KR970046877U - Wafer holding mechanism of semiconductor manufacturing equipment - Google Patents

Wafer holding mechanism of semiconductor manufacturing equipment

Info

Publication number
KR970046877U
KR970046877U KR2019950055217U KR19950055217U KR970046877U KR 970046877 U KR970046877 U KR 970046877U KR 2019950055217 U KR2019950055217 U KR 2019950055217U KR 19950055217 U KR19950055217 U KR 19950055217U KR 970046877 U KR970046877 U KR 970046877U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
holding mechanism
manufacturing equipment
wafer holding
wafer
Prior art date
Application number
KR2019950055217U
Other languages
Korean (ko)
Other versions
KR0136812Y1 (en
Inventor
정상균
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950055217U priority Critical patent/KR0136812Y1/en
Publication of KR970046877U publication Critical patent/KR970046877U/en
Application granted granted Critical
Publication of KR0136812Y1 publication Critical patent/KR0136812Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950055217U 1995-12-30 1995-12-30 Wafer holder of semiconductor manufacture equipment KR0136812Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950055217U KR0136812Y1 (en) 1995-12-30 1995-12-30 Wafer holder of semiconductor manufacture equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950055217U KR0136812Y1 (en) 1995-12-30 1995-12-30 Wafer holder of semiconductor manufacture equipment

Publications (2)

Publication Number Publication Date
KR970046877U true KR970046877U (en) 1997-07-31
KR0136812Y1 KR0136812Y1 (en) 1999-03-20

Family

ID=19443642

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950055217U KR0136812Y1 (en) 1995-12-30 1995-12-30 Wafer holder of semiconductor manufacture equipment

Country Status (1)

Country Link
KR (1) KR0136812Y1 (en)

Also Published As

Publication number Publication date
KR0136812Y1 (en) 1999-03-20

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20051019

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee