KR960032725U - Semiconductor wafer exposure equipment - Google Patents

Semiconductor wafer exposure equipment

Info

Publication number
KR960032725U
KR960032725U KR2019950006008U KR19950006008U KR960032725U KR 960032725 U KR960032725 U KR 960032725U KR 2019950006008 U KR2019950006008 U KR 2019950006008U KR 19950006008 U KR19950006008 U KR 19950006008U KR 960032725 U KR960032725 U KR 960032725U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
exposure equipment
wafer exposure
equipment
semiconductor
Prior art date
Application number
KR2019950006008U
Other languages
Korean (ko)
Other versions
KR200194291Y1 (en
Inventor
라광일
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019950006008U priority Critical patent/KR200194291Y1/en
Publication of KR960032725U publication Critical patent/KR960032725U/en
Application granted granted Critical
Publication of KR200194291Y1 publication Critical patent/KR200194291Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019950006008U 1995-03-30 1995-03-30 Apparatus for exposing semiconductor wafer KR200194291Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950006008U KR200194291Y1 (en) 1995-03-30 1995-03-30 Apparatus for exposing semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950006008U KR200194291Y1 (en) 1995-03-30 1995-03-30 Apparatus for exposing semiconductor wafer

Publications (2)

Publication Number Publication Date
KR960032725U true KR960032725U (en) 1996-10-24
KR200194291Y1 KR200194291Y1 (en) 2000-09-01

Family

ID=19410299

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950006008U KR200194291Y1 (en) 1995-03-30 1995-03-30 Apparatus for exposing semiconductor wafer

Country Status (1)

Country Link
KR (1) KR200194291Y1 (en)

Also Published As

Publication number Publication date
KR200194291Y1 (en) 2000-09-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090526

Year of fee payment: 10

EXPY Expiration of term