KR960024673A - 금속산화물 박막패턴 형성용 조성물 및 그 제조방법, 금속산화물 박막패턴의 형성방법 전자부품 및 광학부품의 제조방법, 및 박막의 형성방법 - Google Patents

금속산화물 박막패턴 형성용 조성물 및 그 제조방법, 금속산화물 박막패턴의 형성방법 전자부품 및 광학부품의 제조방법, 및 박막의 형성방법 Download PDF

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KR960024673A
KR960024673A KR1019950048147A KR19950048147A KR960024673A KR 960024673 A KR960024673 A KR 960024673A KR 1019950048147 A KR1019950048147 A KR 1019950048147A KR 19950048147 A KR19950048147 A KR 19950048147A KR 960024673 A KR960024673 A KR 960024673A
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thin film
forming
composition
metal oxide
film pattern
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카쯔미 오시
타다시 요네자와
노부유키 소야마
켄수케 카게야마
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아키모토 유무미
미쯔비시 마테리알 카부시키가이샤
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Abstract

금속알콕시드와, 니트로벤질알코올유도체, 니트로벤즈알데히드유도체, 니트로스티롤유도체, 니트로아세토페논유도체, 니트로아니졸유도체 및 니트로푸란유도체로 구성되는 군에서 선택된 1종 또는 2종 이상의 니트로기함유 화합물을 함유하는 금속산화물 박막패턴 형성용 조성물. 이 조성물을 기판에 도포하여 광조사하고, 조사부의 광분해반응에 의한 광조사부와 비조사부와의 용해도차를 이용해서 패터닝한다.
유기용매와 유기금속화합물을 함유하는 원료액에 광반응성 화합물을 첨가하고, 이 용액을 미스트화하고, 광을 조사하면서 미스트를 기판에 부착시킨다.

Description

금속산화물 박막패턴 형성용 조성물 및 그 제조방법, 금속산화물 박막패턴의 형성방법 전자부품 및 광학부품의 제조방법, 및 박막의 형성방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (30)

