KR960007598A - 비스락톤계화합물 및 그 제조방법 - Google Patents

비스락톤계화합물 및 그 제조방법 Download PDF

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Publication number
KR960007598A
KR960007598A KR1019950026797A KR19950026797A KR960007598A KR 960007598 A KR960007598 A KR 960007598A KR 1019950026797 A KR1019950026797 A KR 1019950026797A KR 19950026797 A KR19950026797 A KR 19950026797A KR 960007598 A KR960007598 A KR 960007598A
Authority
KR
South Korea
Prior art keywords
preparation
bislactone
compounds
bislactone compounds
Prior art date
Application number
KR1019950026797A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR960007598A publication Critical patent/KR960007598A/ko

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07D—HETEROCYCLIC COMPOUNDS
    • C07D493/00—Heterocyclic compounds containing oxygen atoms as the only ring hetero atoms in the condensed system
    • C07D493/02—Heterocyclic compounds containing oxygen atoms as the only ring hetero atoms in the condensed system in which the condensed system contains two hetero rings
    • C07D493/04—Ortho-condensed systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives
KR1019950026797A 1994-08-29 1995-08-28 비스락톤계화합물 및 그 제조방법 KR960007598A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20348494A JP3303546B2 (ja) 1994-08-29 1994-08-29 ビスラクトン系化合物及びその製造方法

Publications (1)

Publication Number Publication Date
KR960007598A true KR960007598A (ko) 1996-03-22

Family

ID=16474925

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950026797A KR960007598A (ko) 1994-08-29 1995-08-28 비스락톤계화합물 및 그 제조방법

Country Status (5)

Country Link
US (1) US5591871A (ko)
EP (1) EP0699959A1 (ko)
JP (1) JP3303546B2 (ko)
KR (1) KR960007598A (ko)
TW (1) TW303363B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5665150A (en) * 1996-09-27 1997-09-09 Xerox Corporation Dye and ink compositions
JP4951941B2 (ja) * 2005-11-11 2012-06-13 三菱瓦斯化学株式会社 レジスト用化合物及び感放射線性組成物
KR100840784B1 (ko) * 2006-08-24 2008-06-23 삼성전자주식회사 반사 방지막 형성용 폴리머, 이를 포함하는 유기반사방지막 조성물 및 이를 이용한 패턴의 형성 방법
US7625695B2 (en) * 2006-08-24 2009-12-01 Samsung Electronics Co., Ltd. Polymers for anti-reflective coatings, anti-reflective coating compositions and methods of forming a pattern using the same
KR20130018159A (ko) * 2011-08-11 2013-02-20 스미또모 가가꾸 가부시키가이샤 화합물
JP7233871B2 (ja) * 2017-09-27 2023-03-07 住友化学株式会社 化合物、樹脂、レジスト組成物及びレジストパターンの製造方法
JP7220536B2 (ja) * 2017-09-27 2023-02-10 住友化学株式会社 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2044272B (en) * 1979-02-05 1983-03-16 Sandoz Ltd Stabilising polymers
JPS6317083A (ja) * 1986-07-10 1988-01-25 Nippon Synthetic Chem Ind Co Ltd:The 感熱記録材料
JPH04177351A (ja) 1990-11-13 1992-06-24 Hitachi Chem Co Ltd ポジ型ホトレジスト組成物およびレジストパターンの製造法
JPH05323598A (ja) 1992-05-20 1993-12-07 Hitachi Chem Co Ltd ポジ型ホトレジスト組成物およびレジストパターンの製造法

Also Published As

Publication number Publication date
JPH0859667A (ja) 1996-03-05
JP3303546B2 (ja) 2002-07-22
US5591871A (en) 1997-01-07
TW303363B (ko) 1997-04-21
EP0699959A1 (en) 1996-03-06

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