KR940027612U - Wafer fixing clipper for wafer transfer equipment - Google Patents

Wafer fixing clipper for wafer transfer equipment

Info

Publication number
KR940027612U
KR940027612U KR2019930008170U KR930008170U KR940027612U KR 940027612 U KR940027612 U KR 940027612U KR 2019930008170 U KR2019930008170 U KR 2019930008170U KR 930008170 U KR930008170 U KR 930008170U KR 940027612 U KR940027612 U KR 940027612U
Authority
KR
South Korea
Prior art keywords
wafer
transfer equipment
clipper
wafer transfer
fixing clipper
Prior art date
Application number
KR2019930008170U
Other languages
Korean (ko)
Other versions
KR960008150Y1 (en
Inventor
백영기
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019930008170U priority Critical patent/KR960008150Y1/en
Publication of KR940027612U publication Critical patent/KR940027612U/en
Application granted granted Critical
Publication of KR960008150Y1 publication Critical patent/KR960008150Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930008170U 1993-05-15 1993-05-15 Wafer holdtype clipper of wafer return device KR960008150Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930008170U KR960008150Y1 (en) 1993-05-15 1993-05-15 Wafer holdtype clipper of wafer return device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930008170U KR960008150Y1 (en) 1993-05-15 1993-05-15 Wafer holdtype clipper of wafer return device

Publications (2)

Publication Number Publication Date
KR940027612U true KR940027612U (en) 1994-12-10
KR960008150Y1 KR960008150Y1 (en) 1996-09-24

Family

ID=19355320

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930008170U KR960008150Y1 (en) 1993-05-15 1993-05-15 Wafer holdtype clipper of wafer return device

Country Status (1)

Country Link
KR (1) KR960008150Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101282589B1 (en) * 2011-12-08 2013-07-12 주식회사 케이씨텍 Substrate transfer apparatus and substrate transfer method

Also Published As

Publication number Publication date
KR960008150Y1 (en) 1996-09-24

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050824

Year of fee payment: 10

LAPS Lapse due to unpaid annual fee