KR950021381U - Tweezers driving device for wafer transfer of semiconductor exposure equipment - Google Patents

Tweezers driving device for wafer transfer of semiconductor exposure equipment

Info

Publication number
KR950021381U
KR950021381U KR2019930028498U KR930028498U KR950021381U KR 950021381 U KR950021381 U KR 950021381U KR 2019930028498 U KR2019930028498 U KR 2019930028498U KR 930028498 U KR930028498 U KR 930028498U KR 950021381 U KR950021381 U KR 950021381U
Authority
KR
South Korea
Prior art keywords
driving device
wafer transfer
exposure equipment
semiconductor exposure
tweezers
Prior art date
Application number
KR2019930028498U
Other languages
Korean (ko)
Other versions
KR200156129Y1 (en
Inventor
홍종수
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019930028498U priority Critical patent/KR200156129Y1/en
Publication of KR950021381U publication Critical patent/KR950021381U/en
Application granted granted Critical
Publication of KR200156129Y1 publication Critical patent/KR200156129Y1/en

Links

KR2019930028498U 1993-12-18 1993-12-18 Apparatus for moving pincette used in transfering wafer of semiconductor exposing apparatus KR200156129Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930028498U KR200156129Y1 (en) 1993-12-18 1993-12-18 Apparatus for moving pincette used in transfering wafer of semiconductor exposing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930028498U KR200156129Y1 (en) 1993-12-18 1993-12-18 Apparatus for moving pincette used in transfering wafer of semiconductor exposing apparatus

Publications (2)

Publication Number Publication Date
KR950021381U true KR950021381U (en) 1995-07-28
KR200156129Y1 KR200156129Y1 (en) 1999-09-01

Family

ID=19371675

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930028498U KR200156129Y1 (en) 1993-12-18 1993-12-18 Apparatus for moving pincette used in transfering wafer of semiconductor exposing apparatus

Country Status (1)

Country Link
KR (1) KR200156129Y1 (en)

Also Published As

Publication number Publication date
KR200156129Y1 (en) 1999-09-01

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Legal Events

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Payment date: 20050523

Year of fee payment: 7

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