KR960008571B1 - Manufacture method of semiconductor device - Google Patents
Manufacture method of semiconductor device Download PDFInfo
- Publication number
- KR960008571B1 KR960008571B1 KR93001844A KR930001844A KR960008571B1 KR 960008571 B1 KR960008571 B1 KR 960008571B1 KR 93001844 A KR93001844 A KR 93001844A KR 930001844 A KR930001844 A KR 930001844A KR 960008571 B1 KR960008571 B1 KR 960008571B1
- Authority
- KR
- South Korea
- Prior art keywords
- forming
- mask pattern
- etch mask
- conducting layer
- pattern
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/82—Electrodes with an enlarged surface, e.g. formed by texturisation
- H01L28/90—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions
- H01L28/92—Electrodes with an enlarged surface, e.g. formed by texturisation having vertical extensions made by patterning layers, e.g. by etching conductive layers
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93001844A KR960008571B1 (en) | 1993-02-11 | 1993-02-11 | Manufacture method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93001844A KR960008571B1 (en) | 1993-02-11 | 1993-02-11 | Manufacture method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
KR940020566A KR940020566A (ko) | 1994-09-16 |
KR960008571B1 true KR960008571B1 (en) | 1996-06-28 |
Family
ID=19350663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR93001844A KR960008571B1 (en) | 1993-02-11 | 1993-02-11 | Manufacture method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960008571B1 (ko) |
-
1993
- 1993-02-11 KR KR93001844A patent/KR960008571B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR940020566A (ko) | 1994-09-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
G160 | Decision to publish patent application | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20020507 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |