社日立製作所 酸素濃度センサ
DE3673563D1 (de) * 1985-04-19 1990-09-27 Hitachi Ltd Sauerstoffuehlerelement und verfahren zum herstellen desselben.
DE3811713A1 (de) * 1988-04-08 1989-10-19 Bosch Gmbh Robert Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen
DE4303633A1 (de) * 1993-02-09 1994-08-11 Bosch Gmbh Robert Festelektrolytsensor mit integriertem Heizer
WO1995004273A1 (de) * 1993-07-27 1995-02-09 Robert Bosch Gmbh Elektrochemischer messfühler mit einem potential frei angeordneten sensorelement und verfahren zu seiner herstellung

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