KR960032751U - 쳄버내 웨이퍼 더블 로딩 방지장치 - Google Patents

쳄버내 웨이퍼 더블 로딩 방지장치

Info

Publication number
KR960032751U
KR960032751U KR2019950004574U KR19950004574U KR960032751U KR 960032751 U KR960032751 U KR 960032751U KR 2019950004574 U KR2019950004574 U KR 2019950004574U KR 19950004574 U KR19950004574 U KR 19950004574U KR 960032751 U KR960032751 U KR 960032751U
Authority
KR
South Korea
Prior art keywords
wafers
chamber
preventing double
double loading
loading
Prior art date
Application number
KR2019950004574U
Other languages
English (en)
Other versions
KR0130140Y1 (ko
Inventor
윤석철
이정호
이재민
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019950004574U priority Critical patent/KR0130140Y1/ko
Publication of KR960032751U publication Critical patent/KR960032751U/ko
Application granted granted Critical
Publication of KR0130140Y1 publication Critical patent/KR0130140Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950004574U 1995-03-16 1995-03-16 쳄버내 웨이퍼 더블 로딩 방지장치 KR0130140Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950004574U KR0130140Y1 (ko) 1995-03-16 1995-03-16 쳄버내 웨이퍼 더블 로딩 방지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950004574U KR0130140Y1 (ko) 1995-03-16 1995-03-16 쳄버내 웨이퍼 더블 로딩 방지장치

Publications (2)

Publication Number Publication Date
KR960032751U true KR960032751U (ko) 1996-10-24
KR0130140Y1 KR0130140Y1 (ko) 1999-02-01

Family

ID=19409309

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950004574U KR0130140Y1 (ko) 1995-03-16 1995-03-16 쳄버내 웨이퍼 더블 로딩 방지장치

Country Status (1)

Country Link
KR (1) KR0130140Y1 (ko)

Also Published As

Publication number Publication date
KR0130140Y1 (ko) 1999-02-01

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Legal Events

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