KR940025559U - Quartz tweezer protection device of wafer transfer system - Google Patents

Quartz tweezer protection device of wafer transfer system

Info

Publication number
KR940025559U
KR940025559U KR2019930006532U KR930006532U KR940025559U KR 940025559 U KR940025559 U KR 940025559U KR 2019930006532 U KR2019930006532 U KR 2019930006532U KR 930006532 U KR930006532 U KR 930006532U KR 940025559 U KR940025559 U KR 940025559U
Authority
KR
South Korea
Prior art keywords
tweezer
quartz
protection device
transfer system
wafer transfer
Prior art date
Application number
KR2019930006532U
Other languages
Korean (ko)
Other versions
KR200148594Y1 (en
Inventor
김시봉
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019930006532U priority Critical patent/KR200148594Y1/en
Publication of KR940025559U publication Critical patent/KR940025559U/en
Application granted granted Critical
Publication of KR200148594Y1 publication Critical patent/KR200148594Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930006532U 1993-04-23 1993-04-23 Tweezer protection apparatus KR200148594Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930006532U KR200148594Y1 (en) 1993-04-23 1993-04-23 Tweezer protection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930006532U KR200148594Y1 (en) 1993-04-23 1993-04-23 Tweezer protection apparatus

Publications (2)

Publication Number Publication Date
KR940025559U true KR940025559U (en) 1994-11-18
KR200148594Y1 KR200148594Y1 (en) 1999-06-15

Family

ID=19354144

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930006532U KR200148594Y1 (en) 1993-04-23 1993-04-23 Tweezer protection apparatus

Country Status (1)

Country Link
KR (1) KR200148594Y1 (en)

Also Published As

Publication number Publication date
KR200148594Y1 (en) 1999-06-15

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
O032 Opposition [utility model]: request for opposition
O131 Decision on opposition [utility model]
O072 Maintenance of registration after opposition [utility model]: final registration of opposition
FPAY Annual fee payment

Payment date: 20040218

Year of fee payment: 6

LAPS Lapse due to unpaid annual fee