  1. 금속알콕시드를 함유하며, 광조사에 의해 금속산화물 박막패턴을 형성하기 위한 조성물에 있어서, 니트로벤질알코올유도체, 니트로벤즈알데히드유도체, 니트로스티롤유도체, 니트로아세토페논유도체, 니트로아니졸유도체 및 니트로푸란유도체로 구성되는 군에서 선택된 1종 또는 2종 이상의 니트로기함유 화합물을 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  2. 제1항에 있어서, 니트로기함유 화합물을 금속알콕시드에 대하여 0.05~6배몰 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  3. 제2항에 있어서, 니트로기함유 화합물을 금속알콕시드에 대하여 0.03~2배몰 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  4. 제1항에 있어서, 니트로벤질알코올유도체가 2-니트로벤질알코올인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  5. 제1항에 있어서, 니트로벤즈알데히드유도체가 2-니트로벤즈알데히드인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  6. 제1항에 있어서, 니트로벤즈알데히드유도체가 2,4-디니트로벤즈알데히드인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  7. 제1항에 있어서, 니트로스티롤유도체가 β-니트로스티롤인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  8. 제1항에 있어서, 니트로아세토페논유도체가 0-니트로아세토페논인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  9. 제1항에 있어서, 니트로아니졸유도체가 0-니트로아니졸인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  10. 제1항에 있어서, 니트로푸란유도체가 2-니트로푸란인 것을 특징으로 하는 금속 산화물 박막패턴 형성용 조성물.
  11. 제1항에 있어서, 니트로푸란유도체가 안티-5-니트로-2-푸랄독심인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  12. 제1항에 있어서, 니트로푸란유도체가 5-니트로-2-푸란산인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  13. 제1항에 있어서, 니트로푸란유도체가 5-니트로-2-프레알데히드인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  14. 제1항에 있어서, 또 조사광의 파장영역에 강한 흡수를 나타내지 않는 금속알콕시드의 안정화제를 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  15. 제14항에 있어서, 안정화제가 에탄올아민류, β-디케톤류, β-케토에스테르류, 카르복실산류, 글리콜류 및 글리콜에스테르류에서 선택된 1종 또는 2종 이상인 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  16. 제1항에 있어서, 금속알콕시드와 상기한 니트로기함유 화합물을 용매에 용해시켜 가열환류 하므로써 형성된 금속알콕시드와 니트로기함유 화합물의 복합체를 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  17. 제1항에 있어서, 2종 이상의 금속알콕시드를 함유하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  18. 제17항에 있어서, 2종 이상의 금속알콕시드가 복합알콕시드로서 함유되어 있는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물.
  19. 제1항의 조성물을 제조하는 방법에 있어서, 금속알콕시드와 상기한 니트로기함유 화합물을 용매중에서 가열환류하므로서, 미리 금속알콕시드와 니트로기함유 화합물의 복합체를 형성한 후, 다른 성분을 첨가하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물의 제조방법.
  20. 제14항의 조성물을 제조하는 방법에 있어서, 금속알콕시드와 상기한 니트로기함유 화합물을 용매중에서 가열환류하므로써, 미리 금속알콕시드와 니트로기함유 화합물의 복합체를 형성한 후, 안정화제를 첨가하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물의 제조방법.
  21. 제17항의 조성물을 제조하는 방법에 있어서, 2종 이상의 금속알콕시드를 용매중에서 가열환류하여 미리 복합알콕시드를 형성한 후, 다른 성분을 첨가하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물의 제조방법.
  22. 제17항의 조성물을 제조하는 방법에 있어서, 2종 이상의 금속알콕시드를 용매중에서 가열환류하여 복합알콕시드를 형성한 후, 상기한 니트로기함유 화합물을 첨가하여 가열환류하므로써 복합알콕시드와 니트로기함유 화합물의 복합체를 형성하고, 계속해서 안정화제를 첨가하는 것을 특징으로 하는 금속산화물 박막패턴 형성용 조성물의 제조방법.
  23. 제1항의 금속산화물 박막패턴 형성용 조성물을 기판에 도포한 후, 얻어진 도포막에 소정의 패턴에 따라서 광조사하고, 조사부의 광반응에 의해 생기는 광조사부와 비광조사부와의 용매에 대한 용해도차를 이용하여 그 도포막을 패턴하는 것을 특징으로 하는 금속산화물 박막패턴의 형성방법.
  24. 제23항의 방법에 따라서, 금속산화물 박막패턴을 보유하는 전자부품을 제조하는 것을 특징으로 하는 전자부품의 제조방법.
  25. 제23항의 방법에 따라서, 금속산화물 박막패턴을 보유하는 광학부품을 제조하는 것을 특징으로 하는 광학부품의 제조방법.
  26. 유기용매와 유기금속소화합물을 함유하는 원료액을 미스트화하고, 그 미스트를 가열한 기판에 부착시켜 그 기판위에 박판을 형성하는 방법에 있어서, 상기한 원료 액중에 광반응성 화합물을 첨가하는 동시에, 상기한 기판에 부착하는 미스트를 향하여 광을 조사하는 것을 특징으로 하는 박막의 형성방법.
  27. 제26항에 있어서, 광반응성 화합물의 니트로벤질알코올유도체, 니트로벤즈알데히드유도체, 니트로스티롤유도체, 니트로아세토페논유도체, 니트로아니졸유도체 및 니트로푸란유도체로 구성되는 군에서 선택된 1종 또는 2종 이상의 니트로기함유 화합물인 것을 특징으로 하는 박막의 형성방법.
  28. 제26항에 있어서, 원료액중 광반응성 화합물의 함유량이 유기금속화합물의 0.05~6배몰인 것을 특징으로 하는 박막의 형성방법.
  29. 제28항에 있어서, 원료액중 광반응성 화합물의 함유량이 유기금속화합물의 0.3~2배몰인 것을 특징으로 하는 박막의 형성방법.
  30. 제26항에 있어서, 기판이 SiO2막 패턴에 의한 0.5~5㎛의 단차가 형성된 Si웨이퍼인 것을 특징으로 하는 박막의 형성방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950048147A 1994-12-09 1995-12-09 금속산화물박막패턴형성용조성물및그제조방법,금속산화물박막패턴의형성방법,전자부품및광학부품의제조방법,및박막의형성방법 KR100294581B1 (ko)

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